DE3873563D1 - Planspiegelinterferometer. - Google Patents

Planspiegelinterferometer.

Info

Publication number
DE3873563D1
DE3873563D1 DE8888301831T DE3873563T DE3873563D1 DE 3873563 D1 DE3873563 D1 DE 3873563D1 DE 8888301831 T DE8888301831 T DE 8888301831T DE 3873563 T DE3873563 T DE 3873563T DE 3873563 D1 DE3873563 D1 DE 3873563D1
Authority
DE
Germany
Prior art keywords
surface interferometer
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888301831T
Other languages
English (en)
Other versions
DE3873563T2 (de
Inventor
Kenneth J Wayne Kenneth Wayne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21801301&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3873563(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE3873563D1 publication Critical patent/DE3873563D1/de
Publication of DE3873563T2 publication Critical patent/DE3873563T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE8888301831T 1987-03-02 1988-03-02 Planspiegelinterferometer. Expired - Fee Related DE3873563T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/020,921 US4784490A (en) 1987-03-02 1987-03-02 High thermal stability plane mirror interferometer

Publications (2)

Publication Number Publication Date
DE3873563D1 true DE3873563D1 (de) 1992-09-17
DE3873563T2 DE3873563T2 (de) 1993-05-06

Family

ID=21801301

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888301831T Expired - Fee Related DE3873563T2 (de) 1987-03-02 1988-03-02 Planspiegelinterferometer.

Country Status (5)

Country Link
US (1) US4784490A (de)
EP (1) EP0281385B1 (de)
JP (1) JP2708171B2 (de)
DE (1) DE3873563T2 (de)
HK (1) HK147595A (de)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01307606A (ja) * 1988-06-06 1989-12-12 Tokyo Seimitsu Co Ltd プレーンミラー干渉光学系
DE3830962A1 (de) * 1988-09-12 1990-03-15 Spindler & Hoyer Kg Einrichtung zum messen von laengen oder winkeln mit einem interferometer
DE3883768D1 (de) * 1988-11-17 1993-10-07 Kayser Threde Gmbh Reflektorsystem für Michelson-Interferometer.
NL9100215A (nl) * 1991-02-07 1992-09-01 Asm Lithography Bv Inrichting voor het repeterend afbeelden van een maskerpatroon op een substraat.
US5374991A (en) * 1991-03-29 1994-12-20 Gradient Lens Corporation Compact distance measuring interferometer
US5444532A (en) * 1992-02-25 1995-08-22 Nikon Corporation Interferometer apparatus for detecting relative movement between reflecting members
US5412474A (en) * 1992-05-08 1995-05-02 Smithsonian Institution System for measuring distance between two points using a variable frequency coherent source
DE4221850A1 (de) * 1992-07-03 1994-01-05 Jenoptik Jena Gmbh Mehrarmiges Interferometer
US5315372A (en) * 1993-01-04 1994-05-24 Excel Precision, Inc. Non-contact servo track writing apparatus having read/head arm and reference arm
US5563706A (en) * 1993-08-24 1996-10-08 Nikon Corporation Interferometric surface profiler with an alignment optical member
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation
DE4446134B4 (de) * 1994-12-23 2006-01-12 Carl Zeiss Jena Gmbh Interferometrische Meßanordnung
US5991033A (en) * 1996-09-20 1999-11-23 Sparta, Inc. Interferometer with air turbulence compensation
GB9813281D0 (en) 1998-06-19 1998-08-19 Bookham Technology Ltd Temperature stable integrated optical device
US6163379A (en) * 1999-08-27 2000-12-19 Zygo Corporation Interferometer with tilted waveplates for reducing ghost reflections
US6717678B2 (en) 2000-12-08 2004-04-06 Zygo Corporation Monolithic corrector plate
US6621580B2 (en) * 2001-05-08 2003-09-16 Precision Photonics Corporation Single etalon wavelength locker
US6542247B2 (en) * 2001-06-06 2003-04-01 Agilent Technologies, Inc. Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies
US6762845B2 (en) * 2001-08-23 2004-07-13 Zygo Corporation Multiple-pass interferometry
JP2005501240A (ja) * 2001-08-23 2005-01-13 ザイゴ コーポレイション 傾斜干渉計
US7193726B2 (en) * 2001-08-23 2007-03-20 Zygo Corporation Optical interferometry
US6757066B2 (en) 2002-01-28 2004-06-29 Zygo Corporation Multiple degree of freedom interferometer
TWI278599B (en) * 2002-01-28 2007-04-11 Zygo Corp Multi-axis interferometer
US6819434B2 (en) * 2002-01-28 2004-11-16 Zygo Corporation Multi-axis interferometer
US6897962B2 (en) * 2002-04-18 2005-05-24 Agilent Technologies, Inc. Interferometer using beam re-tracing to eliminate beam walk-off
US7030993B2 (en) * 2002-04-24 2006-04-18 Zygo Corporation Athermal zero-shear interferometer
US6992823B2 (en) * 2002-06-24 2006-01-31 Oplink Communications, Inc. Chromatic dispersion compensator
US6943889B2 (en) * 2002-07-29 2005-09-13 Jds Uniphase Corporation Athermal interferometric device
US7224466B2 (en) * 2003-02-05 2007-05-29 Agilent Technologies, Inc. Compact multi-axis interferometer
US7180603B2 (en) * 2003-06-26 2007-02-20 Zygo Corporation Reduction of thermal non-cyclic error effects in interferometers
US7443511B2 (en) * 2003-11-25 2008-10-28 Asml Netherlands B.V. Integrated plane mirror and differential plane mirror interferometer system
JP2005303099A (ja) * 2004-04-14 2005-10-27 Hitachi High-Technologies Corp プラズマ処理装置およびプラズマ処理方法
US7525665B2 (en) * 2004-05-11 2009-04-28 Renishaw Plc Polarising interferometer
US7193721B2 (en) * 2004-05-28 2007-03-20 Agilent Technologies, Inc. Systems using polarization-manipulating retroreflectors
US7277180B2 (en) * 2004-11-09 2007-10-02 Zygo Corporation Optical connection for interferometry
US20060139595A1 (en) 2004-12-27 2006-06-29 Asml Netherlands B.V. Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness
JP4939765B2 (ja) * 2005-03-28 2012-05-30 株式会社日立製作所 変位計測方法とその装置
JP5340730B2 (ja) * 2005-06-29 2013-11-13 ザイゴ コーポレーション 干渉分光法における非周期性の非線形誤差を軽減するための装置および方法
US7705994B2 (en) * 2005-11-23 2010-04-27 Agilent Technologies, Inc. Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs
JP5093220B2 (ja) * 2009-12-28 2012-12-12 株式会社日立製作所 変位計測方法とその装置
CN103777476B (zh) * 2012-10-19 2016-01-27 上海微电子装备有限公司 一种离轴对准系统及对准方法
TW201508361A (zh) * 2013-08-27 2015-03-01 鴻海精密工業股份有限公司 透鏡單元以及光通訊模組
GB2551968A (en) 2016-06-28 2018-01-10 Oclaro Tech Ltd Optical locker
KR101910084B1 (ko) * 2016-12-05 2018-10-19 서강대학교산학협력단 평행빔 광학 소자 및 이를 이용한 간섭계
EP3495766B8 (de) * 2017-12-06 2023-02-08 Silicon Austria Labs GmbH Referenzinterferometer und verfahren zur bestimmung einer optischen weglängenänderung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3788746A (en) * 1972-10-02 1974-01-29 Hewlett Packard Co Optical dilatometer
US4711574A (en) * 1984-04-27 1987-12-08 Hewlett-Packard Company Minimum deadpath interferometer and dilatometer
JPS61105408A (ja) * 1984-10-30 1986-05-23 Matsushita Electric Ind Co Ltd 光学測定装置
JPS61219803A (ja) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> 物理量測定装置
US4752133A (en) * 1985-12-19 1988-06-21 Zygo Corporation Differential plane mirror interferometer
US4693605A (en) * 1985-12-19 1987-09-15 Zygo Corporation Differential plane mirror interferometer

Also Published As

Publication number Publication date
JP2708171B2 (ja) 1998-02-04
US4784490A (en) 1988-11-15
EP0281385A2 (de) 1988-09-07
EP0281385B1 (de) 1992-08-12
DE3873563T2 (de) 1993-05-06
HK147595A (en) 1995-09-22
EP0281385A3 (en) 1989-11-02
JPS63228003A (ja) 1988-09-22

Similar Documents

Publication Publication Date Title
DE3873563D1 (de) Planspiegelinterferometer.
DE3781664D1 (de) Oberflaecheninspektion.
DE3861146D1 (de) Polierapparat.
DE3880632D1 (de) Kuevette.
DE3881291D1 (de) Sehapparat.
NO864359L (no) Kildedannende dopplerinterferometer.
FI77952B (fi) Ljusbaogsrelae.
DE3867976D1 (de) Polymergebundene antioxydationsmittel.
IT8821018A0 (it) Proietto.
DE3883705D1 (de) Alkenylbicyclohexane.
DE3876873D1 (de) Weblitzenuebergabevorrichtung.
FI900801A0 (fi) Melantonianaloger.
FI884463A (fi) Tixotropisk vattenhaltig flytande tvaettmedelkomposition foer automatisk diskning.
DE3888991D1 (de) Aminokohlenwasserstoff-substituierte Ketoximosilane.
DE68919410D1 (de) Interferometrie.
FI77055B (fi) Vaermegradient-inkubator.
DE3877421D1 (de) Polyamidbenzazole.
DE3879348D1 (de) Fm-cw-radargeraet.
NO882764D0 (no) Preparater for overflatebehandling.
DE3878970D1 (de) Praeparative chromatographiesaeule.
DE3852649D1 (de) Geradheits-Interferometer.
ES2023228B3 (es) Ciclopropancarboxamidas.
FI883435A (fi) Styrsystem foer fluider under tryck.
DE3786227D1 (de) Oberflaecheninterferometer.
DE3873615D1 (de) Polycyanoarylthioether.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELA

8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee