DE59403733D1 - Mikromechanisches relais mit hybridantrieb - Google Patents

Mikromechanisches relais mit hybridantrieb

Info

Publication number
DE59403733D1
DE59403733D1 DE59403733T DE59403733T DE59403733D1 DE 59403733 D1 DE59403733 D1 DE 59403733D1 DE 59403733 T DE59403733 T DE 59403733T DE 59403733 T DE59403733 T DE 59403733T DE 59403733 D1 DE59403733 D1 DE 59403733D1
Authority
DE
Germany
Prior art keywords
armature
piezo
pct
substrate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59403733T
Other languages
English (en)
Inventor
Hans-Juergen Gevatter
Lothar Kiesewetter
Joachim Schimkat
Helmut Schlaak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19934305033 external-priority patent/DE4305033A1/de
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of DE59403733D1 publication Critical patent/DE59403733D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0052—Special contact materials used for MEMS
    • H01H2001/0057—Special contact materials used for MEMS the contact materials containing refractory materials, e.g. tungsten
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes

Landscapes

  • Micromachines (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
DE59403733T 1993-02-18 1994-02-14 Mikromechanisches relais mit hybridantrieb Expired - Fee Related DE59403733D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19934305033 DE4305033A1 (de) 1992-02-21 1993-02-18 Mikromechanisches Relais mit Hybridantrieb
PCT/DE1994/000152 WO1994019819A1 (de) 1993-02-18 1994-02-14 Mikromechanisches relais mit hybridantrieb

Publications (1)

Publication Number Publication Date
DE59403733D1 true DE59403733D1 (de) 1997-09-18

Family

ID=6480807

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59403733T Expired - Fee Related DE59403733D1 (de) 1993-02-18 1994-02-14 Mikromechanisches relais mit hybridantrieb

Country Status (8)

Country Link
US (1) US5666258A (de)
EP (1) EP0685109B1 (de)
JP (1) JPH08506690A (de)
CN (1) CN1040049C (de)
AT (1) ATE156934T1 (de)
CA (1) CA2156257A1 (de)
DE (1) DE59403733D1 (de)
WO (1) WO1994019819A1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1517344B1 (de) * 1996-08-27 2007-06-06 Omron Corporation Matrix-Relais
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
FR2776160A1 (fr) * 1998-03-10 1999-09-17 Philips Consumer Communication Dispositif de commutation d'antenne entre des etages d'emission et de reception
US6320145B1 (en) * 1998-03-31 2001-11-20 California Institute Of Technology Fabricating and using a micromachined magnetostatic relay or switch
FI108583B (fi) * 1998-06-02 2002-02-15 Nokia Corp Resonaattorirakenteita
US6236491B1 (en) 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
US6229683B1 (en) 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
US6057520A (en) * 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
US6359374B1 (en) 1999-11-23 2002-03-19 Mcnc Miniature electrical relays using a piezoelectric thin film as an actuating element
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US6396620B1 (en) 2000-10-30 2002-05-28 Mcnc Electrostatically actuated electromagnetic radiation shutter
JP4109992B2 (ja) * 2001-01-30 2008-07-02 株式会社アドバンテスト スイッチ、及び集積化回路装置
KR100456771B1 (ko) * 2002-02-04 2004-11-12 주식회사 엠에스솔루션 고주파용 압전 스위칭 소자
US6784389B2 (en) * 2002-03-13 2004-08-31 Ford Global Technologies, Llc Flexible circuit piezoelectric relay
US7432788B2 (en) * 2003-06-27 2008-10-07 Memscap, Inc. Microelectromechanical magnetic switches having rotors that rotate into a recess in a substrate
GB0320405D0 (en) * 2003-08-30 2003-10-01 Qinetiq Ltd Micro electromechanical system switch
JP2005302711A (ja) * 2004-03-15 2005-10-27 Matsushita Electric Ind Co Ltd アクチュエータおよびその制御方法およびこれを用いたスイッチ
JP2008507673A (ja) 2004-07-23 2008-03-13 エイエフエイ・コントロールズ，リミテッド・ライアビリティ・カンパニー マイクロバルブアセンブリの動作方法および関連構造および関連デバイス
US7633213B2 (en) * 2005-03-15 2009-12-15 Panasonic Corporation Actuator, switch using the actuator, and method of controlling the actuator
JP4586642B2 (ja) * 2005-06-14 2010-11-24 ソニー株式会社 可動素子、ならびにその可動素子を内蔵する半導体デバイス、モジュールおよび電子機器
JP2007015067A (ja) * 2005-07-08 2007-01-25 Fujifilm Holdings Corp 微小薄膜可動素子及び微小薄膜可動素子アレイ並びに画像形成装置
KR20070053515A (ko) 2005-11-21 2007-05-25 삼성전자주식회사 Ｒｆ 멤스 스위치 및 그 제조방법
US7487678B2 (en) * 2006-12-13 2009-02-10 Honeywell International Inc. Z offset MEMS devices and methods
JP2008238330A (ja) 2007-03-27 2008-10-09 Toshiba Corp Ｍｅｍｓ装置およびこのｍｅｍｓ装置を有する携帯通信端末
JP2009238546A (ja) * 2008-03-26 2009-10-15 Panasonic Electric Works Co Ltd 微小電気機械スイッチ
JP5081038B2 (ja) * 2008-03-31 2012-11-21 パナソニック株式会社 Ｍｅｍｓスイッチおよびその製造方法
US8354899B2 (en) * 2009-09-23 2013-01-15 General Electric Company Switch structure and method
JP5812096B2 (ja) * 2011-10-06 2015-11-11 富士通株式会社 Ｍｅｍｓスイッチ
US9251984B2 (en) * 2012-12-27 2016-02-02 Intel Corporation Hybrid radio frequency component
US10825628B2 (en) * 2017-07-17 2020-11-03 Analog Devices Global Unlimited Company Electromagnetically actuated microelectromechanical switch

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU738009A1 (ru) * 1977-04-07 1980-05-30 За витель Электрод электростатического реле
GB2095911B (en) * 1981-03-17 1985-02-13 Standard Telephones Cables Ltd Electrical switch device
US4819126A (en) * 1988-05-19 1989-04-04 Pacific Bell Piezoelectic relay module to be utilized in an appliance or the like
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
DE4205340C1 (en) * 1992-02-21 1993-08-05 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay with parallel electrodes - has frame shaped armature substrate with armature contacts above base electrode contacts on base substrate

Also Published As

Publication number Publication date
EP0685109B1 (de) 1997-08-13
EP0685109A1 (de) 1995-12-06
CN1040049C (zh) 1998-09-30
ATE156934T1 (de) 1997-08-15
CA2156257A1 (en) 1994-09-01
WO1994019819A1 (de) 1994-09-01
CN1118199A (zh) 1996-03-06
JPH08506690A (ja) 1996-07-16
US5666258A (en) 1997-09-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee