FR2915803B1 - Sonde pour microscopie a force atomique - Google Patents

Sonde pour microscopie a force atomique

Info

Publication number
FR2915803B1
FR2915803B1 FR0703161A FR0703161A FR2915803B1 FR 2915803 B1 FR2915803 B1 FR 2915803B1 FR 0703161 A FR0703161 A FR 0703161A FR 0703161 A FR0703161 A FR 0703161A FR 2915803 B1 FR2915803 B1 FR 2915803B1
Authority
FR
France
Prior art keywords
probe
atomic force
force microscopy
microscopy
atomic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0703161A
Other languages
English (en)
Other versions
FR2915803A1 (fr
Inventor
Marc Faucher
Lionel Buchaillot
Jean Pierre Aime
Bernard Louis Amand Legrand
Gerard Couturier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0703161A priority Critical patent/FR2915803B1/fr
Priority to US12/598,490 priority patent/US8091143B2/en
Priority to EP08805499A priority patent/EP2150799A1/fr
Priority to PCT/FR2008/000580 priority patent/WO2008148951A1/fr
Priority to JP2010504785A priority patent/JP5208201B2/ja
Publication of FR2915803A1 publication Critical patent/FR2915803A1/fr
Application granted granted Critical
Publication of FR2915803B1 publication Critical patent/FR2915803B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Power Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Micromachines (AREA)
FR0703161A 2007-05-02 2007-05-02 Sonde pour microscopie a force atomique Active FR2915803B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0703161A FR2915803B1 (fr) 2007-05-02 2007-05-02 Sonde pour microscopie a force atomique
US12/598,490 US8091143B2 (en) 2007-05-02 2008-04-23 Atomic force microscopy probe
EP08805499A EP2150799A1 (fr) 2007-05-02 2008-04-23 Sonde pour microscopie a force atomique
PCT/FR2008/000580 WO2008148951A1 (fr) 2007-05-02 2008-04-23 Sonde pour microscopie a force atomique
JP2010504785A JP5208201B2 (ja) 2007-05-02 2008-04-23 原子間力顕微鏡法のためのプローブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0703161A FR2915803B1 (fr) 2007-05-02 2007-05-02 Sonde pour microscopie a force atomique

Publications (2)

Publication Number Publication Date
FR2915803A1 FR2915803A1 (fr) 2008-11-07
FR2915803B1 true FR2915803B1 (fr) 2012-06-08

Family

ID=38608839

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0703161A Active FR2915803B1 (fr) 2007-05-02 2007-05-02 Sonde pour microscopie a force atomique

Country Status (5)

Country Link
US (1) US8091143B2 (fr)
EP (1) EP2150799A1 (fr)
JP (1) JP5208201B2 (fr)
FR (1) FR2915803B1 (fr)
WO (1) WO2008148951A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2985251B1 (fr) 2012-01-04 2016-09-30 Agilent Technologies Inc Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems)
JP2018510364A (ja) 2015-02-26 2018-04-12 クサレント リミテッド ライアビリティー カンパニー 集積マルチチップ走査型プローブ顕微鏡
WO2016138398A1 (fr) 2015-02-26 2016-09-01 Xallent, LLC Systèmes et procédés de fabrication de sondes de système nano-électromécanique
FR3039280B1 (fr) 2015-07-22 2019-05-17 Vmicro S.A.S Sonde pour microscopie a force atomique a faible encombrement et microscope a force atomique comprenant une telle sonde
US10866273B2 (en) 2016-03-09 2020-12-15 Xallent, LLC Functional prober chip
FR3057958B1 (fr) 2016-10-21 2021-02-26 Vmicro Sonde pour microscopie a force atomique miniaturisee et a faible encombrement
WO2018187525A1 (fr) 2017-04-06 2018-10-11 Kwame Amponsah Dispositifs nanoélectromécaniques à contacts métal-métal
WO2018222707A1 (fr) * 2017-05-30 2018-12-06 Scuba Probe Technologies Llc Sondes de microscope à force atomique et procédés de fabrication de sondes
US10663484B2 (en) 2018-02-14 2020-05-26 Xallent, LLC Multiple integrated tips scanning probe microscope with pre-alignment components
CN112630472B (zh) * 2020-12-02 2022-03-01 东华大学 基于原子力显微镜的高精度样品旋转台装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290647B1 (fr) * 1987-05-12 1991-07-24 International Business Machines Corporation Microscope de forces atomiques à quartz oscillant
JP2001091441A (ja) * 1999-07-16 2001-04-06 Japan Science & Technology Corp ナノメートルオーダの機械振動子、その製造方法及びそれを用いた測定装置
KR100421375B1 (ko) * 2001-01-15 2004-03-09 제원호 고속 주사탐침 현미경용 고주파 진동 탐침
JP4190936B2 (ja) * 2002-09-17 2008-12-03 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡およびその操作法
JP4104431B2 (ja) * 2002-11-12 2008-06-18 オリンパス株式会社 走査装置及びこの走査装置を用いた走査型プローブ顕微鏡
KR100612595B1 (ko) * 2004-01-05 2006-08-17 한국기계연구원 나노 압입 시험 기능을 갖는 ａｆｍ 캔틸레버
US20070046397A1 (en) * 2005-08-01 2007-03-01 Purdue Research Foundation Nonlinear internal resonance based micromechanical resonators
US7726189B2 (en) * 2005-08-01 2010-06-01 Purdue Research Foundation Nonlinear micromechanical resonator
US7395698B2 (en) * 2005-10-25 2008-07-08 Georgia Institute Of Technology Three-dimensional nanoscale metrology using FIRAT probe
US7555940B2 (en) * 2006-07-25 2009-07-07 Veeco Instruments, Inc. Cantilever free-decay measurement system with coherent averaging

Also Published As

Publication number Publication date
US8091143B2 (en) 2012-01-03
JP2010526284A (ja) 2010-07-29
JP5208201B2 (ja) 2013-06-12
FR2915803A1 (fr) 2008-11-07
EP2150799A1 (fr) 2010-02-10
US20100205698A1 (en) 2010-08-12
WO2008148951A1 (fr) 2008-12-11

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