DE3775038D1 - Verfahren zur herstellung von formen und matrizen. - Google Patents

Verfahren zur herstellung von formen und matrizen.

Info

Publication number
DE3775038D1
DE3775038D1 DE8787306390T DE3775038T DE3775038D1 DE 3775038 D1 DE3775038 D1 DE 3775038D1 DE 8787306390 T DE8787306390 T DE 8787306390T DE 3775038 T DE3775038 T DE 3775038T DE 3775038 D1 DE3775038 D1 DE 3775038D1
Authority
DE
Germany
Prior art keywords
template
workpiece
etchant
mold
matrices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787306390T
Other languages
English (en)
Inventor
James J Rossetti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Tool Technologies Inc
Original Assignee
Advanced Tool Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Tool Technologies Inc filed Critical Advanced Tool Technologies Inc
Application granted granted Critical
Publication of DE3775038D1 publication Critical patent/DE3775038D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • C23F1/04—Chemical milling
DE8787306390T 1987-02-24 1987-07-20 Verfahren zur herstellung von formen und matrizen. Expired - Fee Related DE3775038D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/017,916 US4832790A (en) 1986-04-11 1987-02-24 Method of making metal molds and dies

Publications (1)

Publication Number Publication Date
DE3775038D1 true DE3775038D1 (de) 1992-01-16

Family

ID=21785259

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787306390T Expired - Fee Related DE3775038D1 (de) 1987-02-24 1987-07-20 Verfahren zur herstellung von formen und matrizen.

Country Status (6)

Country Link
US (1) US4832790A (de)
EP (1) EP0280804B1 (de)
AT (1) ATE70090T1 (de)
DE (1) DE3775038D1 (de)
ES (1) ES2028872T3 (de)
GR (1) GR3003957T3 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5575962A (en) * 1994-12-02 1996-11-19 Lucent Technologies Inc. Method for fabricating optical quality molds with precision microfeatures
US5820769A (en) * 1995-05-24 1998-10-13 Regents Of The University Of Minnesota Method for making magnetic storage having discrete elements with quantized magnetic moments
US6309580B1 (en) 1995-11-15 2001-10-30 Regents Of The University Of Minnesota Release surfaces, particularly for use in nanoimprint lithography
US7758794B2 (en) * 2001-10-29 2010-07-20 Princeton University Method of making an article comprising nanoscale patterns with reduced edge roughness
US5772905A (en) * 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
US20040137734A1 (en) * 1995-11-15 2004-07-15 Princeton University Compositions and processes for nanoimprinting
US6780001B2 (en) * 1999-07-30 2004-08-24 Formfactor, Inc. Forming tool for forming a contoured microelectronic spring mold
US20050037143A1 (en) * 2000-07-18 2005-02-17 Chou Stephen Y. Imprint lithography with improved monitoring and control and apparatus therefor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE107526C (de) * 1899-02-13
US2662002A (en) * 1951-02-14 1953-12-08 Frederick A Sunderhauf Method of embossing rolls
US3048512A (en) * 1957-06-27 1962-08-07 Modern Engraving And Machine C Method of making matched embossing rolls
US3226255A (en) * 1961-10-31 1965-12-28 Western Electric Co Masking method for semiconductor
US3290192A (en) * 1965-07-09 1966-12-06 Motorola Inc Method of etching semiconductors
US4035226A (en) * 1975-04-14 1977-07-12 Rca Corporation Method of preparing portions of a semiconductor wafer surface for further processing
US4108716A (en) * 1976-12-22 1978-08-22 Bell Telephone Laboratories, Incorporated Polishing of CdS crystals
US4325779A (en) * 1979-04-17 1982-04-20 Beatrice Foods Co. Method for shaping and finishing a workpiece
EP0092001B1 (de) * 1982-04-19 1986-10-08 Lovejoy Industries, Inc. Verfahren zum Formen und Fertigstellen eines Werkstückes
US4563238A (en) * 1984-09-05 1986-01-07 Extrude Hone Corporation Chemical deburring system with a soluble mask
US4556449A (en) * 1984-10-15 1985-12-03 Psi Star Nickel etching process and solution

Also Published As

Publication number Publication date
GR3003957T3 (de) 1993-03-16
EP0280804A1 (de) 1988-09-07
ATE70090T1 (de) 1991-12-15
ES2028872T3 (es) 1992-07-16
US4832790A (en) 1989-05-23
EP0280804B1 (de) 1991-12-04

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: ADVANCED TOOL TECHNOLOGIES, INC., MELBOURNE, FLA.,

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee