DE3814917A1 - Gasmischer zur erzeugung eines kontinuierlichen gasmischstromes - Google Patents

Gasmischer zur erzeugung eines kontinuierlichen gasmischstromes

Info

Publication number
DE3814917A1
DE3814917A1 DE3814917A DE3814917A DE3814917A1 DE 3814917 A1 DE3814917 A1 DE 3814917A1 DE 3814917 A DE3814917 A DE 3814917A DE 3814917 A DE3814917 A DE 3814917A DE 3814917 A1 DE3814917 A1 DE 3814917A1
Authority
DE
Germany
Prior art keywords
gas
valves
collector
valve
mass flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE3814917A
Other languages
German (de)
English (en)
Other versions
DE3814917C2 (enExample
Inventor
Hans Dr Dittrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to DE3814917A priority Critical patent/DE3814917A1/de
Priority to US07/342,869 priority patent/US4989637A/en
Publication of DE3814917A1 publication Critical patent/DE3814917A1/de
Application granted granted Critical
Publication of DE3814917C2 publication Critical patent/DE3814917C2/de
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6606—With electric heating element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87281—System having plural inlets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/8741—With common operator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87507—Electrical actuator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet
    • Y10T137/87676—With flow control
    • Y10T137/87684—Valve in each inlet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Accessories For Mixers (AREA)
DE3814917A 1988-05-03 1988-05-03 Gasmischer zur erzeugung eines kontinuierlichen gasmischstromes Granted DE3814917A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE3814917A DE3814917A1 (de) 1988-05-03 1988-05-03 Gasmischer zur erzeugung eines kontinuierlichen gasmischstromes
US07/342,869 US4989637A (en) 1988-05-03 1989-04-25 Gas mixing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3814917A DE3814917A1 (de) 1988-05-03 1988-05-03 Gasmischer zur erzeugung eines kontinuierlichen gasmischstromes

Publications (2)

Publication Number Publication Date
DE3814917A1 true DE3814917A1 (de) 1989-11-16
DE3814917C2 DE3814917C2 (enExample) 1992-06-11

Family

ID=6353436

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3814917A Granted DE3814917A1 (de) 1988-05-03 1988-05-03 Gasmischer zur erzeugung eines kontinuierlichen gasmischstromes

Country Status (2)

Country Link
US (1) US4989637A (enExample)
DE (1) DE3814917A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203366A (en) * 1992-02-05 1993-04-20 Ecolab Inc. Apparatus and method for mixing and dispensing chemical concentrates at point of use
DE9303693U1 (de) * 1993-03-12 1993-04-29 Siemens AG, 8000 München Gasmischeinrichtung
JP2824443B2 (ja) * 1994-05-12 1998-11-11 ティ・エフ・シィ株式会社 分取用液体クロマトグラフィ装置
US5868177A (en) * 1995-07-27 1999-02-09 Chemical Control Systems, Inc. Method and apparatus for injecting additives
US5653807A (en) * 1996-03-28 1997-08-05 The United States Of America As Represented By The Secretary Of The Air Force Low temperature vapor phase epitaxial system for depositing thin layers of silicon-germanium alloy
US6123097A (en) * 1996-06-28 2000-09-26 Applied Materials, Inc. Apparatus and methods for controlling process chamber pressure
US6534003B1 (en) * 1999-04-02 2003-03-18 Ethicon, Inc. Valve and a method of using a valve
US6102068A (en) * 1997-09-23 2000-08-15 Hewlett-Packard Company Selector valve assembly
US6305400B1 (en) * 1999-08-23 2001-10-23 Tri-Tech Medical Inc. Medical gas emergency delivery system and method
US6283143B1 (en) * 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
US6743736B2 (en) * 2002-04-11 2004-06-01 Micron Technology, Inc. Reactive gaseous deposition precursor feed apparatus
US6896730B2 (en) * 2002-06-05 2005-05-24 Micron Technology, Inc. Atomic layer deposition apparatus and methods
JP2004288916A (ja) * 2003-03-24 2004-10-14 Renesas Technology Corp Ｃｖｄ装置
US7819118B2 (en) * 2006-07-14 2010-10-26 Tri-Tech Medical Inc. Medical gas delivery method and apparatus
GB2446409B (en) * 2007-02-06 2011-05-04 Secretary Trade Ind Brit Fluid mixtures
FR2936038B1 (fr) * 2008-09-16 2011-01-07 Air Liquide Installation miniaturisee de fabrication de melanges de gaz speciaux.
US11471840B2 (en) 2018-12-18 2022-10-18 Billups-Rothenberg, Inc. Gas mixing system
CN111992065B (zh) * 2020-08-13 2024-08-30 广东中鹏新能科技有限公司 气体混合装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2737383A1 (de) * 1977-08-16 1979-03-01 Euratom Verfahren zum mischen von gasen in praezisem verhaeltnis
US4488570A (en) * 1982-06-16 1984-12-18 Jiskoot Autocontrol Limited Blending apparatus and method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3670768A (en) * 1970-06-08 1972-06-20 Dynak Inc Fluid flow control device
US3653399A (en) * 1970-06-15 1972-04-04 Nat Instr Lab Inc Gas flow controlling system
DE2413703C3 (de) * 1974-03-21 1979-01-04 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Ventilanordnung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
US4142860A (en) * 1976-06-23 1979-03-06 Mayeaux Donald P Apparatus for producing a calibration sample for analytical instrumentation
DE2648751C2 (de) * 1976-10-27 1986-04-30 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Vorrichtung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
IT1144417B (it) * 1981-07-22 1986-10-29 Fiat Auto Spa Apparecchiatura per la miscelazione controllata di due sostanze aeriformi in particolare per la preparazione di miscele per la taratura di a nalizzatori di gas di scarico di motori a combustione interna
US4558845A (en) * 1982-09-22 1985-12-17 Hunkapiller Michael W Zero dead volume valve
JPH0619311B2 (ja) * 1985-10-19 1994-03-16 株式会社堀場製作所 多成分同時測定用ガス分析装置
US4741354A (en) * 1987-04-06 1988-05-03 Spire Corporation Radial gas manifold

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2737383A1 (de) * 1977-08-16 1979-03-01 Euratom Verfahren zum mischen von gasen in praezisem verhaeltnis
US4488570A (en) * 1982-06-16 1984-12-18 Jiskoot Autocontrol Limited Blending apparatus and method

Also Published As

Publication number Publication date
US4989637A (en) 1991-02-05
DE3814917C2 (enExample) 1992-06-11

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: B01F 15/04

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee