DE4396523T1 - Halbleiter-Drucksensor - Google Patents
Halbleiter-DrucksensorInfo
- Publication number
- DE4396523T1 DE4396523T1 DE4396523T DE4396523T DE4396523T1 DE 4396523 T1 DE4396523 T1 DE 4396523T1 DE 4396523 T DE4396523 T DE 4396523T DE 4396523 T DE4396523 T DE 4396523T DE 4396523 T1 DE4396523 T1 DE 4396523T1
- Authority
- DE
- Germany
- Prior art keywords
- pressure sensor
- semiconductor pressure
- semiconductor
- sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
- G01L19/143—Two part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33141492 | 1992-12-11 | ||
PCT/JP1993/001771 WO1994014042A1 (en) | 1992-12-11 | 1993-12-06 | Semiconductor type pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
DE4396523T1 true DE4396523T1 (de) | 1997-07-31 |
Family
ID=18243416
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4396523A Expired - Fee Related DE4396523C2 (de) | 1992-12-11 | 1993-12-06 | Halbleiter-Drucksensor |
DE4396523T Pending DE4396523T1 (de) | 1992-12-11 | 1993-12-06 | Halbleiter-Drucksensor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4396523A Expired - Fee Related DE4396523C2 (de) | 1992-12-11 | 1993-12-06 | Halbleiter-Drucksensor |
Country Status (3)
Country | Link |
---|---|
US (1) | US5565629A (de) |
DE (2) | DE4396523C2 (de) |
WO (1) | WO1994014042A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004132726A (ja) * | 2002-10-08 | 2004-04-30 | Denso Corp | 圧力センサ |
JP2015169594A (ja) * | 2014-03-10 | 2015-09-28 | 横河電機株式会社 | ダイアフラム |
US10739224B2 (en) | 2018-09-26 | 2020-08-11 | Honeywell International Inc. | Systems and methods to secure flame spread restriction of individual sub-modules in an ultrasonic gas leak detector |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2968943A (en) * | 1956-10-29 | 1961-01-24 | Statham Instrument Inc | Transducer |
JPS5543819A (en) * | 1978-09-22 | 1980-03-27 | Hitachi Ltd | Pressure detecting equipment |
JPS5733334A (en) * | 1980-08-05 | 1982-02-23 | Yokogawa Hokushin Electric Corp | Construction of diaphragm in differential pressure and pressure transmitter |
JPH0665974B2 (ja) * | 1982-03-31 | 1994-08-24 | 株式会社日立製作所 | 圧力センサユニツトの製造方法 |
JPS6049441A (ja) * | 1983-08-29 | 1985-03-18 | Fuji Xerox Co Ltd | デ−タ処理装置 |
JPS60104745A (ja) * | 1983-11-12 | 1985-06-10 | Mitsubishi Motors Corp | デイ−ゼルエンジンの制御装置 |
JPS60104745U (ja) * | 1983-12-22 | 1985-07-17 | 横河電機株式会社 | 受圧カプセル |
US4527434A (en) * | 1984-05-10 | 1985-07-09 | The Babcock & Wilcox Company | Cylindrical force transducer beam |
JPS61203337A (ja) * | 1985-03-07 | 1986-09-09 | ラヴアニヤ−ニ ダニエラ | 容器 |
JPS61203337U (de) * | 1985-06-11 | 1986-12-20 | ||
JPS628470A (ja) * | 1985-07-04 | 1987-01-16 | Meidensha Electric Mfg Co Ltd | 静止型亜鉛−臭素電池の反転方法 |
JPH0824197B2 (ja) * | 1986-08-08 | 1996-03-06 | 日本電装株式会社 | 圧力測定器 |
US4768382A (en) * | 1987-04-23 | 1988-09-06 | Honeywell Inc. | Method of producing a uniform fluid-tight seal between a thin, flexible member and a support and an apparatus utilizing the same |
JPH0820326B2 (ja) * | 1988-03-29 | 1996-03-04 | 日本電装株式会社 | 半導体式圧力センサ |
US5000047A (en) * | 1988-03-29 | 1991-03-19 | Nippondenso Co., Ltd. | Pressure sensor |
JP2764993B2 (ja) * | 1989-02-07 | 1998-06-11 | 株式会社デンソー | 半導体圧力検出装置 |
DE8915981U1 (de) * | 1989-02-23 | 1992-10-01 | Kristal Instrumente AG, Winterthur | Plattenförmiges Sensorelement sowie damit versehener Druck-, Kraft- oder Beschleunigungsaufnehmer |
JP2524236B2 (ja) * | 1990-01-30 | 1996-08-14 | タツタ電線株式会社 | 圧力検出装置 |
JP2503290B2 (ja) * | 1990-05-21 | 1996-06-05 | 株式会社日立製作所 | 半導体圧力・差圧測定ダイヤフラム |
KR930011091B1 (ko) * | 1990-06-08 | 1993-11-20 | 미쯔비시 덴끼 가부시끼가이샤 | 압력 센서 |
JP2864716B2 (ja) * | 1990-10-30 | 1999-03-08 | 株式会社デンソー | 半導体圧力検出装置 |
US5095755A (en) * | 1990-11-01 | 1992-03-17 | Rosemount Inc. | Isolator for pressure transmitter |
JPH04204130A (ja) * | 1990-11-30 | 1992-07-24 | Yokogawa Electric Corp | 圧力測定装置 |
US5161415A (en) * | 1991-04-11 | 1992-11-10 | Mitsubishi Denki K.K. | Pressure sensor |
-
1993
- 1993-12-06 DE DE4396523A patent/DE4396523C2/de not_active Expired - Fee Related
- 1993-12-06 DE DE4396523T patent/DE4396523T1/de active Pending
- 1993-12-06 WO PCT/JP1993/001771 patent/WO1994014042A1/ja active Application Filing
- 1993-12-06 US US08/284,583 patent/US5565629A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE4396523C2 (de) | 1998-04-09 |
US5565629A (en) | 1996-10-15 |
WO1994014042A1 (en) | 1994-06-23 |
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