DE3872707D1 - Heliumleckdetektor. - Google Patents

Heliumleckdetektor.

Info

Publication number
DE3872707D1
DE3872707D1 DE8888202518T DE3872707T DE3872707D1 DE 3872707 D1 DE3872707 D1 DE 3872707D1 DE 8888202518 T DE8888202518 T DE 8888202518T DE 3872707 T DE3872707 T DE 3872707T DE 3872707 D1 DE3872707 D1 DE 3872707D1
Authority
DE
Germany
Prior art keywords
leak detector
helium leak
helium
detector
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888202518T
Other languages
English (en)
Other versions
DE3872707T2 (de
Inventor
Mauro Audi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11304704&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3872707(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian SpA filed Critical Varian SpA
Publication of DE3872707D1 publication Critical patent/DE3872707D1/de
Application granted granted Critical
Publication of DE3872707T2 publication Critical patent/DE3872707T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE3872707T 1988-07-27 1988-11-11 Heliumleckdetektor. Expired - Lifetime DE3872707T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8867711A IT1224604B (it) 1988-07-27 1988-07-27 Rivelatore perfezionato di perdite di elio

Publications (2)

Publication Number Publication Date
DE3872707D1 true DE3872707D1 (de) 1992-08-13
DE3872707T2 DE3872707T2 (de) 1996-08-29

Family

ID=11304704

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3872707T Expired - Lifetime DE3872707T2 (de) 1988-07-27 1988-11-11 Heliumleckdetektor.

Country Status (5)

Country Link
EP (1) EP0352371B2 (de)
JP (1) JPH061230B2 (de)
DE (1) DE3872707T2 (de)
HK (1) HK1000017A1 (de)
IT (1) IT1224604B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9202350U1 (de) * 1992-02-24 1992-04-16 Leybold Ag, 6450 Hanau, De
IT1256824B (it) * 1992-05-14 1995-12-21 Varian Spa Unita' rivelatrice di elio perfezionata.
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
DE4326267A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Lecksuchgerät
DE4326264A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5401298A (en) * 1993-09-17 1995-03-28 Leybold Inficon, Inc. Sorption pump
DE19521275A1 (de) 1995-06-10 1996-12-12 Leybold Ag Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche
DE10031882A1 (de) 2000-06-30 2002-01-10 Leybold Vakuum Gmbh Sensor für Helium oder Wasserstoff
ITTO20030032A1 (it) 2003-01-24 2004-07-25 Varian Spa Membrana permeabile selettivamente ai gas e metodo per la sua realizzazione.
WO2004111598A1 (en) * 2003-06-11 2004-12-23 Varian, Inc. Methods and apparatus for detection of large leaks in sealed articles
WO2004113862A1 (en) * 2003-06-11 2004-12-29 Varian, Inc. Methods and apparatus for leak detection in contaminated environments
CN100523764C (zh) * 2003-06-11 2009-08-05 瓦里安有限公司 通过累积方法检漏的方法和装置
WO2005059499A1 (en) * 2003-12-19 2005-06-30 Tpa Brianza Picc.Soc.Coop.A.R.L. System and device for leak detection
EP1555520B1 (de) 2004-01-13 2007-09-12 VARIAN S.p.A. Leckdetektor
DE102005021909A1 (de) * 2005-05-12 2006-11-16 Inficon Gmbh Schnüffellecksucher mit Quarzfenstersensor
DE102005043494A1 (de) * 2005-09-13 2007-03-15 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE602005010872D1 (de) 2005-09-20 2008-12-18 Varian Spa Vorrichtung und Verfahren zur Erfassung der Anwesentheit eines Prüfgases
DE102006047856A1 (de) * 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
US7497110B2 (en) 2007-02-28 2009-03-03 Varian, Inc. Methods and apparatus for test gas leak detection
FR2921488A1 (fr) 2007-09-26 2009-03-27 Alcatel Lucent Sas Dispositif et procede pour la detection de fuites a haute pression pr gaz traceur dans une piece a tester.
JP5264994B2 (ja) 2008-05-05 2013-08-14 インフィコン エービー 流体から気体分子を採取するためのガスプローブおよびガスプローブを備えた装置
JP5145148B2 (ja) * 2008-07-17 2013-02-13 株式会社アルバック ヘリウム検出ユニット
KR101422506B1 (ko) * 2013-05-24 2014-07-24 삼성중공업 주식회사 플랜지 누설검사장치 및 이를 이용한 플랜지 누설검사방법
DE102013216450A1 (de) * 2013-08-20 2015-02-26 Inficon Gmbh Pico-Prüfleck
US11230300B2 (en) * 2018-06-29 2022-01-25 Hyperloop Transportation Technologies, Inc. Method of using air and helium in low-pressure tube transportation systems

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1310649A (fr) * 1961-10-18 1962-11-30 Quartex Sa Fuite étalon à réserve de gaz, en particulier d'hélium, pour l'étalonnage de spectromètres de masse utilisés comme détecteurs de fuites
DE1648484A1 (de) * 1967-02-11 1971-07-08 Kernforschung Gmbh Ges Fuer Lecksuchgeraet zum Auffinden von feinen Leckstellen
US4459844A (en) 1982-06-17 1984-07-17 Smith & Denison Gas separation chamber and portable leak detection system
DE3613694A1 (de) * 1986-04-23 1987-10-29 Leybold Heraeus Gmbh & Co Kg Vorrichtung zur kalibrierung des detektors eines lecksuchgeraetes

Also Published As

Publication number Publication date
EP0352371B1 (de) 1992-07-08
EP0352371A3 (en) 1990-05-30
IT8867711A0 (it) 1988-07-27
JPH061230B2 (ja) 1994-01-05
EP0352371A2 (de) 1990-01-31
EP0352371B2 (de) 1996-03-27
HK1000017A1 (en) 1997-10-03
DE3872707T2 (de) 1996-08-29
JPH0254163A (ja) 1990-02-23
IT1224604B (it) 1990-10-04

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings