DE3854236D1 - Laser-Apparat. - Google Patents

Laser-Apparat.

Info

Publication number
DE3854236D1
DE3854236D1 DE3854236T DE3854236T DE3854236D1 DE 3854236 D1 DE3854236 D1 DE 3854236D1 DE 3854236 T DE3854236 T DE 3854236T DE 3854236 T DE3854236 T DE 3854236T DE 3854236 D1 DE3854236 D1 DE 3854236D1
Authority
DE
Germany
Prior art keywords
laser apparatus
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3854236T
Other languages
English (en)
Other versions
DE3854236T2 (de
Inventor
Takuhiro Ono
Naoya Horiuchi
Takashi Iwabuchi
Takeo Miyata
Reiji Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6458187A external-priority patent/JPS63229869A/ja
Priority claimed from JP6458087A external-priority patent/JPH0714086B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE3854236D1 publication Critical patent/DE3854236D1/de
Publication of DE3854236T2 publication Critical patent/DE3854236T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
    • H01S3/076—Folded-path lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE3854236T 1987-03-19 1988-03-18 Laser-Apparat. Expired - Fee Related DE3854236T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6458187A JPS63229869A (ja) 1987-03-19 1987-03-19 レ−ザ−発振器
JP6458087A JPH0714086B2 (ja) 1987-03-19 1987-03-19 エキシマレ−ザ装置

Publications (2)

Publication Number Publication Date
DE3854236D1 true DE3854236D1 (de) 1995-08-31
DE3854236T2 DE3854236T2 (de) 1996-04-04

Family

ID=26405668

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3884832T Expired - Fee Related DE3884832T2 (de) 1987-03-19 1988-03-18 Laservorrichtung.
DE3854236T Expired - Fee Related DE3854236T2 (de) 1987-03-19 1988-03-18 Laser-Apparat.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3884832T Expired - Fee Related DE3884832T2 (de) 1987-03-19 1988-03-18 Laservorrichtung.

Country Status (3)

Country Link
US (1) US5042047A (de)
EP (2) EP0495535B1 (de)
DE (2) DE3884832T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69111061T2 (de) * 1991-02-08 1996-04-11 Mitsubishi Electric Corp Pulslaservorrichtung.
DE4112311A1 (de) * 1991-04-15 1992-10-22 Max Planck Gesellschaft Transversal elektrisch gepumpter gaslaser mit schraeg ausgefuehrtem strahldurchgang
JPH05259584A (ja) * 1992-01-14 1993-10-08 Internatl Business Mach Corp <Ibm> 集積光デフレクタおよびその製造方法
TW228618B (de) * 1992-03-31 1994-08-21 Toshiba Co Ltd
US5557629A (en) * 1992-08-28 1996-09-17 Kabushiki Kaisha Komatsu Seisakusho Laser device having an electrode with auxiliary conductor members
DE4229137C2 (de) * 1992-09-01 1994-06-16 Deutsche Forsch Luft Raumfahrt Gepulstes Hochleistungslasersystem
DE4229139C2 (de) * 1992-09-01 1994-06-16 Deutsche Forsch Luft Raumfahrt Gepulstes Hochleistungslasersystem
US5315614A (en) * 1993-05-03 1994-05-24 The Spectranetics Corporation Apparatus and method for soft focusing energy into an optical fiber array
DE4426723A1 (de) * 1994-07-22 1996-01-25 Atl Lasertechnik & Accessoires Gleitentladungsvorionisation für Gaslaser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US7471708B2 (en) * 2005-03-31 2008-12-30 Cymer, Inc. Gas discharge laser output light beam parameter control

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3500240A (en) * 1964-11-30 1970-03-10 Us Navy Simple traveling wave laser using total - internal - reflection resonator
US3581229A (en) * 1968-08-27 1971-05-25 Gen Electric Face-pumped laser device with optical path folding
FR2144141A6 (de) * 1971-07-01 1973-02-09 Comp Generale Electricite
DE2850521C2 (de) * 1978-11-22 1986-05-22 Eltro GmbH, Gesellschaft für Strahlungstechnik, 6900 Heidelberg Transversal angeregter, bei Atmosphärendruck arbeitender Gaslaser
US4423510A (en) * 1979-08-17 1983-12-27 Westinghouse Electric Corp. Laser tube design incorporating low inductance capacitor
JPS56131985A (en) * 1980-03-19 1981-10-15 Mitsubishi Electric Corp Amplifying device for laser beam
DE3013302A1 (de) * 1980-04-05 1981-10-08 Eltro GmbH, Gesellschaft für Strahlungstechnik, 6900 Heidelberg Wellenleiterlaser mit frustrationselement
US4417342A (en) * 1981-03-03 1983-11-22 Lumonics Inc. Laser
DE3403841A1 (de) * 1984-02-03 1985-08-08 Siemens AG, 1000 Berlin und 8000 München Gaslaser, insbesondere te-laser
NO853264L (no) * 1984-10-15 1986-04-16 Siemens Ag Transversalt eksitert gasslaser og fremgangsm¨te til dens drift.

Also Published As

Publication number Publication date
US5042047A (en) 1991-08-20
EP0283044B1 (de) 1993-10-13
DE3854236T2 (de) 1996-04-04
DE3884832T2 (de) 1994-05-19
EP0495535A1 (de) 1992-07-22
DE3884832D1 (de) 1993-11-18
EP0495535B1 (de) 1995-07-26
EP0283044A2 (de) 1988-09-21
EP0283044A3 (en) 1988-10-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee