DE3771711D1 - Atomares kraeftemikroskop mit oscillierendem quarz. - Google Patents

Atomares kraeftemikroskop mit oscillierendem quarz.

Info

Publication number
DE3771711D1
DE3771711D1 DE8787106899T DE3771711T DE3771711D1 DE 3771711 D1 DE3771711 D1 DE 3771711D1 DE 8787106899 T DE8787106899 T DE 8787106899T DE 3771711 T DE3771711 T DE 3771711T DE 3771711 D1 DE3771711 D1 DE 3771711D1
Authority
DE
Germany
Prior art keywords
atomaric
power microscope
oscillating quartz
oscillating
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787106899T
Other languages
English (en)
Inventor
Wolfgang Dieter Dr Pohl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3771711D1 publication Critical patent/DE3771711D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE8787106899T 1987-05-12 1987-05-12 Atomares kraeftemikroskop mit oscillierendem quarz. Expired - Lifetime DE3771711D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP87106899A EP0290647B1 (de) 1987-05-12 1987-05-12 Atomares Kräftemikroskop mit oscillierendem Quarz

Publications (1)

Publication Number Publication Date
DE3771711D1 true DE3771711D1 (de) 1991-08-29

Family

ID=8196982

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787106899T Expired - Lifetime DE3771711D1 (de) 1987-05-12 1987-05-12 Atomares kraeftemikroskop mit oscillierendem quarz.

Country Status (5)

Country Link
US (1) US4851671A (de)
EP (1) EP0290647B1 (de)
JP (1) JPH06103176B2 (de)
CA (1) CA1330452C (de)
DE (1) DE3771711D1 (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2756254B2 (ja) * 1988-03-25 1998-05-25 キヤノン株式会社 記録装置及び再生装置
US5079958A (en) * 1989-03-17 1992-01-14 Olympus Optical Co., Ltd. Sensor having a cantilever
US5019707A (en) * 1989-03-23 1991-05-28 International Business Machines Corporation High speed waveform sampling with a tunneling microscope
US5304924A (en) * 1989-03-29 1994-04-19 Canon Kabushiki Kaisha Edge detector
JP2689356B2 (ja) * 1989-03-29 1997-12-10 キヤノン株式会社 エッジ検出装置
GB8910566D0 (en) * 1989-05-08 1989-06-21 Amersham Int Plc Imaging apparatus and method
JP2686645B2 (ja) * 1989-05-08 1997-12-08 キヤノン株式会社 走査型トンネル電流検出装置
US5144833A (en) * 1990-09-27 1992-09-08 International Business Machines Corporation Atomic force microscopy
DE4035075A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
DE4035084A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
DE4035076A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
US5254854A (en) * 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi Ltd Verfahren und Vorrichtung zum Beobachten einer Fläche
JPH05196559A (ja) * 1992-01-21 1993-08-06 Tadahiro Omi 測定される変位の量を較正する標準試料の製法及び標準試料並びに測定装置及び較正方法
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
US5262643A (en) * 1992-06-12 1993-11-16 International Business Machines Corp. Automatic tip approach method and apparatus for scanning probe microscope
USRE36488E (en) * 1992-08-07 2000-01-11 Veeco Instruments Inc. Tapping atomic force microscope with phase or frequency detection
US5347854A (en) * 1992-09-22 1994-09-20 International Business Machines Corporation Two dimensional profiling with a contact force atomic force microscope
US5321977A (en) * 1992-12-31 1994-06-21 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
US5681987A (en) * 1993-04-28 1997-10-28 Topometrix Corporation Resonance contact scanning force microscope
US5481908A (en) * 1993-04-28 1996-01-09 Topometrix Corporation Resonance contact scanning force microscope
US6006594A (en) * 1994-05-11 1999-12-28 Dr. Khaled Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts Scanning probe microscope head with signal processing circuit
GB2289759B (en) * 1994-05-11 1996-05-22 Khaled Karrau Coupled oscillator scanning imager
JP3402512B2 (ja) * 1994-05-23 2003-05-06 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
DE69522934T2 (de) * 1995-02-07 2002-04-04 Ibm Messung der AFM Hebelarmauslenkung mit Hochfrequenzstrahlung und Dotierungsprofilometer
DE19513529A1 (de) * 1995-04-10 1996-10-17 Zeiss Carl Jena Gmbh Anordnung zur Erfassung der Topographie einer Oberfläche
US5574278A (en) * 1995-05-23 1996-11-12 The United States Of America As Represented By The Secretary Of Commerce Atomic force microscope using piezoelectric detection
DE19520457C2 (de) * 1995-06-03 1997-07-31 Forschungszentrum Juelich Gmbh Meßfühler einer Sonde zur Messung der Topographie einer Probenoberfläche
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
JP2934739B2 (ja) * 1996-02-20 1999-08-16 セイコーインスツルメンツ株式会社 走査型近視野原子間力顕微鏡
JP3370527B2 (ja) * 1996-03-08 2003-01-27 セイコーインスツルメンツ株式会社 原子間力顕微鏡用プローブとその製造方法および原子間力顕微鏡
JP3249419B2 (ja) 1997-03-12 2002-01-21 セイコーインスツルメンツ株式会社 走査型近接場光学顕微鏡
JP3511361B2 (ja) * 1997-08-04 2004-03-29 セイコーインスツルメンツ株式会社 走査プローブ顕微鏡
US6079254A (en) * 1998-05-04 2000-06-27 International Business Machines Corporation Scanning force microscope with automatic surface engagement and improved amplitude demodulation
JP3387846B2 (ja) * 1999-03-04 2003-03-17 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
JP4044241B2 (ja) * 1999-05-24 2008-02-06 日本分光株式会社 プローブ顕微鏡
US6845655B2 (en) * 2003-03-17 2005-01-25 Wisconsin Alumni Research Foundation Heterodyne feedback system for scanning force microscopy and the like
US7055378B2 (en) 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
EP1978348A4 (de) * 2005-12-19 2012-11-28 Univ Kanazawa Nat Univ Corp Rastersondenmikroskop
FR2915803B1 (fr) * 2007-05-02 2012-06-08 Centre Nat Rech Scient Sonde pour microscopie a force atomique

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
US4550257A (en) * 1984-06-29 1985-10-29 International Business Machines Corporation Narrow line width pattern fabrication
US4618767A (en) * 1985-03-22 1986-10-21 International Business Machines Corporation Low-energy scanning transmission electron microscope
FR2588657B1 (fr) * 1985-10-10 1988-08-12 Asulab Sa Capteur de force comprenant un resonateur dont la frequence varie en fonction de la force appliquee
US4724318A (en) * 1985-11-26 1988-02-09 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution

Also Published As

Publication number Publication date
CA1330452C (en) 1994-06-28
EP0290647A1 (de) 1988-11-17
EP0290647B1 (de) 1991-07-24
US4851671A (en) 1989-07-25
JPS63309803A (ja) 1988-12-16
JPH06103176B2 (ja) 1994-12-14

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Legal Events

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8364 No opposition during term of opposition