DE68919410D1 - Interferometrie. - Google Patents

Interferometrie.

Info

Publication number
DE68919410D1
DE68919410D1 DE68919410T DE68919410T DE68919410D1 DE 68919410 D1 DE68919410 D1 DE 68919410D1 DE 68919410 T DE68919410 T DE 68919410T DE 68919410 T DE68919410 T DE 68919410T DE 68919410 D1 DE68919410 D1 DE 68919410D1
Authority
DE
Germany
Prior art keywords
interferometry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68919410T
Other languages
English (en)
Other versions
DE68919410T2 (de
Inventor
John Tyrer
Fernando Mendoza-Santoyo
David Kerr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
British Technology Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Technology Group Ltd filed Critical British Technology Group Ltd
Application granted granted Critical
Publication of DE68919410D1 publication Critical patent/DE68919410D1/de
Publication of DE68919410T2 publication Critical patent/DE68919410T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02001Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02094Speckle interferometers, i.e. for detecting changes in speckle pattern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE68919410T 1988-09-02 1989-09-04 Interferometrie. Expired - Fee Related DE68919410T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB888820761A GB8820761D0 (en) 1988-09-02 1988-09-02 Interferometry
PCT/GB1989/001030 WO1990002930A1 (en) 1988-09-02 1989-09-04 Interferometry

Publications (2)

Publication Number Publication Date
DE68919410D1 true DE68919410D1 (de) 1994-12-22
DE68919410T2 DE68919410T2 (de) 1995-03-30

Family

ID=10643068

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68919410T Expired - Fee Related DE68919410T2 (de) 1988-09-02 1989-09-04 Interferometrie.

Country Status (6)

Country Link
US (1) US5048964A (de)
EP (1) EP0399004B1 (de)
JP (1) JPH03502008A (de)
DE (1) DE68919410T2 (de)
GB (2) GB8820761D0 (de)
WO (1) WO1990002930A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9018215D0 (en) * 1990-08-20 1990-10-03 Nat Res Dev Optical apparatus
JPH04157415A (ja) * 1990-10-20 1992-05-29 Fuji Photo Film Co Ltd 共焦点走査型干渉顕微鏡
US5434668A (en) * 1992-04-01 1995-07-18 Electronics & Space Corp. Laser vibrometer identification friend-or-foe (IFF) system
FR2728361B1 (fr) * 1994-12-16 1997-03-14 Onera (Off Nat Aerospatiale) Interferometre holographique polychrome et procede de visualisation de variations de chemin optique dans un objet par interferometrie holographique
WO1996029570A1 (de) * 1995-03-17 1996-09-26 Heinz Paul Weber Verfahren und vorrichtung zur bestimmung dreidimensionaler strukturen im submikrometerbereich
DK0915317T3 (da) * 1997-11-04 2003-09-15 Europ Economic Community Fremgangsmåde til forbedring af kontrasten fra billeder opnået under anvendelse af den pulserede billedadditionsteknik ESPI
US7290499B2 (en) 2004-02-09 2007-11-06 Emery Richard H Self-cleaning pet litter box assembly
CN100374817C (zh) * 2006-03-07 2008-03-12 中国船舶重工集团公司第七一一研究所 便携式离面位移测量仪
CN100362316C (zh) * 2006-03-08 2008-01-16 中国船舶重工集团公司第七一一研究所 一种三维电子散斑干涉仪
CN102841506B (zh) * 2011-06-22 2014-11-12 上海微电子装备有限公司 一种激光干涉仪测量系统及其测量方法
KR101853018B1 (ko) 2011-08-04 2018-05-02 한국전자통신연구원 폐루프 타입의 위상 보정기능을 갖는 광 위상 추출 시스템 및 그에 따른 3차원 이미지 추출 방법
CN107419093B (zh) 2013-07-10 2021-12-21 杰富意钢铁株式会社 用于制造烧结矿的内包炭材料的造粒粒子及其制造方法、以及烧结矿的制造方法
WO2019202602A1 (en) * 2018-04-19 2019-10-24 Ariel Scientific Innovations Ltd. Method and system for interferometry

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694088A (en) * 1971-01-25 1972-09-26 Bell Telephone Labor Inc Wavefront measurement
US3772457A (en) * 1971-03-29 1973-11-13 American Express Invest Sonic image transducer using a storage camera
US3828126A (en) * 1973-04-13 1974-08-06 American Express Invest Real time interferometry
GB2075180A (en) * 1980-05-02 1981-11-11 Balasubramanian N Method and system for determining interferometric optical path length difference
GB2076558B (en) * 1980-05-22 1984-04-18 Plessey Co Ltd Differential delay interferometers
JPS6076604A (ja) * 1983-10-03 1985-05-01 Rikagaku Kenkyusho 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置
US4583855A (en) * 1984-02-17 1986-04-22 Lockheed Missiles & Space Company, Inc. Optical phase measuring apparatus
JPS61247903A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd レ−ザスペツクルを利用した二次元変位・速度測定装置

Also Published As

Publication number Publication date
EP0399004A1 (de) 1990-11-28
GB2222743B (en) 1992-12-23
GB8919920D0 (en) 1989-10-18
US5048964A (en) 1991-09-17
DE68919410T2 (de) 1995-03-30
EP0399004B1 (de) 1994-11-17
WO1990002930A1 (en) 1990-03-22
JPH03502008A (ja) 1991-05-09
GB2222743A (en) 1990-03-14
GB8820761D0 (en) 1988-10-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee