DE59104080D1 - DEVICE FOR THE ELECTROLYTIC REGENERATION OF AN ETCHER CONTAINING CHLORIDE AND METALLIONS. - Google Patents

DEVICE FOR THE ELECTROLYTIC REGENERATION OF AN ETCHER CONTAINING CHLORIDE AND METALLIONS.

Info

Publication number
DE59104080D1
DE59104080D1 DE59104080T DE59104080T DE59104080D1 DE 59104080 D1 DE59104080 D1 DE 59104080D1 DE 59104080 T DE59104080 T DE 59104080T DE 59104080 T DE59104080 T DE 59104080T DE 59104080 D1 DE59104080 D1 DE 59104080D1
Authority
DE
Germany
Prior art keywords
metallions
containing chloride
electrolytic regeneration
etcher
etcher containing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59104080T
Other languages
German (de)
Inventor
Heribert Reith
Hans Lander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HOELLMUELLER MASCHBAU H
Robert Bosch GmbH
Original Assignee
HOELLMUELLER MASCHBAU H
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HOELLMUELLER MASCHBAU H, Robert Bosch GmbH filed Critical HOELLMUELLER MASCHBAU H
Application granted granted Critical
Publication of DE59104080D1 publication Critical patent/DE59104080D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)
  • ing And Chemical Polishing (AREA)
DE59104080T 1990-03-29 1991-02-23 DEVICE FOR THE ELECTROLYTIC REGENERATION OF AN ETCHER CONTAINING CHLORIDE AND METALLIONS. Expired - Fee Related DE59104080D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4010035A DE4010035A1 (en) 1990-03-29 1990-03-29 DEVICE FOR ELECTROLYTIC REGENERATION OF AN ACID CONTAINING CHLORIDE AND METALLIONS
PCT/EP1991/000340 WO1991014800A1 (en) 1990-03-29 1991-02-23 Device for the electrolytic regeneration of an etching agent containing chloride and metallic ions

Publications (1)

Publication Number Publication Date
DE59104080D1 true DE59104080D1 (en) 1995-02-09

Family

ID=6403287

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4010035A Withdrawn DE4010035A1 (en) 1990-03-29 1990-03-29 DEVICE FOR ELECTROLYTIC REGENERATION OF AN ACID CONTAINING CHLORIDE AND METALLIONS
DE59104080T Expired - Fee Related DE59104080D1 (en) 1990-03-29 1991-02-23 DEVICE FOR THE ELECTROLYTIC REGENERATION OF AN ETCHER CONTAINING CHLORIDE AND METALLIONS.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4010035A Withdrawn DE4010035A1 (en) 1990-03-29 1990-03-29 DEVICE FOR ELECTROLYTIC REGENERATION OF AN ACID CONTAINING CHLORIDE AND METALLIONS

Country Status (4)

Country Link
EP (1) EP0521867B1 (en)
JP (1) JPH05505645A (en)
DE (2) DE4010035A1 (en)
WO (1) WO1991014800A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2008766B2 (en) * 1970-02-23 1971-07-29 Licentia Patent Verwaltungs GmbH, 6000 Frankfurt Regenerating cupric chloride etching - solution enriched with cuprous chloride
US3764503A (en) * 1972-01-19 1973-10-09 Dart Ind Inc Electrodialysis regeneration of metal containing acid solutions
DE2241462A1 (en) * 1972-08-23 1974-03-07 Bach & Co Cupric chloride-contg etching soln regeneration - by oxidising cuprous chloride and recovery of hydrogen chloride and oxygen using part of cupric chloride
DE2650912A1 (en) * 1976-11-06 1978-05-18 Hoellmueller Maschbau H Electrolytic regeneration of copper etching reagent - contg. chloride and cuprous ion, with control of copper concn. in reagent and current density
DE3330349A1 (en) * 1983-08-23 1985-03-14 Robert Bosch Gmbh, 7000 Stuttgart PROCESS FOR ELECTROCHEMICAL COMPENSATION OF AIR OXIDATION DURING THE ELECTROCHEMICAL REGENERATION OF CHLORIDE-CONTAINING COPPER ETCH SOLUTIONS
DE3738996A1 (en) * 1986-12-02 1988-06-30 Robotron Veb K Method and appliance for the deposition of copper from ammoniacal copper chloride solutions

Also Published As

Publication number Publication date
JPH05505645A (en) 1993-08-19
DE4010035A1 (en) 1991-10-02
WO1991014800A1 (en) 1991-10-03
EP0521867B1 (en) 1994-12-28
EP0521867A1 (en) 1993-01-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee