DE3874569D1 - Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid. - Google Patents

Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid.

Info

Publication number
DE3874569D1
DE3874569D1 DE8888103394T DE3874569T DE3874569D1 DE 3874569 D1 DE3874569 D1 DE 3874569D1 DE 8888103394 T DE8888103394 T DE 8888103394T DE 3874569 T DE3874569 T DE 3874569T DE 3874569 D1 DE3874569 D1 DE 3874569D1
Authority
DE
Germany
Prior art keywords
formula
ome
producing
protective coating
coating based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888103394T
Other languages
English (en)
Inventor
Volker Dr Dipl Chem Frey
Bernd Dr Dipl Chem Pachaly
Norbert Dr Dipl Chem Zeller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacker Chemie AG
Original Assignee
Wacker Chemie AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie AG filed Critical Wacker Chemie AG
Priority to DE8888103394T priority Critical patent/DE3874569D1/de
Application granted granted Critical
Publication of DE3874569D1 publication Critical patent/DE3874569D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1275Process of deposition of the inorganic material performed under inert atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Polymers (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemically Coating (AREA)
  • Ceramic Products (AREA)
DE8888103394T 1987-03-06 1988-03-04 Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid. Expired - Lifetime DE3874569D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8888103394T DE3874569D1 (de) 1987-03-06 1988-03-04 Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873707224 DE3707224A1 (de) 1987-03-06 1987-03-06 Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid
DE8888103394T DE3874569D1 (de) 1987-03-06 1988-03-04 Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid.

Publications (1)

Publication Number Publication Date
DE3874569D1 true DE3874569D1 (de) 1992-10-22

Family

ID=6322422

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19873707224 Withdrawn DE3707224A1 (de) 1987-03-06 1987-03-06 Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid
DE8888103394T Expired - Lifetime DE3874569D1 (de) 1987-03-06 1988-03-04 Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19873707224 Withdrawn DE3707224A1 (de) 1987-03-06 1987-03-06 Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid

Country Status (6)

Country Link
US (1) US4879142A (de)
EP (1) EP0281154B1 (de)
JP (1) JPS63235481A (de)
AT (1) ATE80673T1 (de)
CA (1) CA1288645C (de)
DE (2) DE3707224A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025075A (en) * 1988-07-22 1991-06-18 Dow Corning Corporation Methylpolysilanes and method for their preparation
US4889904A (en) * 1988-07-22 1989-12-26 Dow Corning Corporation Process for the preparation of methylpolysilanes having controlled carbon content
EP0392822A3 (de) * 1989-04-14 1991-10-23 Ethyl Corporation Präkeramische Zusammensetzungen und keramische Produkte
US5380553A (en) * 1990-12-24 1995-01-10 Dow Corning Corporation Reverse direction pyrolysis processing
NL1011098C2 (nl) * 1999-01-21 2000-07-24 Univ Utrecht Keramische deklaag.
GB0708347D0 (en) 2007-05-01 2007-06-06 Dow Corning Polymer compositions

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112700A (en) * 1976-02-28 1977-09-21 Tohoku Daigaku Kinzoku Zairyo Amorphous organopolysilicone composite for preparing silicone carbide
JPS5567585A (en) * 1978-11-13 1980-05-21 Tokushu Muki Zairyo Kenkyusho Manufacture of corrosionnresistant* heattresistant and acid resistant molded body
GB2039787B (en) * 1978-11-13 1982-12-08 Res Inst For Special Inorganic Producing corrosion resistant articles
US4418097A (en) * 1981-12-11 1983-11-29 Martin Marietta Corporation Coating for graphite electrodes
US4696827A (en) * 1982-03-12 1987-09-29 Sony Corporation Silicon carbide-carbon composite molded product and process for manufacturing the same
US4446169A (en) * 1982-09-16 1984-05-01 Westinghouse Electric Corp. Method for making silicon carbide coatings
JPS60125375A (ja) * 1983-12-07 1985-07-04 Usui Internatl Ind Co Ltd 金属・セラミツクス接合体及びその製造方法

Also Published As

Publication number Publication date
US4879142A (en) 1989-11-07
JPS63235481A (ja) 1988-09-30
EP0281154B1 (de) 1992-09-16
EP0281154A3 (en) 1989-07-19
DE3707224A1 (de) 1988-09-15
EP0281154A2 (de) 1988-09-07
ATE80673T1 (de) 1992-10-15
CA1288645C (en) 1991-09-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee