DE3886616D1 - Positive photoempfindliche harzzubereitung und verfahren zur herstellung. - Google Patents
Positive photoempfindliche harzzubereitung und verfahren zur herstellung.Info
- Publication number
- DE3886616D1 DE3886616D1 DE88901324T DE3886616T DE3886616D1 DE 3886616 D1 DE3886616 D1 DE 3886616D1 DE 88901324 T DE88901324 T DE 88901324T DE 3886616 T DE3886616 T DE 3886616T DE 3886616 D1 DE3886616 D1 DE 3886616D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- same
- sensitive resin
- resin preparation
- positive photo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Epoxy Resins (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2311587 | 1987-02-02 | ||
PCT/JP1988/000094 WO1988005928A1 (en) | 1987-02-02 | 1988-02-02 | Positive photosensitive resin composition and process for its production |
CA000576100A CA1330405C (en) | 1987-02-02 | 1988-08-30 | Positive type photosensitive resinous composition and preparation thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3886616D1 true DE3886616D1 (de) | 1994-02-10 |
DE3886616T2 DE3886616T2 (de) | 1994-07-21 |
Family
ID=25672093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3886616T Expired - Fee Related DE3886616T2 (de) | 1987-02-02 | 1988-02-02 | Positive photoempfindliche harzzubereitung und verfahren zur herstellung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4999274A (de) |
EP (1) | EP0302941B1 (de) |
JP (1) | JP2594088B2 (de) |
CA (1) | CA1330405C (de) |
DE (1) | DE3886616T2 (de) |
WO (1) | WO1988005928A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2608408B2 (ja) * | 1987-05-13 | 1997-05-07 | 日本ペイント株式会社 | ポジ型感光性樹脂組成物 |
JP2585070B2 (ja) * | 1988-08-02 | 1997-02-26 | 日本ペイント株式会社 | 画像形成方法 |
CA1334897C (en) * | 1988-08-02 | 1995-03-28 | Mamoru Seio | Electrodeposition coating composition and image-forming method using the same |
WO1993006528A1 (en) * | 1991-09-13 | 1993-04-01 | Sun Chemical Corporation | Positive-working coating compositions |
EP0608894A1 (de) * | 1993-01-29 | 1994-08-03 | Nippon Paint Co., Ltd. | Positiv arbeitende lichtempfindliche Harzzusammensetzungen |
KR20240112923A (ko) * | 2018-09-05 | 2024-07-19 | 메르크 파텐트 게엠베하 | 포지티브형 감광성 물질 |
US11681220B2 (en) * | 2020-03-05 | 2023-06-20 | Sumitomo Chemical Company, Limited | Resist composition and method for producing resist pattern |
US11675267B2 (en) * | 2020-03-23 | 2023-06-13 | Sumitomo Chemical Company, Limited | Resist composition and method for producing resist pattern |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7103379A (de) * | 1971-03-13 | 1972-09-15 | ||
US3890153A (en) * | 1971-03-13 | 1975-06-17 | Philips Corp | Positive-acting napthoquinone diazide photosensitive composition |
JPS5114042B2 (de) * | 1972-06-12 | 1976-05-06 | ||
JPS5645127B2 (de) * | 1974-02-25 | 1981-10-24 | ||
DE2545697A1 (de) * | 1975-10-11 | 1977-04-21 | Basf Ag | Lichtempfindliches material fuer positiv arbeitende photolacke und fuer die herstellung von druckplatten |
JPS57151939A (en) * | 1981-03-16 | 1982-09-20 | Japan Synthetic Rubber Co Ltd | Positive type photosensitive resin composition |
US4529682A (en) * | 1981-06-22 | 1985-07-16 | Philip A. Hunt Chemical Corporation | Positive photoresist composition with cresol-formaldehyde novolak resins |
JPS5843451A (ja) * | 1981-09-09 | 1983-03-14 | Japan Synthetic Rubber Co Ltd | ポジ型感光性樹脂組成物 |
JPS58134631A (ja) * | 1982-01-08 | 1983-08-10 | Konishiroku Photo Ind Co Ltd | 感光性組成物 |
JPS595243A (ja) * | 1982-07-02 | 1984-01-12 | Hitachi Ltd | 放射線感応性組成物及びパタ−ン形成方法 |
JPS61295549A (ja) * | 1985-06-25 | 1986-12-26 | Dainippon Ink & Chem Inc | 感光性組成物 |
JPS63116148A (ja) * | 1986-11-04 | 1988-05-20 | Fuji Photo Film Co Ltd | 感光性組成物 |
US4857437A (en) * | 1986-12-17 | 1989-08-15 | Ciba-Geigy Corporation | Process for the formation of an image |
-
1988
- 1988-02-02 WO PCT/JP1988/000094 patent/WO1988005928A1/ja active IP Right Grant
- 1988-02-02 EP EP88901324A patent/EP0302941B1/de not_active Expired - Lifetime
- 1988-02-02 JP JP63023311A patent/JP2594088B2/ja not_active Expired - Fee Related
- 1988-02-02 DE DE3886616T patent/DE3886616T2/de not_active Expired - Fee Related
- 1988-02-02 US US07/255,193 patent/US4999274A/en not_active Expired - Lifetime
- 1988-08-30 CA CA000576100A patent/CA1330405C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0302941A1 (de) | 1989-02-15 |
WO1988005928A1 (en) | 1988-08-11 |
CA1330405C (en) | 1994-06-28 |
JPS646948A (en) | 1989-01-11 |
JP2594088B2 (ja) | 1997-03-26 |
DE3886616T2 (de) | 1994-07-21 |
EP0302941A4 (de) | 1990-02-22 |
EP0302941B1 (de) | 1993-12-29 |
US4999274A (en) | 1991-03-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |