GR3003957T3 - - Google Patents
Info
- Publication number
- GR3003957T3 GR3003957T3 GR920400383T GR920400383T GR3003957T3 GR 3003957 T3 GR3003957 T3 GR 3003957T3 GR 920400383 T GR920400383 T GR 920400383T GR 920400383 T GR920400383 T GR 920400383T GR 3003957 T3 GR3003957 T3 GR 3003957T3
- Authority
- GR
- Greece
- Prior art keywords
- template
- workpiece
- etchant
- mold
- coating
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
- C23F1/04—Chemical milling
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Mounting, Exchange, And Manufacturing Of Dies (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Materials For Medical Uses (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/017,916 US4832790A (en) | 1986-04-11 | 1987-02-24 | Method of making metal molds and dies |
Publications (1)
Publication Number | Publication Date |
---|---|
GR3003957T3 true GR3003957T3 (el) | 1993-03-16 |
Family
ID=21785259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GR920400383T GR3003957T3 (el) | 1987-02-24 | 1992-03-04 |
Country Status (6)
Country | Link |
---|---|
US (1) | US4832790A (el) |
EP (1) | EP0280804B1 (el) |
AT (1) | ATE70090T1 (el) |
DE (1) | DE3775038D1 (el) |
ES (1) | ES2028872T3 (el) |
GR (1) | GR3003957T3 (el) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5575962A (en) * | 1994-12-02 | 1996-11-19 | Lucent Technologies Inc. | Method for fabricating optical quality molds with precision microfeatures |
US5820769A (en) * | 1995-05-24 | 1998-10-13 | Regents Of The University Of Minnesota | Method for making magnetic storage having discrete elements with quantized magnetic moments |
US7758794B2 (en) * | 2001-10-29 | 2010-07-20 | Princeton University | Method of making an article comprising nanoscale patterns with reduced edge roughness |
US5772905A (en) * | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
US20040137734A1 (en) * | 1995-11-15 | 2004-07-15 | Princeton University | Compositions and processes for nanoimprinting |
US6309580B1 (en) | 1995-11-15 | 2001-10-30 | Regents Of The University Of Minnesota | Release surfaces, particularly for use in nanoimprint lithography |
US6780001B2 (en) * | 1999-07-30 | 2004-08-24 | Formfactor, Inc. | Forming tool for forming a contoured microelectronic spring mold |
US20050037143A1 (en) * | 2000-07-18 | 2005-02-17 | Chou Stephen Y. | Imprint lithography with improved monitoring and control and apparatus therefor |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE107526C (el) * | 1899-02-13 | |||
US2662002A (en) * | 1951-02-14 | 1953-12-08 | Frederick A Sunderhauf | Method of embossing rolls |
US3048512A (en) * | 1957-06-27 | 1962-08-07 | Modern Engraving And Machine C | Method of making matched embossing rolls |
US3226255A (en) * | 1961-10-31 | 1965-12-28 | Western Electric Co | Masking method for semiconductor |
US3290192A (en) * | 1965-07-09 | 1966-12-06 | Motorola Inc | Method of etching semiconductors |
US4035226A (en) * | 1975-04-14 | 1977-07-12 | Rca Corporation | Method of preparing portions of a semiconductor wafer surface for further processing |
US4108716A (en) * | 1976-12-22 | 1978-08-22 | Bell Telephone Laboratories, Incorporated | Polishing of CdS crystals |
US4325779A (en) * | 1979-04-17 | 1982-04-20 | Beatrice Foods Co. | Method for shaping and finishing a workpiece |
EP0092001B1 (en) * | 1982-04-19 | 1986-10-08 | Lovejoy Industries, Inc. | Method for shaping and finishing a workpiece |
US4563238A (en) * | 1984-09-05 | 1986-01-07 | Extrude Hone Corporation | Chemical deburring system with a soluble mask |
US4556449A (en) * | 1984-10-15 | 1985-12-03 | Psi Star | Nickel etching process and solution |
-
1987
- 1987-02-24 US US07/017,916 patent/US4832790A/en not_active Expired - Fee Related
- 1987-07-20 ES ES198787306390T patent/ES2028872T3/es not_active Expired - Lifetime
- 1987-07-20 EP EP87306390A patent/EP0280804B1/en not_active Expired
- 1987-07-20 AT AT87306390T patent/ATE70090T1/de active
- 1987-07-20 DE DE8787306390T patent/DE3775038D1/de not_active Expired - Fee Related
-
1992
- 1992-03-04 GR GR920400383T patent/GR3003957T3/el unknown
Also Published As
Publication number | Publication date |
---|---|
EP0280804B1 (en) | 1991-12-04 |
DE3775038D1 (de) | 1992-01-16 |
US4832790A (en) | 1989-05-23 |
ATE70090T1 (de) | 1991-12-15 |
EP0280804A1 (en) | 1988-09-07 |
ES2028872T3 (es) | 1992-07-16 |
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