DE3820878C2 - - Google Patents

Info

Publication number
DE3820878C2
DE3820878C2 DE19883820878 DE3820878A DE3820878C2 DE 3820878 C2 DE3820878 C2 DE 3820878C2 DE 19883820878 DE19883820878 DE 19883820878 DE 3820878 A DE3820878 A DE 3820878A DE 3820878 C2 DE3820878 C2 DE 3820878C2
Authority
DE
Germany
Prior art keywords
elastic element
electrode
electrode arrangement
capacitive sensor
main electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19883820878
Other languages
German (de)
English (en)
Other versions
DE3820878A1 (de
Inventor
Wolfgang Dipl.-Phys. 5900 Siegen De Scholl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19883820878 priority Critical patent/DE3820878A1/de
Publication of DE3820878A1 publication Critical patent/DE3820878A1/de
Application granted granted Critical
Publication of DE3820878C2 publication Critical patent/DE3820878C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DE19883820878 1988-06-21 1988-06-21 Kapazitives sensorelement zum aufbau mechanisch-elektrischer messwandler Granted DE3820878A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19883820878 DE3820878A1 (de) 1988-06-21 1988-06-21 Kapazitives sensorelement zum aufbau mechanisch-elektrischer messwandler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883820878 DE3820878A1 (de) 1988-06-21 1988-06-21 Kapazitives sensorelement zum aufbau mechanisch-elektrischer messwandler

Publications (2)

Publication Number Publication Date
DE3820878A1 DE3820878A1 (de) 1989-12-28
DE3820878C2 true DE3820878C2 (en, 2012) 1990-09-13

Family

ID=6356891

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883820878 Granted DE3820878A1 (de) 1988-06-21 1988-06-21 Kapazitives sensorelement zum aufbau mechanisch-elektrischer messwandler

Country Status (1)

Country Link
DE (1) DE3820878A1 (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005015160A1 (de) * 2005-02-17 2006-08-31 Continental Teves Ag & Co. Ohg Drucksensor mit kapazitivem Messprinzip
US8429978B2 (en) 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
CN103480197B (zh) * 2013-10-12 2015-03-04 桂林宇辉信息科技有限责任公司 环境水样全自动过滤装置过滤膜工作状态智能检测器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3859575A (en) * 1974-02-11 1975-01-07 Lee Shih Ying Variable capacitance sensor
US4295376A (en) * 1978-12-01 1981-10-20 Besco Industries, Inc. Force responsive transducer
DE3037802A1 (de) * 1980-10-07 1982-05-13 Robert Bosch Gmbh, 7000 Stuttgart Kapazitiver weg-frequenz-messgroessenwandler, insbesondere druck-frequenzwandler
CH652823A5 (de) * 1980-03-26 1985-11-29 Bosch Gmbh Robert Weg-frequenz-messgroessenwandler.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005015160A1 (de) * 2005-02-17 2006-08-31 Continental Teves Ag & Co. Ohg Drucksensor mit kapazitivem Messprinzip
US8429978B2 (en) 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor

Also Published As

Publication number Publication date
DE3820878A1 (de) 1989-12-28

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee
8370 Indication of lapse of patent is to be deleted
8365 Fully valid after opposition proceedings
8339 Ceased/non-payment of the annual fee