DE4113122A1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE4113122A1
DE4113122A1 DE19914113122 DE4113122A DE4113122A1 DE 4113122 A1 DE4113122 A1 DE 4113122A1 DE 19914113122 DE19914113122 DE 19914113122 DE 4113122 A DE4113122 A DE 4113122A DE 4113122 A1 DE4113122 A1 DE 4113122A1
Authority
DE
Germany
Prior art keywords
rotor
vacuum pump
cylindrical
gas
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19914113122
Other languages
German (de)
English (en)
Inventor
Hideki Enosawa
Yuichi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Publication of DE4113122A1 publication Critical patent/DE4113122A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE19914113122 1990-04-25 1991-04-22 Vakuumpumpe Withdrawn DE4113122A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4434990U JPH046593U (enrdf_load_html_response) 1990-04-25 1990-04-25

Publications (1)

Publication Number Publication Date
DE4113122A1 true DE4113122A1 (de) 1991-10-31

Family

ID=12689038

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19914113122 Withdrawn DE4113122A1 (de) 1990-04-25 1991-04-22 Vakuumpumpe

Country Status (2)

Country Link
JP (1) JPH046593U (enrdf_load_html_response)
DE (1) DE4113122A1 (enrdf_load_html_response)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0779434A1 (en) * 1995-12-12 1997-06-18 The BOC Group plc Improvements in vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
US20130164124A1 (en) * 2010-09-28 2013-06-27 Edwards Japan Limited Exhaust pump
US20130170955A1 (en) * 2010-09-28 2013-07-04 Edwards Japan Limited Exhaust pump
CN105556128A (zh) * 2013-09-30 2016-05-04 埃地沃兹日本有限公司 螺纹槽泵机构、使用该螺纹槽泵机构的真空泵、及用于前述螺纹槽泵机构的转子、外周侧定子及内周侧定子
EP3623634A1 (de) * 2019-08-13 2020-03-18 Pfeiffer Vacuum Gmbh Vakuumpumpe umfassend eine holweckpumpstufe und eine seitenkanalpumpstufe

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9388816B2 (en) * 2010-09-06 2016-07-12 Edwards Japan Limited Turbo-molecular pump
JP5989645B2 (ja) * 2011-07-14 2016-09-07 エドワーズ株式会社 ネジ溝式真空ポンプ及びこれを使用した真空排気システム

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0779434A1 (en) * 1995-12-12 1997-06-18 The BOC Group plc Improvements in vacuum pumps
US5772395A (en) * 1995-12-12 1998-06-30 The Boc Group Plc Vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
EP0828080A3 (de) * 1996-08-10 1998-10-14 Pfeiffer Vacuum GmbH Gasreibungspumpe
US5893702A (en) * 1996-08-10 1999-04-13 Pfeiffer Vacuum Gmbh Gas friction pump
EP2623792A4 (en) * 2010-09-28 2017-12-13 Edwards Japan Limited Exhaust pump
US20130170955A1 (en) * 2010-09-28 2013-07-04 Edwards Japan Limited Exhaust pump
US9416784B2 (en) * 2010-09-28 2016-08-16 Edwards Japan Limited Exhaust pump
US9790946B2 (en) * 2010-09-28 2017-10-17 Edwards Japan Limited Exhaust pump
US20130164124A1 (en) * 2010-09-28 2013-06-27 Edwards Japan Limited Exhaust pump
CN105556128A (zh) * 2013-09-30 2016-05-04 埃地沃兹日本有限公司 螺纹槽泵机构、使用该螺纹槽泵机构的真空泵、及用于前述螺纹槽泵机构的转子、外周侧定子及内周侧定子
US20160222971A1 (en) * 2013-09-30 2016-08-04 Edwards Japan Limited Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism
EP3054165A4 (en) * 2013-09-30 2017-04-19 Edwards Japan Limited Thread groove pump mechanism, vacuum pump using this thread groove pump mechanism, and rotor, outer-circumferential stator, and inner-circumferential stator used in this thread screw pump mechanism
US10253777B2 (en) * 2013-09-30 2019-04-09 Edwards Japan Limited Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism
CN105556128B (zh) * 2013-09-30 2019-07-09 埃地沃兹日本有限公司 螺纹槽泵机构、使用该螺纹槽泵机构的真空泵、及用于前述螺纹槽泵机构的转子、外周侧定子及内周侧定子
EP3623634A1 (de) * 2019-08-13 2020-03-18 Pfeiffer Vacuum Gmbh Vakuumpumpe umfassend eine holweckpumpstufe und eine seitenkanalpumpstufe

Also Published As

Publication number Publication date
JPH046593U (enrdf_load_html_response) 1992-01-21

Similar Documents

Publication Publication Date Title
DE69405789T2 (de) Seitenkanalpumpe und Gehäuse dafür
DE4300368C2 (de) Elektrische Kraftstoffpumpe
DE2223156C2 (de) Flügelzellenverdichter
DE69600306T2 (de) Turbomolekularpumpe
EP2691655A1 (de) Diagonalventilator
DE3932228A1 (de) Turbovakuumpumpe
DE60313493T2 (de) Vakuumpumpe
DE102009021620B4 (de) Vakuumpumpe
DE4113122A1 (de) Vakuumpumpe
DE3713534A1 (de) Turbo-molekularpumpe
DE2331614A1 (de) Seitenkanal-geblaese
EP1585951A1 (de) Lecksuchger t mit einem einlass
DE10105672A1 (de) Spindelvorrichtung mit Turbinenrotor
DE102007003088B3 (de) Strömungsmaschine in einem angetriebenen Rotor
EP3851680B1 (de) Molekularvakuumpumpe und verfahren zum beeinflussen des saugvermögens einer solchen
DE4327506C2 (de) Turbovakuumpumpe
DE2602543A1 (de) Drehschieberpumpe
DE60319585T2 (de) Vakuumpumpe
EP1013294A1 (de) Diagonalflusspumpe
DE4209126A1 (de) Seitenkanal-fluessigkeitspumpe
EP2253851A2 (de) Vakuumpumpe
DE69928172T2 (de) Vacuumpumpe
EP0363503A1 (de) Pumpenstufe für eine Hochvakuumpumpe
EP4108931A1 (de) Molekularvakuumpumpe mit verbessertem saugvermögen sowie verfahren zum betreiben einer molekularvakuumpumpe zur erzielung eines verbesserten saugvermögens
DE102004022962B4 (de) Zentrifugallüfter und Gehäuse davon

Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee