DE3788554D1 - Antistatischer Photolack. - Google Patents

Antistatischer Photolack.

Info

Publication number
DE3788554D1
DE3788554D1 DE87308997T DE3788554T DE3788554D1 DE 3788554 D1 DE3788554 D1 DE 3788554D1 DE 87308997 T DE87308997 T DE 87308997T DE 3788554 T DE3788554 T DE 3788554T DE 3788554 D1 DE3788554 D1 DE 3788554D1
Authority
DE
Germany
Prior art keywords
antistatic
photoresist
antistatic photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE87308997T
Other languages
English (en)
Other versions
DE3788554T2 (de
Inventor
Konoe Miura
Tameichi Ochiai
Yasuhiro Kameyama
Tooru C O Mitsubishi De Koyama
Takashi C O Mitsubishi D Okabe
Tomoharu C O Mitsubis Mametani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Kasei Corp
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp, Mitsubishi Electric Corp filed Critical Mitsubishi Kasei Corp
Application granted granted Critical
Publication of DE3788554D1 publication Critical patent/DE3788554D1/de
Publication of DE3788554T2 publication Critical patent/DE3788554T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Formation Of Insulating Films (AREA)
DE87308997T 1986-10-13 1987-10-12 Antistatischer Photolack. Expired - Fee Related DE3788554T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61242793A JPH083628B2 (ja) 1986-10-13 1986-10-13 非帯電性レジスト

Publications (2)

Publication Number Publication Date
DE3788554D1 true DE3788554D1 (de) 1994-02-03
DE3788554T2 DE3788554T2 (de) 1994-04-21

Family

ID=17094373

Family Applications (1)

Application Number Title Priority Date Filing Date
DE87308997T Expired - Fee Related DE3788554T2 (de) 1986-10-13 1987-10-12 Antistatischer Photolack.

Country Status (4)

Country Link
US (1) US4933257A (de)
EP (1) EP0265135B1 (de)
JP (1) JPH083628B2 (de)
DE (1) DE3788554T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02278723A (ja) * 1989-04-19 1990-11-15 Mitsubishi Electric Corp 半導体装置およびその製造方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA933791A (en) * 1969-06-13 1973-09-18 Broyde Barret Additives to positive photoresists which increase the sensitivity thereof
US4196003A (en) * 1974-02-01 1980-04-01 Fuji Photo Film Co., Ltd. Light-sensitive o-quinone diazide copying composition
DE2626419C2 (de) * 1976-06-12 1982-10-21 Ibm Deutschland Gmbh, 7000 Stuttgart Lichtempfindliches Gemisch
US4338392A (en) * 1979-08-09 1982-07-06 International Business Machines Corporation Class of E-beam resists based on conducting organic charge transfer salts
NL183425C (nl) * 1980-01-17 1988-10-17 Inst Chimii Akademii Nauk Sssr Positieve foto- en elektronenresist en werkwijze voor het vervaardigen van een beeld op een drager.
JPS57211145A (en) * 1981-06-23 1982-12-24 Japan Synthetic Rubber Co Ltd Photoresist composition
JPS5882519A (ja) * 1981-11-12 1983-05-18 Toshiba Corp 半導体のイオン注入方法
GB2122765B (en) * 1981-12-21 1986-03-26 Inst Chimii Akademii Nauk Sssr Photo-and electron resist
JPS5951564A (ja) * 1982-09-17 1984-03-26 Seiko Epson Corp 半導体製造方法
JPS5952814A (ja) * 1982-09-20 1984-03-27 Toshiba Corp 水冷式冷却器
JPS5993441A (ja) * 1982-11-19 1984-05-29 Hitachi Ltd レジスト
JPS59107347A (ja) * 1982-12-13 1984-06-21 Fujitsu Ltd パタ−ン形成材料
JPS6088941A (ja) * 1983-10-21 1985-05-18 Nagase Kasei Kogyo Kk フオトレジスト組成物
JPS61125019A (ja) * 1984-11-16 1986-06-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 集積回路製造方法及びその方法に使用する光導電性フオトレジスト複合体
US4613553A (en) * 1985-05-31 1986-09-23 Brown University Research Foundation Processing of metallic charge-transfer salts
JPS62113136A (ja) * 1985-11-13 1987-05-25 Fujitsu Ltd レジスト組成物
JPS62113139A (ja) * 1985-11-13 1987-05-25 Fujitsu Ltd ネガ型レジスト組成物
US4780371A (en) * 1986-02-24 1988-10-25 International Business Machines Corporation Electrically conductive composition and use thereof
EP0259855A3 (de) * 1986-09-10 1990-04-18 Fuji Photo Film Co., Ltd. Verfahren zur Entwicklung photographischer Silberhalogenidmaterialien

Also Published As

Publication number Publication date
DE3788554T2 (de) 1994-04-21
US4933257A (en) 1990-06-12
EP0265135A3 (en) 1989-07-12
EP0265135B1 (de) 1993-12-22
EP0265135A2 (de) 1988-04-27
JPS63100442A (ja) 1988-05-02
JPH083628B2 (ja) 1996-01-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee