DE3874653D1 - Si-kristall-kraftwandler. - Google Patents

Si-kristall-kraftwandler.

Info

Publication number
DE3874653D1
DE3874653D1 DE8888112353T DE3874653T DE3874653D1 DE 3874653 D1 DE3874653 D1 DE 3874653D1 DE 8888112353 T DE8888112353 T DE 8888112353T DE 3874653 T DE3874653 T DE 3874653T DE 3874653 D1 DE3874653 D1 DE 3874653D1
Authority
DE
Germany
Prior art keywords
power converter
crystal power
crystal
converter
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888112353T
Other languages
English (en)
Other versions
DE3874653T2 (de
Inventor
Yoshiteru Omura
Kazuyoshi Lions-Mans Kawaguchi
Kouji Tsukada
Aza Kuroishi Oaza Shi Sugiyama
Sadayuki Hayashi
Masayuki Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Application granted granted Critical
Publication of DE3874653D1 publication Critical patent/DE3874653D1/de
Publication of DE3874653T2 publication Critical patent/DE3874653T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE8888112353T 1987-07-31 1988-07-29 Si-kristall-kraftwandler. Expired - Fee Related DE3874653T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62190409A JPH0682847B2 (ja) 1987-07-31 1987-07-31 力変換素子

Publications (2)

Publication Number Publication Date
DE3874653D1 true DE3874653D1 (de) 1992-10-22
DE3874653T2 DE3874653T2 (de) 1993-02-25

Family

ID=16257662

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888112353T Expired - Fee Related DE3874653T2 (de) 1987-07-31 1988-07-29 Si-kristall-kraftwandler.

Country Status (4)

Country Link
US (1) US4833929A (de)
EP (1) EP0303875B1 (de)
JP (1) JPH0682847B2 (de)
DE (1) DE3874653T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4993266A (en) * 1988-07-26 1991-02-19 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure transducer
DE4111148A1 (de) * 1991-04-06 1992-10-08 Bosch Gmbh Robert Sensor
JP2553199Y2 (ja) * 1991-12-26 1997-11-05 株式会社豊田中央研究所 力変換素子
JP3166015B2 (ja) * 1992-07-16 2001-05-14 株式会社豊田中央研究所 力変換素子およびこれを用いた圧力検出回路
US5381231A (en) * 1993-01-07 1995-01-10 Ameron Technologies, Inc. One-piece silicon substrate having fiber optic stops and a reflective surface thereon and methods of manufacturing same
DE4334080C2 (de) * 1993-10-06 1996-05-02 Telefunken Microelectron Piezoresistive Sensorstruktur
DE19509188B4 (de) * 1994-03-14 2004-04-29 Denso Corp., Kariya Druckdetektor
JP3317084B2 (ja) * 1995-03-31 2002-08-19 株式会社豊田中央研究所 力検知素子およびその製造方法
DE19808928B4 (de) * 1998-03-03 2008-07-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kraft/Drehmomentsensor
US6915702B2 (en) * 2001-11-22 2005-07-12 Kabushiki Kaisha Toyota Chuo Kenkyusho Piezoresistive transducers
US7021154B2 (en) * 2002-09-24 2006-04-04 Kabushiki Kaisha Toyota Chuo Kenkyusho Force sensing element
KR100555665B1 (ko) * 2004-06-11 2006-03-03 삼성전자주식회사 복합센서 및 그 제조방법
EP2749859B1 (de) * 2008-09-30 2018-04-18 NGK Spark Plug Co., Ltd. Drucksensor
DE102011105756A1 (de) * 2011-01-28 2012-08-02 Kaufbeurer Mikrosysteme Wiedemann Gmbh Elektrische Messeinrichtung zur Kraft- und/oder Druckmessung
CN104006904B (zh) * 2014-05-15 2016-11-23 中国科学技术大学 一种自检验式动态压剪应力计

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3145563A (en) * 1960-04-11 1964-08-25 Lockheed Aircraft Corp Piezoresistive transducer employing p-type lead telluride (pbte) as the piezoresistive material
US3251222A (en) * 1961-04-20 1966-05-17 Gen Electric Strain sensitive apparatus and elements therefor
US3149488A (en) * 1962-08-13 1964-09-22 Gulton Ind Inc Strain gauge measuring apparatus
US4406992A (en) * 1981-04-20 1983-09-27 Kulite Semiconductor Products, Inc. Semiconductor pressure transducer or other product employing layers of single crystal silicon

Also Published As

Publication number Publication date
JPS6436081A (en) 1989-02-07
US4833929A (en) 1989-05-30
EP0303875A2 (de) 1989-02-22
EP0303875A3 (en) 1990-02-07
JPH0682847B2 (ja) 1994-10-19
DE3874653T2 (de) 1993-02-25
EP0303875B1 (de) 1992-09-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN

8339 Ceased/non-payment of the annual fee