DE3838333A1 - Kapazitaetsmanometer mit kraftentlastung der festelektrode - Google Patents

Kapazitaetsmanometer mit kraftentlastung der festelektrode

Info

Publication number
DE3838333A1
DE3838333A1 DE3838333A DE3838333A DE3838333A1 DE 3838333 A1 DE3838333 A1 DE 3838333A1 DE 3838333 A DE3838333 A DE 3838333A DE 3838333 A DE3838333 A DE 3838333A DE 3838333 A1 DE3838333 A1 DE 3838333A1
Authority
DE
Germany
Prior art keywords
electrode
pressure
fixed electrode
membrane
bearing elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE3838333A
Other languages
German (de)
English (en)
Other versions
DE3838333C2 (enExample
Inventor
Robert J Ferran
Gordon E Osterstrom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Vacuum General Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vacuum General Inc filed Critical Vacuum General Inc
Publication of DE3838333A1 publication Critical patent/DE3838333A1/de
Application granted granted Critical
Publication of DE3838333C2 publication Critical patent/DE3838333C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/12—Measuring inclination, e.g. by clinometers, by levels by using a single pendulum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE3838333A 1988-05-03 1988-11-11 Kapazitaetsmanometer mit kraftentlastung der festelektrode Granted DE3838333A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/189,780 US4823603A (en) 1988-05-03 1988-05-03 Capacitance manometer having stress relief for fixed electrode

Publications (2)

Publication Number Publication Date
DE3838333A1 true DE3838333A1 (de) 1989-11-16
DE3838333C2 DE3838333C2 (enExample) 1990-12-13

Family

ID=22698745

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3838333A Granted DE3838333A1 (de) 1988-05-03 1988-11-11 Kapazitaetsmanometer mit kraftentlastung der festelektrode

Country Status (7)

Country Link
US (1) US4823603A (enExample)
JP (1) JPH01307632A (enExample)
KR (2) KR890017528A (enExample)
CH (1) CH674263A5 (enExample)
DE (1) DE3838333A1 (enExample)
FR (1) FR2631120B1 (enExample)
GB (2) GB8814942D0 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3942020A1 (de) * 1989-12-20 1991-07-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandsmessung mit einem kapazitiven druckwandler
DE3942047A1 (de) * 1989-12-20 1991-07-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandmessung

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE461300B (sv) * 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
CA2058916C (en) * 1991-01-28 2000-03-21 Dean Joseph Maurer Piezoresistive pressure transducer with a conductive elastomeric seal
US5271277A (en) * 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
US5343757A (en) * 1992-05-21 1994-09-06 Fuji Koki Manufacturing Co., Ltd. Pressure sensor
US5396803A (en) * 1993-07-07 1995-03-14 Tylan General, Inc. Dual balanced capacitance manometers for suppressing vibration effects
US5349865A (en) * 1993-08-30 1994-09-27 Kavlico Corporation Wide-pressure-range, adaptable, simplified pressure transducer
US5452613A (en) * 1993-10-04 1995-09-26 Granville-Phillips Company Wide range vacuum gauge
SE506558C2 (sv) * 1994-04-14 1998-01-12 Cecap Ab Givarelement för tryckgivare
DE4425164C2 (de) * 1994-07-18 2002-05-16 Ifm Electronic Gmbh Kapazitiver Sensor
US5942692A (en) * 1997-04-10 1999-08-24 Mks Instruments, Inc. Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
US6019002A (en) * 1997-12-02 2000-02-01 Setra Systems, Inc. Pressure transducer having a tensioned diaphragm
US5939639A (en) * 1997-12-04 1999-08-17 Setra Systems, Inc. Pressure transducer housing with barometric pressure isolation
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US6568274B1 (en) * 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6105436A (en) * 1999-07-23 2000-08-22 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US6807865B2 (en) 2002-02-04 2004-10-26 Dwyer Instruments, Inc. Pressure sensor with a radially tensioned metal diaphragm
US6734659B1 (en) * 2002-06-13 2004-05-11 Mykrolis Corporation Electronic interface for use with dual electrode capacitance diaphragm gauges
US6837111B2 (en) * 2002-06-24 2005-01-04 Mykrolis Corporation Variable capacitance measuring device
US7000482B2 (en) * 2002-06-24 2006-02-21 Mykrolis Corporation Variable capacitance measuring device
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
JP4563312B2 (ja) * 2005-12-05 2010-10-13 株式会社堀場エステック 静電容量式圧力センサ装置
US20090015269A1 (en) * 2007-07-13 2009-01-15 Pinto Gino A Stray Capacitance Compensation for a Capacitive Sensor
US7757563B2 (en) * 2008-04-10 2010-07-20 Mks Instruments, Inc. Capacitance manometers and methods of making same
US8141430B2 (en) * 2009-07-01 2012-03-27 Brooks Instrument, Llc Monolithic vacuum manometer utilizing electrostatic interference as a means of detection
US8561471B2 (en) * 2010-02-02 2013-10-22 Mks Instruments, Inc. Capacitive pressure sensor with improved electrode structure
US8893555B2 (en) 2011-09-01 2014-11-25 Setra Systems, Inc. Pressure measuring instrument
CN103998909B (zh) 2011-09-29 2016-04-27 Mks仪器公司 具有改善的电极结构的电容式压力传感器
CN105758579B (zh) 2011-10-11 2019-06-11 Mks 仪器公司 压力传感器
US8997576B2 (en) 2013-01-18 2015-04-07 Reno Technologies, Inc. Method and system for monitoring gas pressure for reference cavity of capacitance diaphragm gauge
US8997548B2 (en) 2013-01-29 2015-04-07 Reno Technologies, Inc. Apparatus and method for automatic detection of diaphragm coating or surface contamination for capacitance diaphragm gauges
US8862420B2 (en) 2013-02-05 2014-10-14 Reno Sub-Sustems Canada Incorporated Multi-axis tilt sensor for correcting gravitational effects on the measurement of pressure by a capacitance diaphragm gauge
US8965725B2 (en) 2013-02-05 2015-02-24 Reno Technologies, Inc. Automatic calibration adjustment of capacitance diaphragm gauges to compensate for errors due to changes in atmospheric pressure
US8997575B2 (en) 2013-02-13 2015-04-07 Reno Technologies, Inc. Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges
US9194760B2 (en) 2013-03-14 2015-11-24 Dwyer Instruments, Inc. Capacitive pressure sensor with reduced parasitic capacitance
EP2990773B1 (en) * 2013-11-25 2021-08-04 Horiba Stec, Co., Ltd. Capacitive pressure sensor
WO2015076413A1 (ja) 2013-11-25 2015-05-28 株式会社堀場エステック 静電容量型圧力センサ
KR20180116351A (ko) * 2016-02-25 2018-10-24 인피콘 아크티엔게젤샤프트 다중 전극을 구비한 용량식 진공 측정 셀
RU174317U1 (ru) * 2016-12-19 2017-10-11 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" Сорбционный электретный газоанализатор
CN107843379B (zh) * 2017-12-13 2023-09-22 沈阳市传感技术研究所 装配式定电极的电容压力传感器
KR102622726B1 (ko) * 2019-05-15 2024-01-08 스미토모 크라이어제닉스 오브 아메리카 인코포레이티드 진공 게이지를 위한 브리지 전압 반전 회로 및 전압 반전 회로를 갖는 압력 게이지 센서
CN110987281B (zh) * 2019-11-29 2022-06-07 中国科学院微电子研究所 环形支撑结构及应用其的陶瓷电容式压力传感器
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
CN114323355B (zh) * 2022-03-15 2022-06-03 季华实验室 用于电容薄膜规的压力测量系统、方法及电容薄膜规
CN116202681A (zh) * 2022-12-02 2023-06-02 北京晨晶精仪电子有限公司 薄膜电容式真空规

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555621A (en) * 1967-04-22 1971-01-19 Tamagawa Kikai Kinzoku Kk Compacting apparatus for magnetic powders
DE2948165A1 (de) * 1978-12-01 1980-06-26 Besco Ind Inc Kapazitiver wandler, insbesondere auf kraft ansprechender wandler

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2751530A (en) * 1954-01-04 1956-06-19 Honeywell Regulator Co Differential pressure sensing unit
US3557621A (en) * 1969-07-07 1971-01-26 C G S Scient Corp Inc Variable capacitance detecting devices
US4380041A (en) * 1978-09-25 1983-04-12 Motorola Inc. Capacitor pressure transducer with housing
US4587851A (en) * 1985-02-26 1986-05-13 Edward Mortberg High vacuum capacitance manometer having Px side open housing
US4703658A (en) * 1986-06-18 1987-11-03 Motorola, Inc. Pressure sensor assembly

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555621A (en) * 1967-04-22 1971-01-19 Tamagawa Kikai Kinzoku Kk Compacting apparatus for magnetic powders
DE2948165A1 (de) * 1978-12-01 1980-06-26 Besco Ind Inc Kapazitiver wandler, insbesondere auf kraft ansprechender wandler

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3942020A1 (de) * 1989-12-20 1991-07-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandsmessung mit einem kapazitiven druckwandler
DE3942047A1 (de) * 1989-12-20 1991-07-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandmessung

Also Published As

Publication number Publication date
KR890017522A (ko) 1989-12-16
JPH0364813B2 (enExample) 1991-10-08
KR930004079B1 (en) 1993-05-20
GB8814942D0 (en) 1988-07-27
JPH01307632A (ja) 1989-12-12
FR2631120A1 (fr) 1989-11-10
KR890017528A (ko) 1989-12-16
CH674263A5 (enExample) 1990-05-15
FR2631120B1 (fr) 1993-09-03
GB8826782D0 (en) 1988-12-21
US4823603A (en) 1989-04-25
DE3838333C2 (enExample) 1990-12-13
GB2218207A (en) 1989-11-08
GB2218207B (en) 1992-04-08

Similar Documents

Publication Publication Date Title
DE3838333C2 (enExample)
DE69213904T2 (de) Kapazitiver Druckwandler
DE3310643C2 (de) Drucksensor
DE2459612C2 (de) Kapazitiver Druckwandler
DE3814109C2 (de) Kondensatoranordnung zur Verwendung in Druckfühlern
DE3883067T2 (de) Kapazitives Manometer zur Absolutdruckmessung.
DE2124979C2 (de) Kapazitiver Druckfühler
DE69111337T2 (de) Druckmassfühler.
DE3535904C2 (de) Kapazitiver Absolutdruck-Sensor
DE2411212A1 (de) Druckmesseinrichtung
DE112011100416T5 (de) Kapazitiver Drucksensor
EP0718612B1 (de) Zündkerze mit Kraftmesselement und geteiltem Isolierkörper
DE19743749A1 (de) Halbleiterdrucksensor
EP0480170A2 (de) Sensor für ein Kapazitäts-Manometer
DE10100321A1 (de) Kapazitive Druckmessung mit beweglichem Dielektrikum
DE3436440A1 (de) Halbleiter-messeinrichtung
EP0548043B1 (de) Drucksensor
EP0464021B1 (de) Messeinrichtung mit einer hilfselektrode für eine gasisolierte gekapselte hochspannungsanlage
DE3920674C2 (de) Druckdetektor vom elektrostatischen Kapazitätstyp
DE4224524A1 (de) Elektrostatischer kapazitaetstyp-differenzdruckdetektor
EP0147614A2 (de) Druckaufnehmer mit Sensorquarz
DE19912214A1 (de) Hochspannungskeramikkondensator
EP0889490A2 (de) Stromwandler für eine metallgekapselte Gasisolierte Hochspannungsanlage
DE9102748U1 (de) Drucksensor für niedere Drücke
DE2725744A1 (de) Druckfuehler sowie verfahren zum zusammenbau eines solchen

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8127 New person/name/address of the applicant

Owner name: TYLAN GENERAL, INC. (N.D.GES.D.STAATES MASSACHUSET

D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: TYLAN GENERAL, INC. (N.D.GES.D. STAATES DELAWARE),

8327 Change in the person/name/address of the patent owner

Owner name: MILLIPORE CORP., BEDFORD, MASS., US

8327 Change in the person/name/address of the patent owner

Owner name: MYKROLIS CORP., BEDFORD, MASS., US

8328 Change in the person/name/address of the agent

Free format text: DERZEIT KEIN VERTRETER BESTELLT

8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS,INC.(N.D.GES.D.STAATES DELAWARE), CHA, US

8328 Change in the person/name/address of the agent

Representative=s name: BUSSE & BUSSE, PATENT- UND RECHTSANWAELTE, 49084 O