DE4134632C1 - - Google Patents

Info

Publication number
DE4134632C1
DE4134632C1 DE4134632A DE4134632A DE4134632C1 DE 4134632 C1 DE4134632 C1 DE 4134632C1 DE 4134632 A DE4134632 A DE 4134632A DE 4134632 A DE4134632 A DE 4134632A DE 4134632 C1 DE4134632 C1 DE 4134632C1
Authority
DE
Germany
Prior art keywords
rectifier
period
outer electrode
metallization
goods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE4134632A
Other languages
German (de)
English (en)
Inventor
Egon 8501 Feucht De Huebel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Schering AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schering AG filed Critical Schering AG
Priority to DE4134632A priority Critical patent/DE4134632C1/de
Priority to AT92117700T priority patent/ATE149584T1/de
Priority to EP92117700A priority patent/EP0568728B1/de
Priority to DE59208131T priority patent/DE59208131D1/de
Priority to ES92117700T priority patent/ES2098411T3/es
Application granted granted Critical
Publication of DE4134632C1 publication Critical patent/DE4134632C1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/615—Microstructure of the layers, e.g. mixed structure
    • C25D5/617—Crystalline layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1518—Vertically held PCB
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1572—Processing both sides of a PCB by the same process; Providing a similar arrangement of components on both sides; Making interlayer connections from two sides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • H05K3/0088—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor for treatment of holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
    • H05K3/427—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in metal-clad substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
DE4134632A 1991-10-19 1991-10-19 Expired - Fee Related DE4134632C1 (enExample)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE4134632A DE4134632C1 (enExample) 1991-10-19 1991-10-19
AT92117700T ATE149584T1 (de) 1991-10-19 1992-10-16 Verfahren zum galvanisieren von mit lochungen versehenen werkstücken, sowie anordnung zur durchführung dieses verfahrens
EP92117700A EP0568728B1 (de) 1991-10-19 1992-10-16 Verfahren zum Galvanisieren von mit Lochungen versehenen Werkstücken, sowie Anordnung zur Durchführung dieses Verfahrens
DE59208131T DE59208131D1 (de) 1991-10-19 1992-10-16 Verfahren zum Galvanisieren von mit Lochungen versehenen Werkstücken, sowie Anordnung zur Durchführung dieses Verfahrens
ES92117700T ES2098411T3 (es) 1991-10-19 1992-10-16 Procedimiento para la galvanizacion de articulos perforados, asi como disposicion para la realizacion de este procedimiento.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4134632A DE4134632C1 (enExample) 1991-10-19 1991-10-19

Publications (1)

Publication Number Publication Date
DE4134632C1 true DE4134632C1 (enExample) 1993-04-01

Family

ID=6443030

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4134632A Expired - Fee Related DE4134632C1 (enExample) 1991-10-19 1991-10-19
DE59208131T Expired - Fee Related DE59208131D1 (de) 1991-10-19 1992-10-16 Verfahren zum Galvanisieren von mit Lochungen versehenen Werkstücken, sowie Anordnung zur Durchführung dieses Verfahrens

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE59208131T Expired - Fee Related DE59208131D1 (de) 1991-10-19 1992-10-16 Verfahren zum Galvanisieren von mit Lochungen versehenen Werkstücken, sowie Anordnung zur Durchführung dieses Verfahrens

Country Status (4)

Country Link
EP (1) EP0568728B1 (enExample)
AT (1) ATE149584T1 (enExample)
DE (2) DE4134632C1 (enExample)
ES (1) ES2098411T3 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10209365C1 (de) * 2002-02-24 2003-02-20 Egon Huebel Verfahren und Vorrichtung zur elektrolytischen Metallisierung von Lochwänden und Strukturen
DE10342200A1 (de) * 2003-09-13 2005-04-14 Daimlerchrysler Ag Vorrichtung zur elektrochemischen Abscheidung
EP3029178A1 (en) * 2014-12-05 2016-06-08 ATOTECH Deutschland GmbH Method and apparatus for electroplating a metal onto a substrate

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19607277A1 (de) * 1995-03-29 1996-10-02 Bosch Gmbh Robert Lochscheibe, insbesondere für Einspritzventile
DE10311575B4 (de) * 2003-03-10 2007-03-22 Atotech Deutschland Gmbh Verfahren zum elektrolytischen Metallisieren von Werkstücken mit Bohrungen mit einem hohen Aspektverhältnis

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3005759A (en) * 1959-04-24 1961-10-24 American Zinc Inst Zinc electroplating
US3790451A (en) * 1969-08-29 1974-02-05 Richardson Chemical Co Electrodeposition of copper from sulfur-free cyanide electrolytes using periodic reverse current
US4396467A (en) * 1980-10-27 1983-08-02 General Electric Company Periodic reverse current pulsing to form uniformly sized feed through conductors
US4666567A (en) * 1981-07-31 1987-05-19 The Boeing Company Automated alternating polarity pulse electrolytic processing of electrically conductive substances

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3005759A (en) * 1959-04-24 1961-10-24 American Zinc Inst Zinc electroplating
US3790451A (en) * 1969-08-29 1974-02-05 Richardson Chemical Co Electrodeposition of copper from sulfur-free cyanide electrolytes using periodic reverse current
US4396467A (en) * 1980-10-27 1983-08-02 General Electric Company Periodic reverse current pulsing to form uniformly sized feed through conductors
US4666567A (en) * 1981-07-31 1987-05-19 The Boeing Company Automated alternating polarity pulse electrolytic processing of electrically conductive substances

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
J. Elektrochem. Soc., Vol. 138, No. 4, (1991), 1010-1017 *
Pat. Abstr. of JP, C-532, Vol. 12, No. 365 (=JP 63-1 18 093 A) *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10209365C1 (de) * 2002-02-24 2003-02-20 Egon Huebel Verfahren und Vorrichtung zur elektrolytischen Metallisierung von Lochwänden und Strukturen
WO2003072855A1 (de) * 2002-02-24 2003-09-04 Huebel Egon Verfahren und vorrichtungen zur elektrolytischen metallisierung von lochwänden und strukturen
DE10342200A1 (de) * 2003-09-13 2005-04-14 Daimlerchrysler Ag Vorrichtung zur elektrochemischen Abscheidung
EP3029178A1 (en) * 2014-12-05 2016-06-08 ATOTECH Deutschland GmbH Method and apparatus for electroplating a metal onto a substrate
WO2016087507A1 (en) * 2014-12-05 2016-06-09 Atotech Deutschland Gmbh Method and apparatus for electroplating a metal onto a substrate
CN107109677A (zh) * 2014-12-05 2017-08-29 埃托特克德国有限公司 用来在衬底上电镀金属的方法及设备
CN107109677B (zh) * 2014-12-05 2019-04-09 埃托特克德国有限公司 用来在衬底上电镀金属的方法及设备
US10501860B2 (en) 2014-12-05 2019-12-10 Atotech Deutschland Gmbh Method and apparatus for electroplating a metal onto a substrate
US11015257B2 (en) 2014-12-05 2021-05-25 Atotech Deutschland Gmbh Method and apparatus for electroplating a metal onto a substrate

Also Published As

Publication number Publication date
EP0568728B1 (de) 1997-03-05
DE59208131D1 (de) 1997-04-10
EP0568728A2 (de) 1993-11-10
ES2098411T3 (es) 1997-05-01
EP0568728A3 (de) 1994-10-19
ATE149584T1 (de) 1997-03-15

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Legal Events

Date Code Title Description
8100 Publication of patent without earlier publication of application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ATOTECH DEUTSCHLAND GMBH, 10553 BERLIN, DE

8339 Ceased/non-payment of the annual fee