DE59310175D1 - Elektrostatischer Deflektor mit allgemein zylindrischer Grundform - Google Patents

Elektrostatischer Deflektor mit allgemein zylindrischer Grundform

Info

Publication number
DE59310175D1
DE59310175D1 DE59310175T DE59310175T DE59310175D1 DE 59310175 D1 DE59310175 D1 DE 59310175D1 DE 59310175 T DE59310175 T DE 59310175T DE 59310175 T DE59310175 T DE 59310175T DE 59310175 D1 DE59310175 D1 DE 59310175D1
Authority
DE
Germany
Prior art keywords
generally cylindrical
basic shape
electrostatic deflector
cylindrical basic
deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59310175T
Other languages
English (en)
Inventor
Harald Ibach
Dieter Bruchmann
Sieghart Lehwald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Application granted granted Critical
Publication of DE59310175D1 publication Critical patent/DE59310175D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)
  • Particle Accelerators (AREA)
DE59310175T 1992-02-03 1993-01-30 Elektrostatischer Deflektor mit allgemein zylindrischer Grundform Expired - Lifetime DE59310175D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4202985 1992-02-03
DE4239866A DE4239866A1 (de) 1992-02-03 1992-11-27

Publications (1)

Publication Number Publication Date
DE59310175D1 true DE59310175D1 (de) 2001-07-26

Family

ID=25911471

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4239866A Withdrawn DE4239866A1 (de) 1992-02-03 1992-11-27
DE59310175T Expired - Lifetime DE59310175D1 (de) 1992-02-03 1993-01-30 Elektrostatischer Deflektor mit allgemein zylindrischer Grundform

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4239866A Withdrawn DE4239866A1 (de) 1992-02-03 1992-11-27

Country Status (3)

Country Link
US (1) US5357107A (de)
EP (1) EP0554814B1 (de)
DE (2) DE4239866A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5773823A (en) * 1993-09-10 1998-06-30 Seiko Instruments Inc. Plasma ion source mass spectrometer
JP3188794B2 (ja) * 1993-09-10 2001-07-16 セイコーインスツルメンツ株式会社 プラズマイオン源質量分析装置
US5506413A (en) * 1994-07-08 1996-04-09 The United States Of America As Represented By The Secretary Of The Air Force Spatial-focus energy analyzer
US6867414B2 (en) * 2002-09-24 2005-03-15 Ciphergen Biosystems, Inc. Electric sector time-of-flight mass spectrometer with adjustable ion optical elements
US6797951B1 (en) 2002-11-12 2004-09-28 The United States Of America As Represented By The Secretary Of The Air Force Laminated electrostatic analyzer
EP1946352A4 (de) * 2005-11-01 2010-10-13 Univ Colorado Mehrkanal-stromanalysegerät für geladene teilchen
JP2008089542A (ja) * 2006-10-05 2008-04-17 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡の探針制御方法
US8309936B2 (en) * 2009-02-27 2012-11-13 Trustees Of Columbia University In The City Of New York Ion deflector for two-dimensional control of ion beam cross sectional spread
US10361064B1 (en) 2018-02-28 2019-07-23 National Electrostatics Corp. Beam combiner

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3710103A (en) * 1971-12-03 1973-01-09 Varian Associates Planar retarding grid electron spectrometer
DE2620877C2 (de) * 1976-05-11 1982-07-22 Finnigan MAT GmbH, 2800 Bremen Elektrostatisches Toroidkondensatorprisma
DE2848538C2 (de) * 1978-11-09 1986-10-09 Leybold-Heraeus GmbH, 5000 Köln Elektronen- oder ionenoptische Einrichtung
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer
JPS61161645A (ja) 1985-01-09 1986-07-22 Natl Inst For Res In Inorg Mater 円筒静電型粒子エネルギ−分析器
JPH0299846A (ja) * 1988-10-07 1990-04-11 Toshiba Corp エネルギー分析装置

Also Published As

Publication number Publication date
EP0554814B1 (de) 2001-06-20
EP0554814A1 (de) 1993-08-11
DE4239866A1 (de) 1993-08-05
US5357107A (en) 1994-10-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition