DE59501367D1 - Mikromechanisches Relais - Google Patents

Mikromechanisches Relais

Info

Publication number
DE59501367D1
DE59501367D1 DE59501367T DE59501367T DE59501367D1 DE 59501367 D1 DE59501367 D1 DE 59501367D1 DE 59501367 T DE59501367 T DE 59501367T DE 59501367 T DE59501367 T DE 59501367T DE 59501367 D1 DE59501367 D1 DE 59501367D1
Authority
DE
Germany
Prior art keywords
micromechanical relay
micromechanical
relay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59501367T
Other languages
English (en)
Inventor
Helmut Dr Schlaak
Joachim Schimkat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of DE59501367D1 publication Critical patent/DE59501367D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
DE59501367T 1994-10-18 1995-10-04 Mikromechanisches Relais Expired - Fee Related DE59501367D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4437259A DE4437259C1 (de) 1994-10-18 1994-10-18 Mikromechanisches Relais

Publications (1)

Publication Number Publication Date
DE59501367D1 true DE59501367D1 (de) 1998-03-05

Family

ID=6531104

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4437259A Expired - Fee Related DE4437259C1 (de) 1994-10-18 1994-10-18 Mikromechanisches Relais
DE59501367T Expired - Fee Related DE59501367D1 (de) 1994-10-18 1995-10-04 Mikromechanisches Relais

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4437259A Expired - Fee Related DE4437259C1 (de) 1994-10-18 1994-10-18 Mikromechanisches Relais

Country Status (4)

Country Link
US (1) US5673785A (de)
EP (1) EP0710971B1 (de)
JP (1) JPH08227646A (de)
DE (2) DE4437259C1 (de)

Families Citing this family (55)

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US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7808694B2 (en) * 1994-05-05 2010-10-05 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7852545B2 (en) 1994-05-05 2010-12-14 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7898722B2 (en) * 1995-05-01 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical device with restoring electrode
US7929197B2 (en) * 1996-11-05 2011-04-19 Qualcomm Mems Technologies, Inc. System and method for a MEMS device
US7830588B2 (en) 1996-12-19 2010-11-09 Qualcomm Mems Technologies, Inc. Method of making a light modulating display device and associated transistor circuitry and structures thereof
FR2758170B1 (fr) * 1997-01-06 2002-02-22 Claude Oudet Dispositif de suspension d'un organe mobile
DE19736674C1 (de) * 1997-08-22 1998-11-26 Siemens Ag Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung
EP1024512B8 (de) * 1997-10-21 2005-03-23 Omron Corporation Elektrostatisches mikrorelais
DE19807214A1 (de) * 1998-02-20 1999-09-16 Siemens Ag Mikromechanisches elektrostatisches Relais
WO1999052006A2 (en) * 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
DE19823690C1 (de) * 1998-05-27 2000-01-05 Siemens Ag Mikromechanisches elektrostatisches Relais
DE19854450C2 (de) * 1998-11-25 2000-12-14 Tyco Electronics Logistics Ag Mikromechanisches elektrostatisches Relais
JP3119255B2 (ja) * 1998-12-22 2000-12-18 日本電気株式会社 マイクロマシンスイッチおよびその製造方法
US6236491B1 (en) 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
US6057520A (en) * 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
US6229683B1 (en) 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
DE19935819B4 (de) 1999-07-29 2004-08-05 Tyco Electronics Logistics Ag Relais und Verfahren zu dessen Herstellung
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US6396620B1 (en) 2000-10-30 2002-05-28 Mcnc Electrostatically actuated electromagnetic radiation shutter
DE10118195C1 (de) * 2001-04-11 2002-11-07 Siemens Ag Verwendung eines Schaltelements zum Schalten in einem Kernspintomographie-Gerät und Kernspintomographie-Gerät
FR2825768B1 (fr) * 2001-06-06 2004-03-12 Vibrachoc Sa Dispositif d'amortissement de vibrations
US6646215B1 (en) 2001-06-29 2003-11-11 Teravicin Technologies, Inc. Device adapted to pull a cantilever away from a contact structure
US6707355B1 (en) 2001-06-29 2004-03-16 Teravicta Technologies, Inc. Gradually-actuating micromechanical device
US6787438B1 (en) 2001-10-16 2004-09-07 Teravieta Technologies, Inc. Device having one or more contact structures interposed between a pair of electrodes
US7275562B2 (en) * 2001-10-17 2007-10-02 Agilent Technologies, Inc. Extensible spiral for flex circuit
JP2003181799A (ja) * 2001-12-14 2003-07-02 Omron Corp 接点支持機構、接点開閉器、計測装置及び無線機
EP1321957A1 (de) * 2001-12-19 2003-06-25 Abb Research Ltd. Mikrorelaiseinrichtung mit geschlitzter Membrane
US6686820B1 (en) * 2002-07-11 2004-02-03 Intel Corporation Microelectromechanical (MEMS) switching apparatus
US6621022B1 (en) * 2002-08-29 2003-09-16 Intel Corporation Reliable opposing contact structure
KR100662724B1 (ko) * 2004-01-27 2006-12-28 마츠시다 덴코 가부시키가이샤 마이크로 릴레이
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7102472B1 (en) 2004-05-06 2006-09-05 Northrop Grumman Corporation MEMS device
JP2008507673A (ja) 2004-07-23 2008-03-13 エイエフエイ・コントロールズ，リミテッド・ライアビリティ・カンパニー マイクロバルブアセンブリの動作方法および関連構造および関連デバイス
US7119943B2 (en) * 2004-08-19 2006-10-10 Teravicta Technologies, Inc. Plate-based microelectromechanical switch having a three-fold relative arrangement of contact structures and support arms
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7684106B2 (en) 2006-11-02 2010-03-23 Qualcomm Mems Technologies, Inc. Compatible MEMS switch architecture
JP4720760B2 (ja) * 2007-02-28 2011-07-13 パナソニック電工株式会社 マイクロリレー
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US8151509B2 (en) * 2009-08-24 2012-04-10 Raytheon Canada Limited Method and apparatus for adjustably supporting a component in an optical sight
DE102009047599A1 (de) 2009-12-07 2011-06-09 Ihp Gmbh - Innovations For High Performance Microelectronics / Leibniz-Institut Für Innovative Mikroelektronik Elektromechanischer Mikroschalter zur Schaltung eines elektrischen Signals, mikroelektromechanisches System, integrierte Schaltung und Verfahren zur Herstellung einer integrierten Schaltung
EP2556403A1 (de) 2010-04-09 2013-02-13 Qualcomm Mems Technologies, Inc. Mechanische schicht einer elektromechanischen vorrichtung und verfahren zu ihrer herstellung
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US10307032B2 (en) * 2015-06-05 2019-06-04 Shawn R. ALSTAD Cleansing apparatus and systems
SE2350284A1 (en) * 2023-03-14 2024-09-15 Myvox Ab A micro-electromechanical-system based micro speaker

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB897972A (en) * 1960-01-13 1962-06-06 Langham Thompson Ltd J Improvements in or relating to mechanical systems
US3968336A (en) * 1974-09-23 1976-07-06 Xerox Corporation Keyboard switch assembly having movable contact, and supporting helicline type legs disposed co-planar to common conductive sheet
US4066860A (en) * 1974-09-26 1978-01-03 Sharp Kabushiki Kaisha Pushbutton switch key arrangement for keyboards having indicia
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
DE4205340C1 (en) * 1992-02-21 1993-08-05 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay with parallel electrodes - has frame shaped armature substrate with armature contacts above base electrode contacts on base substrate

Also Published As

Publication number Publication date
DE4437259C1 (de) 1995-10-19
EP0710971A1 (de) 1996-05-08
US5673785A (en) 1997-10-07
EP0710971B1 (de) 1998-01-28
JPH08227646A (ja) 1996-09-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee