DE3790317T - - Google Patents
Info
- Publication number
- DE3790317T DE3790317T DE19873790317 DE3790317T DE3790317T DE 3790317 T DE3790317 T DE 3790317T DE 19873790317 DE19873790317 DE 19873790317 DE 3790317 T DE3790317 T DE 3790317T DE 3790317 T DE3790317 T DE 3790317T
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61142197A JPH0765165B2 (ja) | 1986-06-18 | 1986-06-18 | 薄膜蒸着装置 |
| JP23273186A JPS6386866A (ja) | 1986-09-29 | 1986-09-29 | 薄膜形成装置 |
| JP2519787A JPH0788572B2 (ja) | 1987-02-05 | 1987-02-05 | 薄膜形成装置 |
| JP2519687A JPH0788571B2 (ja) | 1987-02-05 | 1987-02-05 | 薄膜形成装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3790317T true DE3790317T (US20030157025A1-20030821-C00031.png) | 1988-06-23 |
Family
ID=27458265
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19873790317 Pending DE3790317T (US20030157025A1-20030821-C00031.png) | 1986-06-18 | 1987-06-18 | |
| DE3790317A Expired - Fee Related DE3790317C2 (US20030157025A1-20030821-C00031.png) | 1986-06-18 | 1987-06-18 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3790317A Expired - Fee Related DE3790317C2 (US20030157025A1-20030821-C00031.png) | 1986-06-18 | 1987-06-18 |
Country Status (4)
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4876984A (en) * | 1987-06-12 | 1989-10-31 | Ricoh Company, Ltd. | Apparatus for forming a thin film |
| US4960072A (en) * | 1987-08-05 | 1990-10-02 | Ricoh Company, Ltd. | Apparatus for forming a thin film |
| JPH0250954A (ja) * | 1988-08-15 | 1990-02-20 | Ricoh Co Ltd | 薄膜形成装置 |
| DE3832693A1 (de) * | 1988-09-27 | 1990-03-29 | Leybold Ag | Vorrichtung zum aufbringen dielektrischer oder metallischer werkstoffe |
| US5114559A (en) * | 1989-09-26 | 1992-05-19 | Ricoh Company, Ltd. | Thin film deposition system |
| JP2834797B2 (ja) * | 1989-10-25 | 1998-12-14 | 株式会社リコー | 薄膜形成装置 |
| GB2261226B (en) * | 1991-11-08 | 1994-10-26 | Univ Hull | Deposition of non-conductive material |
| US5415753A (en) * | 1993-07-22 | 1995-05-16 | Materials Research Corporation | Stationary aperture plate for reactive sputter deposition |
| GB2346155B (en) | 1999-01-06 | 2003-06-25 | Trikon Holdings Ltd | Sputtering apparatus |
| US7229675B1 (en) | 2000-02-17 | 2007-06-12 | Anatoly Nikolaevich Paderov | Protective coating method for pieces made of heat resistant alloys |
| WO2001061067A1 (fr) * | 2000-02-17 | 2001-08-23 | Anatoly Nikolaevich Paderov | Revetement de protection composite fait d'alliages refractaires |
| US6632325B2 (en) * | 2002-02-07 | 2003-10-14 | Applied Materials, Inc. | Article for use in a semiconductor processing chamber and method of fabricating same |
| JP3908600B2 (ja) * | 2002-05-30 | 2007-04-25 | 株式会社リコー | 調光窓 |
| FR3140097A1 (fr) * | 2022-09-27 | 2024-03-29 | Neyco | Dépôt de couches de matière par évaporation et double activation |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3583361A (en) * | 1969-12-18 | 1971-06-08 | Atomic Energy Commission | Ion beam deposition system |
| JPS5181791A (ja) * | 1975-01-13 | 1976-07-17 | Osaka Koon Denki Kk | Ionkapureeteinguhoho |
| JPS5278777A (en) * | 1975-12-26 | 1977-07-02 | Hitachi Ltd | Ion plating apparatus |
| JPS581186B2 (ja) * | 1977-12-13 | 1983-01-10 | 双葉電子工業株式会社 | イオンプレ−テイング装置 |
| JPS58221271A (ja) * | 1982-06-18 | 1983-12-22 | Citizen Watch Co Ltd | イオンプレ−テイング法による被膜形成方法 |
| US4440108A (en) * | 1982-09-24 | 1984-04-03 | Spire Corporation | Ion beam coating apparatus |
| JPS5989763A (ja) * | 1983-09-28 | 1984-05-24 | Ricoh Co Ltd | 薄膜蒸着装置 |
| JPS59157279A (ja) * | 1983-12-22 | 1984-09-06 | Ricoh Co Ltd | 薄膜蒸着装置 |
| FR2596775B1 (fr) * | 1986-04-07 | 1992-11-13 | Univ Limoges | Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone |
| US4876984A (en) * | 1987-06-12 | 1989-10-31 | Ricoh Company, Ltd. | Apparatus for forming a thin film |
-
1987
- 1987-06-18 US US07/167,850 patent/US4854265A/en not_active Expired - Fee Related
- 1987-06-18 GB GB8803148A patent/GB2204596B/en not_active Expired
- 1987-06-18 WO PCT/JP1987/000398 patent/WO1987007916A1/ja active Application Filing
- 1987-06-18 DE DE19873790317 patent/DE3790317T/de active Pending
- 1987-06-18 DE DE3790317A patent/DE3790317C2/de not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE3790317C2 (US20030157025A1-20030821-C00031.png) | 1990-06-07 |
| GB8803148D0 (en) | 1988-03-09 |
| US4854265A (en) | 1989-08-08 |
| GB2204596A (en) | 1988-11-16 |
| GB2204596B (en) | 1991-04-03 |
| WO1987007916A1 (en) | 1987-12-30 |
