DE3788773D1 - Vorrichtung zur Feinverstellung und Vorrichtung zum Steuern dieser Verstellungen. - Google Patents

Vorrichtung zur Feinverstellung und Vorrichtung zum Steuern dieser Verstellungen.

Info

Publication number
DE3788773D1
DE3788773D1 DE87201701T DE3788773T DE3788773D1 DE 3788773 D1 DE3788773 D1 DE 3788773D1 DE 87201701 T DE87201701 T DE 87201701T DE 3788773 T DE3788773 T DE 3788773T DE 3788773 D1 DE3788773 D1 DE 3788773D1
Authority
DE
Germany
Prior art keywords
adjustments
controlling
fine adjustment
fine
adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE87201701T
Other languages
English (en)
Other versions
DE3788773T2 (de
Inventor
Kiyoshi Nagasawa
Kozo Ono
Kojiro Ogata
Ken Murayama
Yoshihiro Hoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP21061986A external-priority patent/JPS6366615A/ja
Priority claimed from JP21061686A external-priority patent/JPS6366613A/ja
Priority claimed from JP61210618A external-priority patent/JPH071447B2/ja
Priority claimed from JP26243786A external-priority patent/JPH0652489B2/ja
Priority claimed from JP61283063A external-priority patent/JPH071450B2/ja
Priority claimed from JP61283062A external-priority patent/JPH071449B2/ja
Priority claimed from JP61283061A external-priority patent/JPH071448B2/ja
Priority claimed from JP7627087A external-priority patent/JPH071454B2/ja
Priority claimed from JP7626987A external-priority patent/JPH071453B2/ja
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Publication of DE3788773D1 publication Critical patent/DE3788773D1/de
Application granted granted Critical
Publication of DE3788773T2 publication Critical patent/DE3788773T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
    • B23Q15/22—Control or regulation of position of tool or workpiece
    • B23Q15/24—Control or regulation of position of tool or workpiece of linear position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41133—Compensation non linear transfer function
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41352—Alternative clamping dilation of piezo, caterpillar motion, inchworm

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE3788773T 1986-09-09 1987-09-08 Vorrichtung zur Feinverstellung und Vorrichtung zum Steuern dieser Verstellungen. Expired - Fee Related DE3788773T2 (de)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP21061986A JPS6366615A (ja) 1986-09-09 1986-09-09 微細位置決め装置
JP61210618A JPH071447B2 (ja) 1986-09-09 1986-09-09 微細位置決め装置
JP21061686A JPS6366613A (ja) 1986-09-09 1986-09-09 微細位置決め装置
JP26243786A JPH0652489B2 (ja) 1986-11-04 1986-11-04 微細位置決め装置の変位制御装置
JP61283062A JPH071449B2 (ja) 1986-11-29 1986-11-29 微細位置決め装置
JP61283063A JPH071450B2 (ja) 1986-11-29 1986-11-29 微細位置決め装置
JP61283061A JPH071448B2 (ja) 1986-11-29 1986-11-29 微細位置決め装置
JP7627087A JPH071454B2 (ja) 1986-09-09 1987-03-31 微細位置決め装置の制御装置
JP7626987A JPH071453B2 (ja) 1986-09-09 1987-03-31 微細位置決め装置の制御装置

Publications (2)

Publication Number Publication Date
DE3788773D1 true DE3788773D1 (de) 1994-02-24
DE3788773T2 DE3788773T2 (de) 1994-08-04

Family

ID=27577169

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3788773T Expired - Fee Related DE3788773T2 (de) 1986-09-09 1987-09-08 Vorrichtung zur Feinverstellung und Vorrichtung zum Steuern dieser Verstellungen.

Country Status (3)

Country Link
US (4) US4920660A (de)
EP (1) EP0264147B1 (de)
DE (1) DE3788773T2 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
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DE3909206C1 (de) * 1989-03-21 1990-05-31 Adalbert Dr.-Ing. 8000 Muenchen De Bandemer
US5187876A (en) * 1989-08-04 1993-02-23 Hatheway Alson E Precision motion transducer
WO1991001848A1 (en) * 1989-08-04 1991-02-21 Hatheway Alson E Precision motion transducer
JP2834832B2 (ja) * 1990-03-15 1998-12-14 松下電工株式会社 姿勢制御装置
US5130523A (en) * 1991-04-22 1992-07-14 Raleigh Freddie L Coordinate measuring machine with improved flexure and clamp for fiber optic connection
US5351412A (en) * 1991-06-11 1994-10-04 International Business Machines Corporation Micro positioning device
US5360974A (en) * 1992-10-20 1994-11-01 International Business Machines Corp. Dual quad flexure scanner
DE4312937A1 (de) * 1993-04-21 1994-10-27 Mahle Gmbh Auslenkbare Lagerung einer Bohrstange an der Arbeitsspindel einer Feinbohrmaschine
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
US6347004B1 (en) 1998-08-31 2002-02-12 Ricoh Company, Ltd. Optical scanning apparatus and scanning image forming lens
US6183097B1 (en) 1999-01-12 2001-02-06 Cornell Research Foundation Inc. Motion amplification based sensors
DE19962247A1 (de) 1999-12-22 2001-09-20 Agie Sa Bewegungsübertragungsvorrichtung
GB2375877A (en) * 2000-03-30 2002-11-27 Seagate Technology Llc Microactuator assisted seek and hysteresis correction method and apparatus for a disc drive
US6513250B2 (en) * 2000-07-14 2003-02-04 Rensselaer Polytechnic Institute Micro positioning device with shared actuators
US6606444B2 (en) 2000-09-28 2003-08-12 Murray R. Harman Positioning device especially for assembling optical components
US20050274219A1 (en) * 2004-06-01 2005-12-15 Molecular Imprints, Inc. Method and system to control movement of a body for nano-scale manufacturing
JP3792675B2 (ja) * 2003-06-05 2006-07-05 ファナック株式会社 微細位置決め装置及び工具補正方法
US6836968B1 (en) * 2003-06-25 2005-01-04 Itt Manufacturing Enterprises, Inc. Precision frictionless flexure based linear translation mechanism insensitive to thermal and vibrational environments
US20050170128A1 (en) * 2004-02-04 2005-08-04 Jean Card And Gift Co., Ltd. Bag-packed three-dimensional decorative sticker
KR100568206B1 (ko) * 2004-02-13 2006-04-05 삼성전자주식회사 스테이지장치
US7116463B2 (en) * 2004-07-15 2006-10-03 Optron Systems, Inc. High angular deflection micro-mirror system
DE102004054359B4 (de) * 2004-11-10 2015-11-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Erzeugung einer Torsionsbewegung und Verwendung derselben
KR100687717B1 (ko) * 2004-12-16 2007-02-27 한국전자통신연구원 압전소자를 채용한 마이크로 스테이지
US7107693B2 (en) * 2005-01-14 2006-09-19 Illinois Institute Of Technology Apparatus and method for precise angular positioning
DE102007054308B4 (de) 2007-11-08 2009-09-10 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Antriebsvorrichtung für Erodierwerkzeuge
JP5197101B2 (ja) * 2008-03-31 2013-05-15 日本トムソン株式会社 可動テーブル装置
CA2812367C (en) * 2010-10-21 2018-02-27 Thorlabs, Inc. Parallellism conservation mechanism for nanopositioner
US9370865B1 (en) * 2012-05-23 2016-06-21 Western Digital Technologies, Inc. Flexure based compliance device for use with an assembly device
WO2014057843A1 (ja) * 2012-10-11 2014-04-17 株式会社クリエイティブ テクノロジー ワーク保持装置及びこれを用いたワークの横ずれ検出方法
CN104016117B (zh) * 2014-05-28 2017-01-18 京东方科技集团股份有限公司 一种自动调整基板位置的叉板及调整方法
US10284118B2 (en) * 2015-02-06 2019-05-07 New Scale Technologies, Inc. Two-axis angular pointing device and methods of use thereof
TWI678253B (zh) * 2019-01-10 2019-12-01 大銀微系統股份有限公司 撓性機構
CN111434969B (zh) * 2019-01-15 2021-10-15 大银微系统股份有限公司 挠性机构

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US3492894A (en) * 1967-10-02 1970-02-03 Heald Machine Co Machine tool
DE1764325A1 (de) * 1968-05-17 1971-07-01 Elektromat Veb Vorrichtung zum Ausrichten und Befestigen von epitaktisch beschichtetem Halbleitermaterial
FR2098524A5 (de) * 1970-07-17 1972-03-10 Thomson Csf
US4019109A (en) * 1974-05-13 1977-04-19 Hughes Aircraft Company Alignment system and method with micromovement stage
JPS5611515A (en) * 1979-07-10 1981-02-04 Chiyou Lsi Gijutsu Kenkyu Kumiai Aligning unit
JPS5774601A (en) * 1980-10-29 1982-05-10 Pentel Kk Apparatus for fixing finely displacing table
US4575942A (en) * 1982-10-18 1986-03-18 Hitachi, Ltd. Ultra-precision two-dimensional moving apparatus
EP0134268B1 (de) * 1983-08-09 1987-11-19 Siemens Aktiengesellschaft Justier- oder Positioniertisch und Verfahren zu dessen Herstellung
US4520570A (en) * 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner
JPS60150950A (ja) * 1984-01-20 1985-08-08 Hitachi Ltd 案内装置
US4559717A (en) * 1984-02-21 1985-12-24 The United States Of America As Represented By The Secretary Of Commerce Flexure hinge
DE3411651C1 (de) * 1984-03-29 1989-04-27 bso Steuerungstechnik GmbH, 6603 Sulzbach Regelanordnung fuer den Gleichlauf mehrerer Antriebe
JPS60259347A (ja) * 1984-06-02 1985-12-21 Canon Inc 圧電型微動変位素子及びこれを使用した微少位置決め方法
GB2185323B (en) * 1984-10-12 1988-01-06 Vickers Plc Microscope having an improved stage
US4686440A (en) * 1985-03-11 1987-08-11 Yotaro Hatamura Fine positioning device
US4667415A (en) * 1985-11-29 1987-05-26 Gca Corporation Microlithographic reticle positioning system

Also Published As

Publication number Publication date
EP0264147B1 (de) 1994-01-12
DE3788773T2 (de) 1994-08-04
EP0264147A2 (de) 1988-04-20
US5005298A (en) 1991-04-09
US4888878A (en) 1989-12-26
EP0264147A3 (en) 1988-10-05
US4920660A (en) 1990-05-01
US4991309A (en) 1991-02-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee