DE3886616D1 - Positive photoempfindliche harzzubereitung und verfahren zur herstellung. - Google Patents

Positive photoempfindliche harzzubereitung und verfahren zur herstellung.

Info

Publication number
DE3886616D1
DE3886616D1 DE88901324T DE3886616T DE3886616D1 DE 3886616 D1 DE3886616 D1 DE 3886616D1 DE 88901324 T DE88901324 T DE 88901324T DE 3886616 T DE3886616 T DE 3886616T DE 3886616 D1 DE3886616 D1 DE 3886616D1
Authority
DE
Germany
Prior art keywords
producing
same
sensitive resin
resin preparation
positive photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88901324T
Other languages
English (en)
Other versions
DE3886616T2 (de
Inventor
Mamoru Nippon Paint Co Seio
Kanji Nishijima
Katsukiyo Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Paint Co Ltd
Original Assignee
Nippon Paint Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Paint Co Ltd filed Critical Nippon Paint Co Ltd
Publication of DE3886616D1 publication Critical patent/DE3886616D1/de
Application granted granted Critical
Publication of DE3886616T2 publication Critical patent/DE3886616T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Epoxy Resins (AREA)
DE3886616T 1987-02-02 1988-02-02 Positive photoempfindliche harzzubereitung und verfahren zur herstellung. Expired - Fee Related DE3886616T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2311587 1987-02-02
PCT/JP1988/000094 WO1988005928A1 (en) 1987-02-02 1988-02-02 Positive photosensitive resin composition and process for its production
CA000576100A CA1330405C (en) 1987-02-02 1988-08-30 Positive type photosensitive resinous composition and preparation thereof

Publications (2)

Publication Number Publication Date
DE3886616D1 true DE3886616D1 (de) 1994-02-10
DE3886616T2 DE3886616T2 (de) 1994-07-21

Family

ID=25672093

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3886616T Expired - Fee Related DE3886616T2 (de) 1987-02-02 1988-02-02 Positive photoempfindliche harzzubereitung und verfahren zur herstellung.

Country Status (6)

Country Link
US (1) US4999274A (de)
EP (1) EP0302941B1 (de)
JP (1) JP2594088B2 (de)
CA (1) CA1330405C (de)
DE (1) DE3886616T2 (de)
WO (1) WO1988005928A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2608408B2 (ja) * 1987-05-13 1997-05-07 日本ペイント株式会社 ポジ型感光性樹脂組成物
JP2585070B2 (ja) * 1988-08-02 1997-02-26 日本ペイント株式会社 画像形成方法
CA1334897C (en) * 1988-08-02 1995-03-28 Mamoru Seio Electrodeposition coating composition and image-forming method using the same
WO1993006528A1 (en) * 1991-09-13 1993-04-01 Sun Chemical Corporation Positive-working coating compositions
EP0608894A1 (de) * 1993-01-29 1994-08-03 Nippon Paint Co., Ltd. Positiv arbeitende lichtempfindliche Harzzusammensetzungen
KR20240112923A (ko) * 2018-09-05 2024-07-19 메르크 파텐트 게엠베하 포지티브형 감광성 물질
US11681220B2 (en) * 2020-03-05 2023-06-20 Sumitomo Chemical Company, Limited Resist composition and method for producing resist pattern
US11675267B2 (en) * 2020-03-23 2023-06-13 Sumitomo Chemical Company, Limited Resist composition and method for producing resist pattern

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7103379A (de) * 1971-03-13 1972-09-15
US3890153A (en) * 1971-03-13 1975-06-17 Philips Corp Positive-acting napthoquinone diazide photosensitive composition
JPS5114042B2 (de) * 1972-06-12 1976-05-06
JPS5645127B2 (de) * 1974-02-25 1981-10-24
DE2545697A1 (de) * 1975-10-11 1977-04-21 Basf Ag Lichtempfindliches material fuer positiv arbeitende photolacke und fuer die herstellung von druckplatten
JPS57151939A (en) * 1981-03-16 1982-09-20 Japan Synthetic Rubber Co Ltd Positive type photosensitive resin composition
US4529682A (en) * 1981-06-22 1985-07-16 Philip A. Hunt Chemical Corporation Positive photoresist composition with cresol-formaldehyde novolak resins
JPS5843451A (ja) * 1981-09-09 1983-03-14 Japan Synthetic Rubber Co Ltd ポジ型感光性樹脂組成物
JPS58134631A (ja) * 1982-01-08 1983-08-10 Konishiroku Photo Ind Co Ltd 感光性組成物
JPS595243A (ja) * 1982-07-02 1984-01-12 Hitachi Ltd 放射線感応性組成物及びパタ−ン形成方法
JPS61295549A (ja) * 1985-06-25 1986-12-26 Dainippon Ink & Chem Inc 感光性組成物
JPS63116148A (ja) * 1986-11-04 1988-05-20 Fuji Photo Film Co Ltd 感光性組成物
US4857437A (en) * 1986-12-17 1989-08-15 Ciba-Geigy Corporation Process for the formation of an image

Also Published As

Publication number Publication date
EP0302941A1 (de) 1989-02-15
WO1988005928A1 (en) 1988-08-11
CA1330405C (en) 1994-06-28
JPS646948A (en) 1989-01-11
JP2594088B2 (ja) 1997-03-26
DE3886616T2 (de) 1994-07-21
EP0302941A4 (de) 1990-02-22
EP0302941B1 (de) 1993-12-29
US4999274A (en) 1991-03-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee