DE3825683C1 - - Google Patents

Info

Publication number
DE3825683C1
DE3825683C1 DE3825683A DE3825683A DE3825683C1 DE 3825683 C1 DE3825683 C1 DE 3825683C1 DE 3825683 A DE3825683 A DE 3825683A DE 3825683 A DE3825683 A DE 3825683A DE 3825683 C1 DE3825683 C1 DE 3825683C1
Authority
DE
Germany
Prior art keywords
plate
plates
gas
polarizer
gas component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3825683A
Other languages
German (de)
English (en)
Inventor
Rolf Dipl.-Phys. 7801 Reute De Disch
Wolfgang Dipl.-Phys. Dr.Rer.Nat. 7808 Waldkirch De Hartig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Erwin Sick Optik-Elektronik 7808 Waldkirch De GmbH
Original Assignee
Erwin Sick Optik-Elektronik 7808 Waldkirch De GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Erwin Sick Optik-Elektronik 7808 Waldkirch De GmbH filed Critical Erwin Sick Optik-Elektronik 7808 Waldkirch De GmbH
Priority to DE3825683A priority Critical patent/DE3825683C1/de
Priority to DE89106735T priority patent/DE58906480D1/de
Priority to EP89106735A priority patent/EP0354298B1/de
Priority to AT89106735T priority patent/ATE99049T1/de
Priority to US07/383,461 priority patent/US5013153A/en
Priority to PT91320A priority patent/PT91320B/pt
Priority to JP1196478A priority patent/JPH0275936A/ja
Application granted granted Critical
Publication of DE3825683C1 publication Critical patent/DE3825683C1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1291—Generating the spectrum; Monochromators polarised, birefringent
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1838—Holographic gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N2021/3129—Determining multicomponents by multiwavelength light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N2021/3129—Determining multicomponents by multiwavelength light
    • G01N2021/3137—Determining multicomponents by multiwavelength light with selection of wavelengths after the sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
DE3825683A 1988-07-28 1988-07-28 Expired DE3825683C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE3825683A DE3825683C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-28 1988-07-28
DE89106735T DE58906480D1 (de) 1988-07-28 1989-04-14 Interferometrisches Gaskomponenten-Messgerät für kleine Gasmoleküle.
EP89106735A EP0354298B1 (de) 1988-07-28 1989-04-14 Interferometrisches Gaskomponenten-Messgerät für kleine Gasmoleküle
AT89106735T ATE99049T1 (de) 1988-07-28 1989-04-14 Interferometrisches gaskomponenten-messgeraet fuer kleine gasmolekuele.
US07/383,461 US5013153A (en) 1988-07-28 1989-07-20 Interferometric gas component measuring apparatus for small gas molecules
PT91320A PT91320B (pt) 1988-07-28 1989-07-28 Aparelho interferometrico para medir componentes gasosos para pequenas moleculas de gas
JP1196478A JPH0275936A (ja) 1988-07-28 1989-07-28 小さなガス分子用の光学干渉法によるガス成分の測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3825683A DE3825683C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-28 1988-07-28

Publications (1)

Publication Number Publication Date
DE3825683C1 true DE3825683C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-12-28

Family

ID=6359779

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3825683A Expired DE3825683C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-28 1988-07-28
DE89106735T Expired - Fee Related DE58906480D1 (de) 1988-07-28 1989-04-14 Interferometrisches Gaskomponenten-Messgerät für kleine Gasmoleküle.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE89106735T Expired - Fee Related DE58906480D1 (de) 1988-07-28 1989-04-14 Interferometrisches Gaskomponenten-Messgerät für kleine Gasmoleküle.

Country Status (6)

Country Link
US (1) US5013153A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0354298B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH0275936A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AT (1) ATE99049T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (2) DE3825683C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
PT (1) PT91320B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4104636A1 (de) * 1991-02-15 1992-08-20 Bran & Luebbe Polarisationsinterferometer mit schmalbandfilter
DE4314535A1 (de) * 1993-05-03 1994-11-10 Sick Optik Elektronik Erwin Inferferometrisches Gaskomponenten-Meßgerät
DE19605383A1 (de) * 1996-02-14 1997-08-21 Buehler Ag Polarisationsinterferometer

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5157458A (en) * 1989-03-03 1992-10-20 Buhler Ag Polarization interferometer spectrometer
DE59310263D1 (de) * 1992-12-01 2002-03-21 Ulrich Walter Glaus Verfahren zur Bestimmung von Stoffen und/oder deren Eigenschaften und Gerät hierfür
US5719397A (en) * 1993-10-04 1998-02-17 Spectrasense Limited Target material detection
DE10131684C1 (de) * 2001-06-29 2002-12-12 Zeiss Carl Jena Gmbh Vorrichtung und Verfahren zur ortsaufgelösten Messung einer Schichtdicke
EP1482287A1 (de) * 2003-05-26 2004-12-01 Abb Research Ltd. Polarisations-Fourier-Spektrometer
RU2303237C2 (ru) * 2005-04-26 2007-07-20 Общество с ограниченной ответственностью "ОПТИС" Интерферометрическое устройство для измерения оптической толщины прозрачного слоя или зазора
DE102012205311B4 (de) * 2012-03-30 2013-10-17 Anton Paar Gmbh Optische Vorrichtung, insbesondere Polarimeter, zur Detektion von Inhomogenitäten in einer Probe
NL2020863B1 (en) * 2018-05-03 2019-11-12 Univ Leiden Apparatus for determining presence of a gas
US11143556B1 (en) * 2020-06-07 2021-10-12 Evgueni Vladimirovich Ivanov Birefringent interferometer and fourier transform spectrometer
CN113777068B (zh) * 2021-09-13 2023-07-18 国网四川省电力公司电力科学研究院 一种多波段腔增强红外光梳光谱气体检测系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2604471A1 (de) * 1975-02-11 1976-08-26 Anvar Interferenzspektrometer
EP0091545A2 (en) * 1982-04-12 1983-10-19 International Business Machines Corporation Ellipsometers
DE3612733A1 (de) * 1985-04-25 1986-10-30 Elf France, Courbevoie Interferometrischer gasspuerer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2566532B1 (fr) * 1984-06-22 1986-09-12 Elf France Detecteur de gaz par interferometrie
FR2633394B1 (fr) * 1988-06-28 1990-10-12 Elf France Procede et installation pour la detection, la localisation et la quantification a distance d'un gaz dans une atmosphere et filtre spectral a transmission modulable destine a la mise en oeuvre de ce procede et a la realisation de cette installation

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2604471A1 (de) * 1975-02-11 1976-08-26 Anvar Interferenzspektrometer
EP0091545A2 (en) * 1982-04-12 1983-10-19 International Business Machines Corporation Ellipsometers
DE3612733A1 (de) * 1985-04-25 1986-10-30 Elf France, Courbevoie Interferometrischer gasspuerer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4104636A1 (de) * 1991-02-15 1992-08-20 Bran & Luebbe Polarisationsinterferometer mit schmalbandfilter
DE4314535A1 (de) * 1993-05-03 1994-11-10 Sick Optik Elektronik Erwin Inferferometrisches Gaskomponenten-Meßgerät
DE19605383A1 (de) * 1996-02-14 1997-08-21 Buehler Ag Polarisationsinterferometer

Also Published As

Publication number Publication date
ATE99049T1 (de) 1994-01-15
US5013153A (en) 1991-05-07
EP0354298A3 (de) 1991-05-02
DE58906480D1 (de) 1994-02-03
PT91320B (pt) 1995-07-06
JPH0275936A (ja) 1990-03-15
EP0354298B1 (de) 1993-12-22
PT91320A (pt) 1990-02-08
EP0354298A2 (de) 1990-02-14

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Legal Events

Date Code Title Description
8100 Publication of patent without earlier publication of application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee