ATE80673T1 - Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid. - Google Patents
Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid.Info
- Publication number
- ATE80673T1 ATE80673T1 AT88103394T AT88103394T ATE80673T1 AT E80673 T1 ATE80673 T1 AT E80673T1 AT 88103394 T AT88103394 T AT 88103394T AT 88103394 T AT88103394 T AT 88103394T AT E80673 T1 ATE80673 T1 AT E80673T1
- Authority
- AT
- Austria
- Prior art keywords
- same
- formula
- compound
- range
- protective coating
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000011253 protective coating Substances 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title 1
- 229910010271 silicon carbide Inorganic materials 0.000 title 1
- 150000001875 compounds Chemical class 0.000 abstract 4
- -1 alkyl radicals Chemical class 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052783 alkali metal Inorganic materials 0.000 abstract 1
- 150000001340 alkali metals Chemical class 0.000 abstract 1
- 125000003342 alkenyl group Chemical group 0.000 abstract 1
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 150000005840 aryl radicals Chemical class 0.000 abstract 1
- 229920001577 copolymer Polymers 0.000 abstract 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- GRVDJDISBSALJP-UHFFFAOYSA-N methyloxidanyl Chemical group [O]C GRVDJDISBSALJP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1275—Process of deposition of the inorganic material performed under inert atmosphere
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Silicon Polymers (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemically Coating (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19873707224 DE3707224A1 (de) | 1987-03-06 | 1987-03-06 | Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid |
| EP88103394A EP0281154B1 (de) | 1987-03-06 | 1988-03-04 | Verfahren zur Herstellung eines Schutzüberzuges auf Basis von Siliciumcarbid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE80673T1 true ATE80673T1 (de) | 1992-10-15 |
Family
ID=6322422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT88103394T ATE80673T1 (de) | 1987-03-06 | 1988-03-04 | Verfahren zur herstellung eines schutzueberzuges auf basis von siliciumcarbid. |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4879142A (de) |
| EP (1) | EP0281154B1 (de) |
| JP (1) | JPS63235481A (de) |
| AT (1) | ATE80673T1 (de) |
| CA (1) | CA1288645C (de) |
| DE (2) | DE3707224A1 (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4889904A (en) * | 1988-07-22 | 1989-12-26 | Dow Corning Corporation | Process for the preparation of methylpolysilanes having controlled carbon content |
| US5025075A (en) * | 1988-07-22 | 1991-06-18 | Dow Corning Corporation | Methylpolysilanes and method for their preparation |
| EP0392822A3 (de) * | 1989-04-14 | 1991-10-23 | Ethyl Corporation | Präkeramische Zusammensetzungen und keramische Produkte |
| US5380553A (en) * | 1990-12-24 | 1995-01-10 | Dow Corning Corporation | Reverse direction pyrolysis processing |
| NL1011098C2 (nl) * | 1999-01-21 | 2000-07-24 | Univ Utrecht | Keramische deklaag. |
| GB0708347D0 (en) * | 2007-05-01 | 2007-06-06 | Dow Corning | Polymer compositions |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52112700A (en) * | 1976-02-28 | 1977-09-21 | Tohoku Daigaku Kinzoku Zairyo | Amorphous organopolysilicone composite for preparing silicone carbide |
| GB2039787B (en) * | 1978-11-13 | 1982-12-08 | Res Inst For Special Inorganic | Producing corrosion resistant articles |
| JPS5567585A (en) * | 1978-11-13 | 1980-05-21 | Tokushu Muki Zairyo Kenkyusho | Manufacture of corrosionnresistant* heattresistant and acid resistant molded body |
| US4418097A (en) * | 1981-12-11 | 1983-11-29 | Martin Marietta Corporation | Coating for graphite electrodes |
| US4696827A (en) * | 1982-03-12 | 1987-09-29 | Sony Corporation | Silicon carbide-carbon composite molded product and process for manufacturing the same |
| US4446169A (en) * | 1982-09-16 | 1984-05-01 | Westinghouse Electric Corp. | Method for making silicon carbide coatings |
| JPS60125375A (ja) * | 1983-12-07 | 1985-07-04 | Usui Internatl Ind Co Ltd | 金属・セラミツクス接合体及びその製造方法 |
-
1987
- 1987-03-06 DE DE19873707224 patent/DE3707224A1/de not_active Withdrawn
-
1988
- 1988-02-22 US US07/158,813 patent/US4879142A/en not_active Expired - Fee Related
- 1988-02-25 CA CA000559864A patent/CA1288645C/en not_active Expired - Lifetime
- 1988-03-04 DE DE8888103394T patent/DE3874569D1/de not_active Expired - Lifetime
- 1988-03-04 AT AT88103394T patent/ATE80673T1/de active
- 1988-03-04 EP EP88103394A patent/EP0281154B1/de not_active Expired - Lifetime
- 1988-03-07 JP JP63051798A patent/JPS63235481A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE3707224A1 (de) | 1988-09-15 |
| EP0281154A3 (en) | 1989-07-19 |
| EP0281154B1 (de) | 1992-09-16 |
| EP0281154A2 (de) | 1988-09-07 |
| JPS63235481A (ja) | 1988-09-30 |
| US4879142A (en) | 1989-11-07 |
| DE3874569D1 (de) | 1992-10-22 |
| CA1288645C (en) | 1991-09-10 |
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