DE3784898D1 - Thermische detektoren und verfahren zu ihrer herstellung. - Google Patents

Thermische detektoren und verfahren zu ihrer herstellung.

Info

Publication number
DE3784898D1
DE3784898D1 DE8787311099T DE3784898T DE3784898D1 DE 3784898 D1 DE3784898 D1 DE 3784898D1 DE 8787311099 T DE8787311099 T DE 8787311099T DE 3784898 T DE3784898 T DE 3784898T DE 3784898 D1 DE3784898 D1 DE 3784898D1
Authority
DE
Germany
Prior art keywords
production
thermal detectors
detectors
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787311099T
Other languages
English (en)
Other versions
DE3784898T2 (de
Inventor
Syotaro Oka
Junichi Kita
Hiroki Kuyama
Motosada Kiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61300259A external-priority patent/JPS63151828A/ja
Priority claimed from JP61300260A external-priority patent/JPS63151829A/ja
Priority claimed from JP61311162A external-priority patent/JPS63167228A/ja
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Application granted granted Critical
Publication of DE3784898D1 publication Critical patent/DE3784898D1/de
Publication of DE3784898T2 publication Critical patent/DE3784898T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE8787311099T 1986-12-16 1987-12-16 Thermische detektoren und verfahren zu ihrer herstellung. Expired - Fee Related DE3784898T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61300259A JPS63151828A (ja) 1986-12-16 1986-12-16 熱センサ
JP61300260A JPS63151829A (ja) 1986-12-16 1986-12-16 白金黒膜の形成方法
JP61311162A JPS63167228A (ja) 1986-12-29 1986-12-29 電磁波吸収体

Publications (2)

Publication Number Publication Date
DE3784898D1 true DE3784898D1 (de) 1993-04-22
DE3784898T2 DE3784898T2 (de) 1993-06-24

Family

ID=27338373

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787311099T Expired - Fee Related DE3784898T2 (de) 1986-12-16 1987-12-16 Thermische detektoren und verfahren zu ihrer herstellung.

Country Status (5)

Country Link
US (1) US4867850A (de)
EP (1) EP0274881B1 (de)
KR (1) KR910001878B1 (de)
CN (1) CN1012242B (de)
DE (1) DE3784898T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0630058A3 (de) * 1993-05-19 1995-03-15 Siemens Ag Verfahren zur Herstellung einer Pyrodetektoranordnung durch elektronisches Ätzen eines Silizium Substrats.
US6361825B1 (en) * 1995-06-07 2002-03-26 Texas Instruments Incorporated Micro-bolometer cell structure
US5804823A (en) * 1995-10-10 1998-09-08 Raytheon Company Bismuth layered structure pyroelectric detectors
US5949071A (en) * 1997-08-14 1999-09-07 Sandia Corporation Uncooled thin film pyroelectric IR detector with aerogel thermal isolation
US7075079B2 (en) * 2001-06-27 2006-07-11 Wood Roland A Sensor for dual wavelength bands
US9170222B2 (en) 2012-05-11 2015-10-27 Lenovo Enterprise Solutions (Singapore) Pte. Ltd. Detecting thermal interface material (‘TIM’) between a heat sink and an integrated circuit
US9316603B2 (en) 2012-05-11 2016-04-19 Lenovo Enterprise Solutions (Singapore) Pte. Ltd. Detecting thermal interface material (‘TIM’) between a heat sink and an integrated circuit
DE102013218682A1 (de) * 2013-09-18 2015-03-19 Siemens Aktiengesellschaft Thermoelektrischer Sensor
CN111816754B (zh) * 2020-09-04 2020-11-27 上海翼捷工业安全设备股份有限公司 热释电灵敏元的制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3912451A (en) * 1973-06-04 1975-10-14 Warner Lambert Co Method for removing hydrogen peroxide from soft contact lenses
US4024560A (en) * 1975-09-04 1977-05-17 Westinghouse Electric Corporation Pyroelectric-field effect electromagnetic radiation detector
DE2942242A1 (de) * 1978-10-24 1980-05-08 Plessey Handel Investment Ag Pyroelektrischer detektor
JPS5888130U (ja) * 1981-12-09 1983-06-15 株式会社堀場製作所 焦電形赤外線検出器
DE3202819C2 (de) * 1982-01-29 1984-12-20 Preh, Elektrofeinmechanische Werke Jakob Preh Nachf. Gmbh & Co, 8740 Bad Neustadt Infrarotdetektor und Verfahren zum Herstellen
DE3370251D1 (en) * 1982-03-18 1987-04-16 British Telecomm Piezoelectric and pyroelectric film
US4595832A (en) * 1984-03-30 1986-06-17 The United States Of America As Represented By The United States Department Of Energy Thermal sensor with an improved coating

Also Published As

Publication number Publication date
CN87107469A (zh) 1988-07-13
US4867850A (en) 1989-09-19
CN1012242B (zh) 1991-03-27
EP0274881A1 (de) 1988-07-20
KR880008463A (ko) 1988-08-31
DE3784898T2 (de) 1993-06-24
EP0274881B1 (de) 1993-03-17
KR910001878B1 (ko) 1991-03-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee