DE3820783C2 - - Google Patents
Info
- Publication number
- DE3820783C2 DE3820783C2 DE19883820783 DE3820783A DE3820783C2 DE 3820783 C2 DE3820783 C2 DE 3820783C2 DE 19883820783 DE19883820783 DE 19883820783 DE 3820783 A DE3820783 A DE 3820783A DE 3820783 C2 DE3820783 C2 DE 3820783C2
- Authority
- DE
- Germany
- Prior art keywords
- optics
- image
- adjustment
- arrangement according
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 201000009310 astigmatism Diseases 0.000 claims description 49
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000004868 gas analysis Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 241000937413 Axia Species 0.000 description 1
- 235000010678 Paulownia tomentosa Nutrition 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004454 trace mineral analysis Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0237—Adjustable, e.g. focussing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Head (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19883820783 DE3820783A1 (de) | 1988-06-20 | 1988-06-20 | Optische anordnung zur korrektur einer astigmatischen abbildung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19883820783 DE3820783A1 (de) | 1988-06-20 | 1988-06-20 | Optische anordnung zur korrektur einer astigmatischen abbildung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3820783A1 DE3820783A1 (de) | 1990-01-04 |
DE3820783C2 true DE3820783C2 (ja) | 1990-04-26 |
Family
ID=6356842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19883820783 Granted DE3820783A1 (de) | 1988-06-20 | 1988-06-20 | Optische anordnung zur korrektur einer astigmatischen abbildung |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3820783A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL2021608A (en) * | 2017-09-20 | 2019-03-26 | Asml Netherlands Bv | Control system for a lithographic apparatus |
-
1988
- 1988-06-20 DE DE19883820783 patent/DE3820783A1/de active Granted
Also Published As
Publication number | Publication date |
---|---|
DE3820783A1 (de) | 1990-01-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3309848C2 (ja) | ||
DE2802417C2 (ja) | ||
DE3207467C2 (ja) | ||
EP0283555B1 (de) | Strahlungsführungsoptik für Laserstrahlung | |
DE19737172C2 (de) | Optisches Kaskade-Abtastsystem | |
DE3147689C2 (de) | Zusatzgerät zur Durchführung von Reflexionsmessungen mit einem IR-Spektrometer | |
DE69019943T2 (de) | Beugungsgitter mit variablem Abstand und wellenlängenunabhängig fokussierter Monochromator. | |
DE19961908C2 (de) | Hochauflösendes Littrow-Spektrometer und Verfahren zur quasi-simultanen Bestimmung einer Wellenlänge und eines Linienprofils | |
DE10017884C2 (de) | Vorrichtung zur geometrischen Strahlformung eines Lichtstrahlprofils | |
DE68907924T2 (de) | Röntgenstrahlvorrichtung, ausgestattet mit einem Strahlungsbereich-Monitor. | |
DE3390532C2 (de) | Optisches System zur mehrfachen Reflexion | |
DE2512625C2 (de) | Doppelmonochromator | |
EP0275532B1 (de) | Optisch-mechanischer Ablenker | |
DE3820783C2 (ja) | ||
DE3102684C2 (ja) | ||
DE4215128C2 (de) | Spaltlampe mit veränderbarem Spaltlicht-Einstrahlwinkel | |
DE102004050456A1 (de) | Gelenkarmroboter mit integrierter Laserstrahlführung | |
DE2814279C2 (de) | Optische Schreibvorrichtung | |
DE102016117202A1 (de) | Vorrichtung und Verfahren zur Ausrichtung eines Lichtstrahls | |
DE2642466A1 (de) | Korneamikroskop | |
DE102022107324A1 (de) | Auslenkvorrichtung für einen Laserbearbeitungskopf und Laserbearbeitungskopf mit derselben | |
EP0363666A2 (de) | Optische Abtastvorrichtung | |
DE202023105334U1 (de) | Optische Pfadanordnung mit variabler Länge | |
DE1522212C3 (de) | Filmprojektor für Filmschneid- und Kontrolltische | |
DE2449671C3 (de) | Optisches System änderbarer Vergrößerung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |