DE3802545C2 - - Google Patents

Info

Publication number
DE3802545C2
DE3802545C2 DE19883802545 DE3802545A DE3802545C2 DE 3802545 C2 DE3802545 C2 DE 3802545C2 DE 19883802545 DE19883802545 DE 19883802545 DE 3802545 A DE3802545 A DE 3802545A DE 3802545 C2 DE3802545 C2 DE 3802545C2
Authority
DE
Germany
Prior art keywords
valve
pump chamber
pump
silicon
micropump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19883802545
Other languages
German (de)
English (en)
Other versions
DE3802545A1 (de
Inventor
Wolfgang Dipl.-Phys. Dr. 1000 Berlin De Benecke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE19883802545 priority Critical patent/DE3802545A1/de
Publication of DE3802545A1 publication Critical patent/DE3802545A1/de
Application granted granted Critical
Publication of DE3802545C2 publication Critical patent/DE3802545C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/20—Other positive-displacement pumps
    • F04B19/24—Pumping by heat expansion of pumped fluid

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
DE19883802545 1988-01-28 1988-01-28 Mikropumpe zur foerderung kleinster gasmengen Granted DE3802545A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19883802545 DE3802545A1 (de) 1988-01-28 1988-01-28 Mikropumpe zur foerderung kleinster gasmengen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883802545 DE3802545A1 (de) 1988-01-28 1988-01-28 Mikropumpe zur foerderung kleinster gasmengen

Publications (2)

Publication Number Publication Date
DE3802545A1 DE3802545A1 (de) 1989-08-10
DE3802545C2 true DE3802545C2 (enExample) 1990-12-20

Family

ID=6346183

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883802545 Granted DE3802545A1 (de) 1988-01-28 1988-01-28 Mikropumpe zur foerderung kleinster gasmengen

Country Status (1)

Country Link
DE (1) DE3802545A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4104197A1 (de) * 1991-02-12 1992-08-13 Kayser Herold Uwe Stroemungspumpe

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4006152A1 (de) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung Mikrominiaturisierte pumpe
DE4016472A1 (de) * 1990-05-22 1991-11-28 Bosch Gmbh Robert Verfahren zur herstellung von mikromechanischen sensoren mit ueberlastsicherung
US5370842A (en) * 1991-11-29 1994-12-06 Canon Kabushiki Kaisha Sample measuring device and sample measuring system
DE4238571C1 (de) * 1992-11-16 1994-06-01 Kernforschungsz Karlsruhe Verfahren zur Herstellung von durch einen Rahmen aufgespannte Membranen
DE19504689A1 (de) * 1995-02-13 1996-08-14 Thomas Dr Grauer Mikromechanisches Sitzventil
DE19909725C2 (de) * 1999-03-05 2003-12-18 Daimler Chrysler Ag Vorrichtung und Verfahren zur Förderung einer Flüssigkeit

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898017A (en) * 1973-04-16 1975-08-05 Harold Mandroian Pump
US4647013A (en) * 1985-02-21 1987-03-03 Ford Motor Company Silicon valve
DE3621332A1 (de) * 1986-06-26 1988-01-14 Fraunhofer Ges Forschung Mikroventil
DE3621331A1 (de) * 1986-06-26 1988-01-14 Fraunhofer Ges Forschung Mikroventil

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4104197A1 (de) * 1991-02-12 1992-08-13 Kayser Herold Uwe Stroemungspumpe

Also Published As

Publication number Publication date
DE3802545A1 (de) 1989-08-10

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee