DE4041027C1 - - Google Patents

Info

Publication number
DE4041027C1
DE4041027C1 DE4041027A DE4041027A DE4041027C1 DE 4041027 C1 DE4041027 C1 DE 4041027C1 DE 4041027 A DE4041027 A DE 4041027A DE 4041027 A DE4041027 A DE 4041027A DE 4041027 C1 DE4041027 C1 DE 4041027C1
Authority
DE
Germany
Prior art keywords
vacuum chamber
circuit board
signal
component
adapter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE4041027A
Other languages
German (de)
English (en)
Inventor
Friedbert Gelzer
Volker 8900 Augsburg De Wuerttenberger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wincor Nixdorf International GmbH
Original Assignee
Siemens Nixdorf Informationssysteme AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Nixdorf Informationssysteme AG filed Critical Siemens Nixdorf Informationssysteme AG
Priority to DE4041027A priority Critical patent/DE4041027C1/de
Priority to EP19910120969 priority patent/EP0492217A3/de
Priority to JP3353478A priority patent/JPH0536771A/ja
Priority to US07/811,268 priority patent/US5216360A/en
Application granted granted Critical
Publication of DE4041027C1 publication Critical patent/DE4041027C1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE4041027A 1990-12-20 1990-12-20 Expired - Lifetime DE4041027C1 (enExample)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE4041027A DE4041027C1 (enExample) 1990-12-20 1990-12-20
EP19910120969 EP0492217A3 (en) 1990-12-20 1991-12-06 Test apparatus for electronic components
JP3353478A JPH0536771A (ja) 1990-12-20 1991-12-17 デバイス試験装置
US07/811,268 US5216360A (en) 1990-12-20 1991-12-20 Vacuum-tight signal lines in a testing apparatus for components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4041027A DE4041027C1 (enExample) 1990-12-20 1990-12-20

Publications (1)

Publication Number Publication Date
DE4041027C1 true DE4041027C1 (enExample) 1992-06-25

Family

ID=6420933

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4041027A Expired - Lifetime DE4041027C1 (enExample) 1990-12-20 1990-12-20

Country Status (4)

Country Link
US (1) US5216360A (enExample)
EP (1) EP0492217A3 (enExample)
JP (1) JPH0536771A (enExample)
DE (1) DE4041027C1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5378984A (en) * 1992-01-20 1995-01-03 Advantest Corporation EB type IC tester
JP2879811B2 (ja) * 1993-07-02 1999-04-05 矢崎総業株式会社 暗電流ヒューズの断続機構及びそれを備えた電気接続箱
US5528161A (en) * 1994-09-15 1996-06-18 Venturedyne Limited Through-port load carrier and related test apparatus
JP3083061B2 (ja) * 1995-01-20 2000-09-04 矢崎総業株式会社 ヒューズ接続構造

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4864228A (en) * 1985-03-15 1989-09-05 Fairchild Camera And Instrument Corporation Electron beam test probe for integrated circuit testing
WO1987001813A1 (en) * 1985-09-23 1987-03-26 Sharetree Limited An oven for the burn-in of integrated circuits
JPS62213053A (ja) * 1986-03-13 1987-09-18 Nippon Telegr & Teleph Corp <Ntt> 電子ビ−ム試験装置
US4875004A (en) * 1988-06-01 1989-10-17 The United States Of America As Represented By The Secretary Of The Army High speed semiconductor characterization technique
US5041783A (en) * 1989-02-13 1991-08-20 Olympus Optical Co., Ltd. Probe unit for an atomic probe microscope
US5039938A (en) * 1990-06-21 1991-08-13 Hughes Aircraft Company Phosphor glow testing of hybrid substrates

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Prospekt der Firma Schlumberger: Technologie IDS 4000 "Integrated Diagnostic System" *

Also Published As

Publication number Publication date
JPH0536771A (ja) 1993-02-12
EP0492217A3 (en) 1992-12-09
EP0492217A2 (de) 1992-07-01
US5216360A (en) 1993-06-01

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Legal Events

Date Code Title Description
8100 Publication of the examined application without publication of unexamined application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee