EP0281154A3 - Process for producing a siliconcarbide protective coating - Google Patents

Process for producing a siliconcarbide protective coating Download PDF

Info

Publication number
EP0281154A3
EP0281154A3 EP88103394A EP88103394A EP0281154A3 EP 0281154 A3 EP0281154 A3 EP 0281154A3 EP 88103394 A EP88103394 A EP 88103394A EP 88103394 A EP88103394 A EP 88103394A EP 0281154 A3 EP0281154 A3 EP 0281154A3
Authority
EP
European Patent Office
Prior art keywords
same
formula
compound
range
protective coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88103394A
Other languages
German (de)
Other versions
EP0281154B1 (en
EP0281154A2 (en
Inventor
Volker Dr. Dipl.-Chem. Frey
Bernd Dr. Dipl.-Chem. Pachaly
Norbert Dr. Dipl.-Chem. Zeller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacker Chemie AG
Original Assignee
Wacker Chemie AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie AG filed Critical Wacker Chemie AG
Priority to AT88103394T priority Critical patent/ATE80673T1/en
Publication of EP0281154A2 publication Critical patent/EP0281154A2/en
Publication of EP0281154A3 publication Critical patent/EP0281154A3/en
Application granted granted Critical
Publication of EP0281154B1 publication Critical patent/EP0281154B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1275—Process of deposition of the inorganic material performed under inert atmosphere

Abstract

A process for preparing a protective coating which comprises applying a copolymer obtained by reacting at least one disilane of the formula R2R1Si2(OCH3)3 in which R represents the same or different alkyl, alkenyl or aryl radicals and R1 represents the same or different alkyl radicals, which may optionally be mixed with a compound of the formula R2Si2(OCh3)4 in which R is the same as above, with at least one compound of the formula R2R2SiH in which R is the same as above and R2 represents a methoxy radical or is the same as R, in the presence of at least one compound of the formula MOR in which R is the same as above and M represents an alkali metal, and a compound of the formula <IMAGE> in which R1 is the same as above, R3 represents the same or different alkenyl radicals, x is in the range of from 0.5 to 1.5, y is in the range of from 3 to 5 and n is in the range of from 500 to 2,000, to a substrate and thereafter heating the coated substrate in an inert atmosphere or in vacuo at temperatures in the range of from 700 DEG to 1,400 DEG C.
EP88103394A 1987-03-06 1988-03-04 Process for producing a siliconcarbide protective coating Expired - Lifetime EP0281154B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT88103394T ATE80673T1 (en) 1987-03-06 1988-03-04 PROCESS FOR THE MANUFACTURE OF A PROTECTIVE COATING BASED ON SILICON CARBIDE.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873707224 DE3707224A1 (en) 1987-03-06 1987-03-06 METHOD FOR PRODUCING A PROTECTIVE COATING BASED ON SILICON CARBIDE
DE3707224 1987-03-06

Publications (3)

Publication Number Publication Date
EP0281154A2 EP0281154A2 (en) 1988-09-07
EP0281154A3 true EP0281154A3 (en) 1989-07-19
EP0281154B1 EP0281154B1 (en) 1992-09-16

Family

ID=6322422

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88103394A Expired - Lifetime EP0281154B1 (en) 1987-03-06 1988-03-04 Process for producing a siliconcarbide protective coating

Country Status (6)

Country Link
US (1) US4879142A (en)
EP (1) EP0281154B1 (en)
JP (1) JPS63235481A (en)
AT (1) ATE80673T1 (en)
CA (1) CA1288645C (en)
DE (2) DE3707224A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025075A (en) * 1988-07-22 1991-06-18 Dow Corning Corporation Methylpolysilanes and method for their preparation
US4889904A (en) * 1988-07-22 1989-12-26 Dow Corning Corporation Process for the preparation of methylpolysilanes having controlled carbon content
EP0392822A3 (en) * 1989-04-14 1991-10-23 Ethyl Corporation Preceramic compositions and ceramic products
US5380553A (en) * 1990-12-24 1995-01-10 Dow Corning Corporation Reverse direction pyrolysis processing
NL1011098C2 (en) * 1999-01-21 2000-07-24 Univ Utrecht Ceramic coating.
GB0708347D0 (en) 2007-05-01 2007-06-06 Dow Corning Polymer compositions

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4446169A (en) * 1982-09-16 1984-05-01 Westinghouse Electric Corp. Method for making silicon carbide coatings

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112700A (en) * 1976-02-28 1977-09-21 Tohoku Daigaku Kinzoku Zairyo Amorphous organopolysilicone composite for preparing silicone carbide
GB2039787B (en) * 1978-11-13 1982-12-08 Res Inst For Special Inorganic Producing corrosion resistant articles
JPS5567585A (en) * 1978-11-13 1980-05-21 Tokushu Muki Zairyo Kenkyusho Manufacture of corrosionnresistant* heattresistant and acid resistant molded body
US4418097A (en) * 1981-12-11 1983-11-29 Martin Marietta Corporation Coating for graphite electrodes
US4696827A (en) * 1982-03-12 1987-09-29 Sony Corporation Silicon carbide-carbon composite molded product and process for manufacturing the same
JPS60125375A (en) * 1983-12-07 1985-07-04 Usui Internatl Ind Co Ltd Metal-ceramic joined body and manufacture thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4446169A (en) * 1982-09-16 1984-05-01 Westinghouse Electric Corp. Method for making silicon carbide coatings

Also Published As

Publication number Publication date
EP0281154B1 (en) 1992-09-16
CA1288645C (en) 1991-09-10
DE3874569D1 (en) 1992-10-22
JPS63235481A (en) 1988-09-30
EP0281154A2 (en) 1988-09-07
DE3707224A1 (en) 1988-09-15
ATE80673T1 (en) 1992-10-15
US4879142A (en) 1989-11-07

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