DE3786645D1 - Apparat zur vorbehandlung von messdaten. - Google Patents
Apparat zur vorbehandlung von messdaten.Info
- Publication number
- DE3786645D1 DE3786645D1 DE8787310055T DE3786645T DE3786645D1 DE 3786645 D1 DE3786645 D1 DE 3786645D1 DE 8787310055 T DE8787310055 T DE 8787310055T DE 3786645 T DE3786645 T DE 3786645T DE 3786645 D1 DE3786645 D1 DE 3786645D1
- Authority
- DE
- Germany
- Prior art keywords
- measured data
- treating measured
- treating
- data
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
- G01D3/022—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation having an ideal characteristic, map or correction data stored in a digital memory
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8874—Taking dimensions of defect into account
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
- G01N2021/95615—Inspecting patterns on the surface of objects using a comparative method with stored comparision signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/102—Video camera
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US94013986A | 1986-12-10 | 1986-12-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3786645D1 true DE3786645D1 (de) | 1993-08-26 |
DE3786645T2 DE3786645T2 (de) | 1994-02-17 |
Family
ID=25474303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19873786645 Expired - Fee Related DE3786645T2 (de) | 1986-12-10 | 1987-11-13 | Apparat zur Vorbehandlung von Messdaten. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0271230B1 (de) |
CA (1) | CA1300266C (de) |
DE (1) | DE3786645T2 (de) |
FI (1) | FI93495C (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0425898A1 (de) * | 1989-10-31 | 1991-05-08 | Siemens Aktiengesellschaft | Verfahren zur Steuerung der Übermittlung von Messwerten eines Messfühlers an eine zentrale Steuereinheit mittels einer Ein-/Ausgabebaugruppe |
JP3246987B2 (ja) * | 1992-09-10 | 2002-01-15 | キヤノン株式会社 | マルチプローブ制御回路を具備する情報処理装置 |
DE4239456A1 (de) * | 1992-11-24 | 1994-06-09 | Rheinmetall Sick Optical Inspe | Verfahren und Vorrichtung zur Inspektion von Oberflächen |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4011457A (en) * | 1975-08-06 | 1977-03-08 | E. I. Du Pont De Nemours And Company | Web defect monitor for abrupt changes in web density |
JPS5757246A (en) * | 1980-09-25 | 1982-04-06 | Fuji Photo Film Co Ltd | Detecting and measuring apparatus for flaw |
US4583861A (en) * | 1981-08-12 | 1986-04-22 | Tokyo Shibaura Denki Kabushiki Kaisha | Surface condition judging apparatus |
CH656466A5 (de) * | 1982-02-15 | 1986-06-30 | Alusuisse | Verfahren und vorrichtung zur oberflaechenkontrolle eines werkstoffes. |
JPS58216907A (ja) * | 1982-04-03 | 1983-12-16 | Dainippon Screen Mfg Co Ltd | 印刷面積測定装置 |
-
1987
- 1987-11-13 DE DE19873786645 patent/DE3786645T2/de not_active Expired - Fee Related
- 1987-11-13 EP EP19870310055 patent/EP0271230B1/de not_active Expired - Lifetime
- 1987-11-17 CA CA000552034A patent/CA1300266C/en not_active Expired - Lifetime
- 1987-11-26 FI FI875214A patent/FI93495C/fi not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
FI93495B (fi) | 1994-12-30 |
EP0271230A2 (de) | 1988-06-15 |
EP0271230B1 (de) | 1993-07-21 |
FI875214A0 (fi) | 1987-11-26 |
FI875214A (fi) | 1988-06-11 |
FI93495C (fi) | 1995-04-10 |
DE3786645T2 (de) | 1994-02-17 |
CA1300266C (en) | 1992-05-05 |
EP0271230A3 (en) | 1989-11-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |