DE3779340D1 - Vorrichtung und methode zum optischen abbilden kurzer abstaende. - Google Patents
Vorrichtung und methode zum optischen abbilden kurzer abstaende.Info
- Publication number
- DE3779340D1 DE3779340D1 DE8787102404T DE3779340T DE3779340D1 DE 3779340 D1 DE3779340 D1 DE 3779340D1 DE 8787102404 T DE8787102404 T DE 8787102404T DE 3779340 T DE3779340 T DE 3779340T DE 3779340 D1 DE3779340 D1 DE 3779340D1
- Authority
- DE
- Germany
- Prior art keywords
- optical imaging
- short distances
- imaging short
- distances
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/834,532 US4681451A (en) | 1986-02-28 | 1986-02-28 | Optical proximity imaging method and apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3779340D1 true DE3779340D1 (de) | 1992-07-02 |
Family
ID=25267142
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787102404T Expired - Fee Related DE3779340D1 (de) | 1986-02-28 | 1987-02-20 | Vorrichtung und methode zum optischen abbilden kurzer abstaende. |
DE198787102404T Pending DE235696T1 (de) | 1986-02-28 | 1987-02-20 | Vorrichtung und methode zum optischen abbilden kurzer abstaende. |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE198787102404T Pending DE235696T1 (de) | 1986-02-28 | 1987-02-20 | Vorrichtung und methode zum optischen abbilden kurzer abstaende. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4681451A (de) |
EP (1) | EP0235696B1 (de) |
JP (1) | JPH0789048B2 (de) |
CA (1) | CA1275801C (de) |
DE (2) | DE3779340D1 (de) |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2197065A (en) * | 1986-11-03 | 1988-05-11 | Stc Plc | Optical sensor device |
JP2533664B2 (ja) * | 1990-01-17 | 1996-09-11 | 株式会社日立製作所 | 磁気記録装置 |
JPH0432704A (ja) * | 1990-05-29 | 1992-02-04 | Dainippon Screen Mfg Co Ltd | ギャップ測定装置および表面形状測定装置 |
DE4122149A1 (de) * | 1990-07-06 | 1992-01-09 | Toyoda Chuo Kenkyusho Kk | Zubehoerteil und kristallelement fuer infrarotspektroskopie mit gedaempfter totalreflexion |
JP2802825B2 (ja) * | 1990-09-22 | 1998-09-24 | 大日本スクリーン製造 株式会社 | 半導体ウエハの電気測定装置 |
JP2578026B2 (ja) * | 1991-04-30 | 1997-02-05 | 大日本スクリーン製造株式会社 | 光学測定装置 |
US5239183A (en) * | 1991-04-30 | 1993-08-24 | Dainippon Screen Mfg. Co., Ltd. | Optical gap measuring device using frustrated internal reflection |
US5172182A (en) * | 1991-05-31 | 1992-12-15 | Sting Donald W | Internal reflectance element with very small sample contacting surface |
US5200609A (en) * | 1991-08-27 | 1993-04-06 | Sting Donald W | Radiant energy spectroscopy system with diamond internal reflection element |
US5257093A (en) * | 1991-11-12 | 1993-10-26 | Guziktechnical Enterprises, Inc. | Apparatus for measuring nanometric distances employing frustrated total internal reflection |
US5220408A (en) * | 1991-12-10 | 1993-06-15 | Guzik Technical Enterprises, Inc. | Method and apparatus for calibration of optical flying-height testers |
US5349443A (en) * | 1992-11-25 | 1994-09-20 | Polaroid Corporation | Flexible transducers for photon tunneling microscopes and methods for making and using same |
JP2802868B2 (ja) * | 1992-12-22 | 1998-09-24 | 大日本スクリーン製造株式会社 | 半導体ウエハの非接触電気測定用センサおよびその製造方法、並びに、そのセンサを用いた測定方法 |
US5442443A (en) * | 1993-04-08 | 1995-08-15 | Polaroid Corporation | Stereoscopic photon tunneling microscope |
JPH06349920A (ja) * | 1993-06-08 | 1994-12-22 | Dainippon Screen Mfg Co Ltd | 半導体ウェハの電荷量測定方法 |
JPH0712716A (ja) * | 1993-06-29 | 1995-01-17 | Atsuo Watanabe | 赤外線吸収強化分光装置 |
US6265711B1 (en) | 1994-07-28 | 2001-07-24 | General Nanotechnology L.L.C. | Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements |
US6337479B1 (en) | 1994-07-28 | 2002-01-08 | Victor B. Kley | Object inspection and/or modification system and method |
WO1996003641A1 (en) * | 1994-07-28 | 1996-02-08 | Kley Victor B | Scanning probe microscope assembly |
US5751683A (en) | 1995-07-24 | 1998-05-12 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
US6339217B1 (en) | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
US5724134A (en) * | 1995-11-13 | 1998-03-03 | Zygo Corporation | Calibration standard for optical gap measuring tools |
US5715060A (en) * | 1996-03-11 | 1998-02-03 | Carnegie Mellon University | Apparatus and method for measuring linear nanometric distances using evanescent radiation |
US5796487A (en) * | 1996-06-28 | 1998-08-18 | Polaroid Corporation | Dark field, photon tunneling imaging systems and methods for optical recording and retrieval |
US5719677A (en) * | 1996-06-28 | 1998-02-17 | Polaroid Corporation | Dark field, photon tunneling imaging systems and methods for measuring flying height of read/write heads |
US5724139A (en) * | 1996-06-28 | 1998-03-03 | Polaroid Corporation | Dark field, photon tunneling imaging probes |
US5715059A (en) * | 1996-06-28 | 1998-02-03 | Polaroid Corporation | Dark field, photon tunneling imaging systems and methods |
US5774221A (en) * | 1996-08-21 | 1998-06-30 | Polaroid Corporation | Apparatus and methods for providing phase controlled evanescent illumination |
US5939709A (en) * | 1997-06-19 | 1999-08-17 | Ghislain; Lucien P. | Scanning probe optical microscope using a solid immersion lens |
US6141100A (en) * | 1997-08-15 | 2000-10-31 | Bio-Rad Laboratories, Inc. | Imaging ATR spectrometer |
US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
US7196328B1 (en) | 2001-03-08 | 2007-03-27 | General Nanotechnology Llc | Nanomachining method and apparatus |
US6923044B1 (en) | 2001-03-08 | 2005-08-02 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US6802646B1 (en) | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
WO2001003157A1 (en) | 1999-07-01 | 2001-01-11 | General Nanotechnology, Llc | Object inspection and/or modification system and method |
TW558642B (en) | 1999-08-02 | 2003-10-21 | Zetetic Inst | Scanning interferometric near-field confocal microscopy |
US7158224B2 (en) * | 2000-06-25 | 2007-01-02 | Affymetrix, Inc. | Optically active substrates |
AU2001281362A1 (en) | 2000-07-27 | 2002-02-13 | Zetetic Institute | Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation |
JP2004505256A (ja) | 2000-07-27 | 2004-02-19 | ゼテティック・インスティチュート | 共振器により強化された光透過機能を有する多重光源アレイ |
EP1303777A2 (de) | 2000-07-27 | 2003-04-23 | Zetetic Institute | Die steuerung von position und ausrichtung eines subwellenlängen-blendenarrays in der nahfeldmikroskopie |
US6775009B2 (en) | 2000-07-27 | 2004-08-10 | Zetetic Institute | Differential interferometric scanning near-field confocal microscopy |
US6931710B2 (en) * | 2001-01-30 | 2005-08-23 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
US7253407B1 (en) | 2001-03-08 | 2007-08-07 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US7053369B1 (en) * | 2001-10-19 | 2006-05-30 | Rave Llc | Scan data collection for better overall data accuracy |
US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
US20030232427A1 (en) * | 2002-06-18 | 2003-12-18 | Montagu Jean I. | Optically active substrates for examination of biological materials |
JP2005538855A (ja) | 2002-09-09 | 2005-12-22 | ジェネラル ナノテクノロジー エルエルシー | 走査型プローブ顕微鏡の流体送達 |
WO2005031427A1 (de) * | 2003-09-25 | 2005-04-07 | Leica Microsystems Cms Gmbh | Verfahren zur probenuntersuchung und mikroskop mit evaneszenter probenbeleuchtung |
JP4117353B2 (ja) | 2003-11-05 | 2008-07-16 | ナプソン株式会社 | 検査ヘッド用位置調整装置及び非接触型抵抗率測定装置 |
GB0608258D0 (en) | 2006-04-26 | 2006-06-07 | Perkinelmer Singapore Pte Ltd | Spectroscopy using attenuated total internal reflectance (ATR) |
US8072577B2 (en) * | 2006-06-05 | 2011-12-06 | Macronix International Co., Ltd. | Lithography systems and processes |
US10859851B2 (en) | 2014-10-24 | 2020-12-08 | Wavefront Technology, Inc. | Optical products, masters for fabricating optical products, and methods for manufacturing masters and optical products |
WO2017011476A1 (en) | 2015-07-13 | 2017-01-19 | Wavefront Technology, Inc. | Optical products, masters for fabricating optical products, and methods for manufacturing masters and optical products |
CA3015684A1 (en) | 2016-04-22 | 2017-10-26 | Wavefront Technology, Inc. | Optical switch devices |
US11113919B2 (en) | 2017-10-20 | 2021-09-07 | Wavefront Technology, Inc. | Optical switch devices |
JP2020173207A (ja) * | 2019-04-12 | 2020-10-22 | 株式会社ミツトヨ | 形状測定機 |
AU2020257828A1 (en) | 2019-04-19 | 2021-10-14 | Wavefront Technology, Inc. | Optical switch devices |
US11320117B2 (en) | 2020-04-13 | 2022-05-03 | Electronic Theatre Controls, Inc. | Zoom mechanism for a light fixture |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE885934C (de) * | 1938-09-25 | 1953-08-10 | Wolfram Dipl-Ing Dreyhaupt | Optisches Oberflaechenpruefgeraet zum Pruefen von Oberflaechen mit hohem Guetegrad auf Traganteil |
DE903378C (de) * | 1942-10-17 | 1954-02-04 | Wolfram Dreyhaupt Dipl Ing | Oberflaechenpruefgeraet zur Feststellung der tragenden Flaeche |
US2997922A (en) * | 1958-04-24 | 1961-08-29 | Edward K Kaprelian | Light valve |
US3338656A (en) * | 1963-12-12 | 1967-08-29 | Barnes Eng Co | Frustrated internal reflection modulator and a method of making the same |
DE2504199A1 (de) * | 1975-02-01 | 1976-08-19 | Springer Ag Verlag Axel | Verfahren und vorrichtung zur ermittlung der oertlichen traganteilverteilung an materialoberflaechen |
US3987668A (en) * | 1975-11-17 | 1976-10-26 | Popenoe Charles H | Light reflective opti-mechanical displacement microindicator |
DE2620914C3 (de) * | 1976-05-12 | 1979-05-10 | Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen | Analoger Beschleunigungsmesser |
US4032889A (en) * | 1976-05-21 | 1977-06-28 | International Business Machines Corporation | Palm print identification |
US4165155A (en) * | 1978-03-27 | 1979-08-21 | International Business Machines Corporation | Amplitude modulation of light beam |
US4286468A (en) * | 1979-09-04 | 1981-09-01 | The United States Of America As Represented By The Secretary Of The Navy | Frustrated total internal reflection fiber-optic small-motion sensor for hydrophone use |
DE2937484A1 (de) * | 1979-09-17 | 1981-05-14 | Siemens AG, 1000 Berlin und 8000 München | Optische vorrichtung zum messen von druckdifferenzen mittels lichtintensitaetsaenderung |
JPS5763408A (en) * | 1980-10-03 | 1982-04-16 | Hitachi Ltd | Flatness detector |
JPS582602A (ja) * | 1981-06-29 | 1983-01-08 | Shimadzu Corp | 光学式変位検出器 |
US4490618A (en) * | 1982-04-12 | 1984-12-25 | Canadian Patents & Development Limited | Optical system for analyzing the surface of a fibrous web |
US4451123A (en) * | 1982-12-20 | 1984-05-29 | Gte Laboratories Incorporated | High frequency light modulation device |
JPS6011106A (ja) * | 1983-06-30 | 1985-01-21 | Matsushita Electric Ind Co Ltd | 形状検出装置 |
JPS6055214A (ja) * | 1983-09-06 | 1985-03-30 | Ricoh Co Ltd | 波面形状測定装置 |
-
1986
- 1986-02-28 US US06/834,532 patent/US4681451A/en not_active Expired - Lifetime
-
1987
- 1987-02-18 CA CA000529988A patent/CA1275801C/en not_active Expired - Fee Related
- 1987-02-20 DE DE8787102404T patent/DE3779340D1/de not_active Expired - Fee Related
- 1987-02-20 EP EP87102404A patent/EP0235696B1/de not_active Expired
- 1987-02-20 DE DE198787102404T patent/DE235696T1/de active Pending
- 1987-02-27 JP JP62045116A patent/JPH0789048B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0235696B1 (de) | 1992-05-27 |
EP0235696A2 (de) | 1987-09-09 |
US4681451A (en) | 1987-07-21 |
JPH0789048B2 (ja) | 1995-09-27 |
CA1275801C (en) | 1990-11-06 |
DE235696T1 (de) | 1988-01-14 |
JPS62225904A (ja) | 1987-10-03 |
EP0235696A3 (en) | 1989-05-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |