DE3829338A1 - Vorrichtung zur ionisation eines polarisierten atomstrahls - Google Patents

Vorrichtung zur ionisation eines polarisierten atomstrahls

Info

Publication number
DE3829338A1
DE3829338A1 DE19883829338 DE3829338A DE3829338A1 DE 3829338 A1 DE3829338 A1 DE 3829338A1 DE 19883829338 DE19883829338 DE 19883829338 DE 3829338 A DE3829338 A DE 3829338A DE 3829338 A1 DE3829338 A1 DE 3829338A1
Authority
DE
Germany
Prior art keywords
combustion chamber
plasma
polarized
atomic beam
plasma combustion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19883829338
Other languages
German (de)
English (en)
Other versions
DE3829338C2 (enExample
Inventor
Erfinder Wird Nachtraeglich Benannt Der
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Scherrer Paul Institut
Karlsruher Institut fuer Technologie KIT
Original Assignee
Scherrer Paul Institut
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scherrer Paul Institut, Kernforschungszentrum Karlsruhe GmbH filed Critical Scherrer Paul Institut
Priority to DE19883829338 priority Critical patent/DE3829338A1/de
Publication of DE3829338A1 publication Critical patent/DE3829338A1/de
Application granted granted Critical
Publication of DE3829338C2 publication Critical patent/DE3829338C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
DE19883829338 1988-08-30 1988-08-30 Vorrichtung zur ionisation eines polarisierten atomstrahls Granted DE3829338A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19883829338 DE3829338A1 (de) 1988-08-30 1988-08-30 Vorrichtung zur ionisation eines polarisierten atomstrahls

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883829338 DE3829338A1 (de) 1988-08-30 1988-08-30 Vorrichtung zur ionisation eines polarisierten atomstrahls

Publications (2)

Publication Number Publication Date
DE3829338A1 true DE3829338A1 (de) 1990-03-01
DE3829338C2 DE3829338C2 (enExample) 1993-04-29

Family

ID=6361853

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883829338 Granted DE3829338A1 (de) 1988-08-30 1988-08-30 Vorrichtung zur ionisation eines polarisierten atomstrahls

Country Status (1)

Country Link
DE (1) DE3829338A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4127361A1 (de) * 1991-08-19 1993-02-25 Harald Dr Morgner Verfahren zur erzeugung von beugungsbildern von oberflaechen mit hilfe von angeregten edelgasatomen
DE10334452A1 (de) * 2003-07-26 2005-11-03 Forschungszentrum Jülich GmbH Speicherringanordnung

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19641439C2 (de) * 1995-04-08 2000-09-07 Ehret Hans P ECR-Ionen-Quelle
DE19513345C2 (de) * 1995-04-08 2000-08-03 Ehret Hans P ECR-Ionenquelle
DE19900437B4 (de) * 1999-01-11 2009-04-23 Ehret, Hans-P. Verfahren und Vorrichtung zur Ionenimplantation in Festkörpern und/oder zur Beschichtung von Festkörperoberflächen sowie die Verwendung von Verfahren und Vorrichtung

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Helvetida Physica Acta Bd. 59(1986) S 513-525 *
Nucl. Instrum. and Methods in Physics Research, Bd. A 238, 1985, S. 195-199 *
Nucl. Instrum. and Methods in Physics Research, Bd. B 26, 1987, S. 253-258 *
Physica Scripta, Bd. T3, 1983, S. 52-55 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4127361A1 (de) * 1991-08-19 1993-02-25 Harald Dr Morgner Verfahren zur erzeugung von beugungsbildern von oberflaechen mit hilfe von angeregten edelgasatomen
DE10334452A1 (de) * 2003-07-26 2005-11-03 Forschungszentrum Jülich GmbH Speicherringanordnung

Also Published As

Publication number Publication date
DE3829338C2 (enExample) 1993-04-29

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee