DE3856253D1 - Staubschutzschicht - Google Patents
StaubschutzschichtInfo
- Publication number
- DE3856253D1 DE3856253D1 DE3856253T DE3856253T DE3856253D1 DE 3856253 D1 DE3856253 D1 DE 3856253D1 DE 3856253 T DE3856253 T DE 3856253T DE 3856253 T DE3856253 T DE 3856253T DE 3856253 D1 DE3856253 D1 DE 3856253D1
- Authority
- DE
- Germany
- Prior art keywords
- dust
- line
- proof film
- protection layer
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000428 dust Substances 0.000 title 1
- 238000002834 transmittance Methods 0.000 abstract 2
- DQEFEBPAPFSJLV-UHFFFAOYSA-N Cellulose propionate Chemical compound CCC(=O)OCC1OC(OC(=O)CC)C(OC(=O)CC)C(OC(=O)CC)C1OC1C(OC(=O)CC)C(OC(=O)CC)C(OC(=O)CC)C(COC(=O)CC)O1 DQEFEBPAPFSJLV-UHFFFAOYSA-N 0.000 abstract 1
- 239000004793 Polystyrene Substances 0.000 abstract 1
- 229920002678 cellulose Polymers 0.000 abstract 1
- 229920006218 cellulose propionate Polymers 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229920002223 polystyrene Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Insulating Materials (AREA)
- Fluid-Damping Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26988887A JPH0798869B2 (ja) | 1987-10-26 | 1987-10-26 | フォトマスク保護用防塵膜 |
| JP62290882A JPH01133052A (ja) | 1987-11-18 | 1987-11-18 | 防塵膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3856253D1 true DE3856253D1 (de) | 1998-10-29 |
| DE3856253T2 DE3856253T2 (de) | 1999-04-08 |
Family
ID=26548963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3856253T Expired - Fee Related DE3856253T2 (de) | 1987-10-26 | 1988-10-24 | Staubschutzschicht |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5028702A (de) |
| EP (1) | EP0314418B1 (de) |
| KR (1) | KR910009610B1 (de) |
| AT (1) | ATE171550T1 (de) |
| CA (1) | CA1330860C (de) |
| DE (1) | DE3856253T2 (de) |
| ES (1) | ES2124686T3 (de) |
| HK (1) | HK1003950A1 (de) |
| MY (1) | MY103629A (de) |
| SG (1) | SG47433A1 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5339197A (en) * | 1989-03-31 | 1994-08-16 | Yen Yung Tsai | Optical pellicle with controlled transmission peaking |
| DE69327286T2 (de) * | 1992-09-24 | 2000-05-11 | Daicel Chem | Verfahren zur Herstellung eines Fettsäureesters von Cellulose |
| US5741576A (en) * | 1995-09-06 | 1998-04-21 | Inko Industrial Corporation | Optical pellicle with controlled transmission peaks and anti-reflective coatings |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1119873A (en) * | 1976-10-22 | 1982-03-16 | Scott Paper Company | Diazo composition containing an azo coupling component precursor, a light sensitive acid progenitor and a carboxylic anhydride |
| US4756007A (en) * | 1984-03-08 | 1988-07-05 | Codex Corporation | Adaptive communication rate modem |
| GB2165545B (en) * | 1984-10-16 | 1988-03-30 | Du Pont | Pellicle structure for transmission of mid ultraviolet light |
| JPS61130346A (ja) * | 1984-11-28 | 1986-06-18 | Daicel Chem Ind Ltd | 樹脂薄膜 |
| JPS6235359A (ja) * | 1985-08-09 | 1987-02-16 | Daicel Chem Ind Ltd | コ−テツド薄膜の製造法 |
| DE3750353T2 (de) * | 1986-06-12 | 1994-12-08 | Mitsui Petrochemical Ind | Verfahren zur Herstellung von Celluloseesterfolien. |
-
1988
- 1988-10-20 CA CA000580730A patent/CA1330860C/en not_active Expired - Fee Related
- 1988-10-22 MY MYPI88001207A patent/MY103629A/en unknown
- 1988-10-24 EP EP88309983A patent/EP0314418B1/de not_active Expired - Lifetime
- 1988-10-24 KR KR1019880013854A patent/KR910009610B1/ko not_active IP Right Cessation
- 1988-10-24 DE DE3856253T patent/DE3856253T2/de not_active Expired - Fee Related
- 1988-10-24 AT AT88309983T patent/ATE171550T1/de not_active IP Right Cessation
- 1988-10-24 SG SG1996001337A patent/SG47433A1/en unknown
- 1988-10-24 ES ES88309983T patent/ES2124686T3/es not_active Expired - Lifetime
- 1988-10-26 US US07/262,809 patent/US5028702A/en not_active Expired - Fee Related
-
1998
- 1998-04-17 HK HK98103210A patent/HK1003950A1/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE3856253T2 (de) | 1999-04-08 |
| ATE171550T1 (de) | 1998-10-15 |
| KR890007395A (ko) | 1989-06-19 |
| US5028702A (en) | 1991-07-02 |
| CA1330860C (en) | 1994-07-26 |
| HK1003950A1 (en) | 1998-11-13 |
| MY103629A (en) | 1993-08-28 |
| ES2124686T3 (es) | 1999-02-16 |
| KR910009610B1 (ko) | 1991-11-23 |
| EP0314418B1 (de) | 1998-09-23 |
| EP0314418A3 (de) | 1991-01-30 |
| SG47433A1 (en) | 1998-04-17 |
| EP0314418A2 (de) | 1989-05-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |