DE3923595C1 - - Google Patents

Info

Publication number
DE3923595C1
DE3923595C1 DE19893923595 DE3923595A DE3923595C1 DE 3923595 C1 DE3923595 C1 DE 3923595C1 DE 19893923595 DE19893923595 DE 19893923595 DE 3923595 A DE3923595 A DE 3923595A DE 3923595 C1 DE3923595 C1 DE 3923595C1
Authority
DE
Germany
Prior art keywords
layer
porous layer
porous
counter electrode
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19893923595
Other languages
German (de)
English (en)
Inventor
Axel Dipl.-Ing. 8000 Muenchen De Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE19893923595 priority Critical patent/DE3923595C1/de
Priority to EP19900906880 priority patent/EP0483155A1/de
Priority to PCT/DE1990/000337 priority patent/WO1991001494A1/de
Application granted granted Critical
Publication of DE3923595C1 publication Critical patent/DE3923595C1/de
Priority to FI920182A priority patent/FI920182A0/fi
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE19893923595 1989-07-17 1989-07-17 Expired - Fee Related DE3923595C1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19893923595 DE3923595C1 (ja) 1989-07-17 1989-07-17
EP19900906880 EP0483155A1 (de) 1989-07-17 1990-05-11 Vorrichtung zum messen des feuchtigkeitsgrades von gasen
PCT/DE1990/000337 WO1991001494A1 (de) 1989-07-17 1990-05-11 Vorrichtung zum messen des feuchtigkeitsgrades von gasen
FI920182A FI920182A0 (fi) 1989-07-17 1992-01-16 Anordning foer att maeta gasers fukthalt.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19893923595 DE3923595C1 (ja) 1989-07-17 1989-07-17

Publications (1)

Publication Number Publication Date
DE3923595C1 true DE3923595C1 (ja) 1990-12-20

Family

ID=6385208

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19893923595 Expired - Fee Related DE3923595C1 (ja) 1989-07-17 1989-07-17

Country Status (4)

Country Link
EP (1) EP0483155A1 (ja)
DE (1) DE3923595C1 (ja)
FI (1) FI920182A0 (ja)
WO (1) WO1991001494A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0640831A2 (en) * 1993-08-23 1995-03-01 Vaisala Oy Method for measurement of relative humidity, in particular in radiosondes, and humidity detectors that make use of the method
FR2720161A1 (fr) * 1994-05-20 1995-11-24 Isen Rech Procédé de fabrication d'un capteur de mesure de vapeur, capteur de mesure obtenu par le procédé et procédé d'utilisation de ce capteur.
WO2001042776A1 (de) * 1999-12-08 2001-06-14 Sensirion Ag Kapazitiver sensor
US7165441B2 (en) * 2001-09-20 2007-01-23 Robert Bosch Gmbh Sensor module having a sensor element surrounded by a heating element
US7833405B2 (en) 2000-12-23 2010-11-16 Robert Bosch Gmbh Micromechanical component and corresponding production method
DE102007024199B4 (de) * 2007-05-24 2015-06-25 Robert Bosch Gmbh Herstellungsverfahren eines mikromechanischen Bauelements mit porösifizierter Membran

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08505234A (ja) * 1993-10-19 1996-06-04 ゲンナディエビチ ウサノフ，ユリー 湿度センサ
FI99164C (fi) * 1994-04-15 1997-10-10 Vaisala Oy Menetelmä kastepisteen tai kaasupitoisuuden mittaamiseksi sekä laitteisto jäätymisen ennakoimista varten
EP2565635B1 (en) 2011-09-02 2017-11-15 Sensirion AG Sensor chip and method for manufacturing a sensor chip

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523244A (en) * 1967-11-01 1970-08-04 Panametrics Device for measurement of absolute humidity
DE2729249A1 (de) * 1976-07-02 1978-02-09 Ibm Festkoerper-feuchtigkeitsgrad-messer
DE3606500A1 (de) * 1986-02-28 1987-09-03 Karl Heinz Prof Dr Rer Haerdtl Selektiver gassensor fuer brennbare gase

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4080564A (en) * 1975-10-02 1978-03-21 Matsushita Electric Industrial Co., Ltd. Humidity sensitive resistor device
DE3416945A1 (de) * 1984-05-08 1985-11-14 Sauter-Cumulus GmbH, 7800 Freiburg Feuchtigkeitssensor und verfahren zu seiner herstellung
DE3711511C1 (de) * 1987-04-04 1988-06-30 Hartmann & Braun Ag Verfahren zur Bestimmung der Gaskonzentrationen in einem Gasgemisch und Sensor zur Messung der Waermeleitfaehigkeit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523244A (en) * 1967-11-01 1970-08-04 Panametrics Device for measurement of absolute humidity
DE2729249A1 (de) * 1976-07-02 1978-02-09 Ibm Festkoerper-feuchtigkeitsgrad-messer
DE3606500A1 (de) * 1986-02-28 1987-09-03 Karl Heinz Prof Dr Rer Haerdtl Selektiver gassensor fuer brennbare gase

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0640831A2 (en) * 1993-08-23 1995-03-01 Vaisala Oy Method for measurement of relative humidity, in particular in radiosondes, and humidity detectors that make use of the method
EP0640831A3 (en) * 1993-08-23 1995-05-24 Vaisala Oy Method for measuring relative humidity, in particular in radio probes, and humidity detector therefor.
EP0965837A1 (en) * 1993-08-23 1999-12-22 Vaisala Oyj Method for measurement of relative humidity, in particular in radiosenders, and humidity detectors that make use of the method
FR2720161A1 (fr) * 1994-05-20 1995-11-24 Isen Rech Procédé de fabrication d'un capteur de mesure de vapeur, capteur de mesure obtenu par le procédé et procédé d'utilisation de ce capteur.
WO2001042776A1 (de) * 1999-12-08 2001-06-14 Sensirion Ag Kapazitiver sensor
US7833405B2 (en) 2000-12-23 2010-11-16 Robert Bosch Gmbh Micromechanical component and corresponding production method
US7165441B2 (en) * 2001-09-20 2007-01-23 Robert Bosch Gmbh Sensor module having a sensor element surrounded by a heating element
DE102007024199B4 (de) * 2007-05-24 2015-06-25 Robert Bosch Gmbh Herstellungsverfahren eines mikromechanischen Bauelements mit porösifizierter Membran

Also Published As

Publication number Publication date
EP0483155A1 (de) 1992-05-06
WO1991001494A1 (de) 1991-02-07
FI920182A0 (fi) 1992-01-16

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Legal Events

Date Code Title Description
8100 Publication of the examined application without publication of unexamined application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee