DE3771982D1 - Primaer-teilchen-bestrahlungsvorrichtung und verfahren zur bestrahlung derselben. - Google Patents

Primaer-teilchen-bestrahlungsvorrichtung und verfahren zur bestrahlung derselben.

Info

Publication number
DE3771982D1
DE3771982D1 DE8787402184T DE3771982T DE3771982D1 DE 3771982 D1 DE3771982 D1 DE 3771982D1 DE 8787402184 T DE8787402184 T DE 8787402184T DE 3771982 T DE3771982 T DE 3771982T DE 3771982 D1 DE3771982 D1 DE 3771982D1
Authority
DE
Germany
Prior art keywords
radiation
primaer
particle
radiation device
particle radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787402184T
Other languages
German (de)
English (en)
Inventor
Haruhisa Mori
Tadayuki Kojima
Satoshi Hasui
Hiroshi Ohmori
Shuji Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujitsu Ltd
Original Assignee
Tokyo Electron Ltd
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujitsu Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE3771982D1 publication Critical patent/DE3771982D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H10P30/20—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE8787402184T 1986-09-30 1987-09-30 Primaer-teilchen-bestrahlungsvorrichtung und verfahren zur bestrahlung derselben. Expired - Lifetime DE3771982D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61229969A JPS6386340A (ja) 1986-09-30 1986-09-30 一次粒子線照射装置

Publications (1)

Publication Number Publication Date
DE3771982D1 true DE3771982D1 (de) 1991-09-12

Family

ID=16900545

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787402184T Expired - Lifetime DE3771982D1 (de) 1986-09-30 1987-09-30 Primaer-teilchen-bestrahlungsvorrichtung und verfahren zur bestrahlung derselben.

Country Status (5)

Country Link
US (1) US4785188A (OSRAM)
EP (1) EP0263032B1 (OSRAM)
JP (1) JPS6386340A (OSRAM)
KR (1) KR910007835B1 (OSRAM)
DE (1) DE3771982D1 (OSRAM)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9000822A (nl) * 1990-04-09 1991-11-01 Philips Nv Werkwijze voor bestraling van een object met een geladen deeltjesbundel en inrichting voor uitvoering van de werkwijze.
JP2648642B2 (ja) * 1990-04-17 1997-09-03 アプライド マテリアルズ インコーポレイテッド 巾広ビームでイオンインプランテーションを行なう方法及び装置
JP2969788B2 (ja) * 1990-05-17 1999-11-02 日新電機株式会社 イオンビームの平行度測定方法、走査波形整形方法およびイオン注入装置
US5311028A (en) * 1990-08-29 1994-05-10 Nissin Electric Co., Ltd. System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
US5572038A (en) * 1993-05-07 1996-11-05 Varian Associates, Inc. Charge monitor for high potential pulse current dose measurement apparatus and method
US5859437A (en) * 1997-03-17 1999-01-12 Taiwan Semiconductor Manufacturing Corporation Intelligent supervision system with expert system for ion implantation process
US6519018B1 (en) 1998-11-03 2003-02-11 International Business Machines Corporation Vertically aligned liquid crystal displays and methods for their production
US6061115A (en) * 1998-11-03 2000-05-09 International Business Machines Incorporation Method of producing a multi-domain alignment layer by bombarding ions of normal incidence
US6313896B1 (en) 1999-08-31 2001-11-06 International Business Machines Corporation Method for forming a multi-domain alignment layer for a liquid crystal display device
US7358484B2 (en) * 2005-09-29 2008-04-15 Tokyo Electron Limited Hyperthermal neutral beam source and method of operating
US20100086711A1 (en) * 2007-02-14 2010-04-08 Asahi Kasei Chemicals Corporation Stretched laminated film and bag
US8378317B1 (en) * 2011-09-07 2013-02-19 Gtat Corporation Ion implant apparatus and method of ion implantation

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3585397A (en) * 1968-10-04 1971-06-15 Hughes Aircraft Co Programmed fine ion implantation beam system
JPS55124936A (en) * 1979-03-22 1980-09-26 Hitachi Ltd Control method of beam current in ion drive
JPS57123639A (en) * 1981-01-23 1982-08-02 Agency Of Ind Science & Technol Method for monitoring ion current for ion implantation apparatus
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
JPS599843A (ja) * 1982-07-07 1984-01-19 Akashi Seisakusho Co Ltd 走査型電子顕微鏡およびその類似装置における２次荷電粒子検出装置
US4539217A (en) * 1984-06-27 1985-09-03 Eaton Corporation Dose control method
JPS6139356A (ja) * 1984-07-30 1986-02-25 Hitachi Ltd イオン打込装置

Also Published As

Publication number Publication date
EP0263032B1 (en) 1991-08-07
KR880004550A (ko) 1988-06-04
JPH0526294B2 (OSRAM) 1993-04-15
JPS6386340A (ja) 1988-04-16
US4785188A (en) 1988-11-15
EP0263032A1 (en) 1988-04-06
KR910007835B1 (ko) 1991-10-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition