DE602005000567D1 - Atomkraftmikroskop - Google Patents

Atomkraftmikroskop

Info

Publication number
DE602005000567D1
DE602005000567D1 DE602005000567T DE602005000567T DE602005000567D1 DE 602005000567 D1 DE602005000567 D1 DE 602005000567D1 DE 602005000567 T DE602005000567 T DE 602005000567T DE 602005000567 T DE602005000567 T DE 602005000567T DE 602005000567 D1 DE602005000567 D1 DE 602005000567D1
Authority
DE
Germany
Prior art keywords
atomic force
force microscope
microscope
atomic
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005000567T
Other languages
English (en)
Other versions
DE602005000567T2 (de
Inventor
Girsh Blumberg
Carl Johannes Schlockermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Publication of DE602005000567D1 publication Critical patent/DE602005000567D1/de
Application granted granted Critical
Publication of DE602005000567T2 publication Critical patent/DE602005000567T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE602005000567T 2004-09-30 2005-09-22 Atomkraftmikroskop Active DE602005000567T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US954739 2004-09-30
US10/954,739 US7111504B2 (en) 2004-09-30 2004-09-30 Atomic force microscope

Publications (2)

Publication Number Publication Date
DE602005000567D1 true DE602005000567D1 (de) 2007-03-29
DE602005000567T2 DE602005000567T2 (de) 2007-10-31

Family

ID=35311508

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005000567T Active DE602005000567T2 (de) 2004-09-30 2005-09-22 Atomkraftmikroskop

Country Status (5)

Country Link
US (1) US7111504B2 (de)
EP (1) EP1643510B1 (de)
JP (1) JP2006105979A (de)
CN (1) CN1755346A (de)
DE (1) DE602005000567T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1845059A1 (de) * 2006-04-13 2007-10-17 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. MEMS Sensor
US7721587B2 (en) * 2007-03-12 2010-05-25 Purdue Research Foundation System and method for improving the precision of nanoscale force and displacement measurements
US8429954B2 (en) * 2007-03-12 2013-04-30 Purdue Research Foundation Monolithic comb drive system and method for large-deflection multi-DOF microtransduction
US20100122386A1 (en) * 2007-03-30 2010-05-13 Jun Suzuki Driving apparatus
US7891015B2 (en) * 2007-07-31 2011-02-15 Bruker Nano, Inc. High-bandwidth actuator drive for scanning probe microscopy
US8139283B2 (en) * 2007-11-09 2012-03-20 Alcatel Lucent Surface plasmon polariton modulation
JP5438750B2 (ja) * 2008-03-24 2014-03-12 本田技研工業株式会社 原子間力顕微鏡を利用したナノ構造の堆積のための装置
EP2283486A2 (de) * 2008-05-23 2011-02-16 Veeco Instruments Inc. Vorverstärkungs-kragträger und anwendungen dafür
US8347409B2 (en) 2010-05-24 2013-01-01 Massachusetts Institute Of Technology Resonance compensation in scanning probe microscopy
CN101839924B (zh) * 2010-05-28 2013-03-27 北京工业大学 原子力声学显微镜悬臂梁接触谐振频率追踪系统
US9408555B2 (en) 2010-06-30 2016-08-09 Indiana University Research And Technology Corporation Supersensitive linear pressure transducer
JP5525377B2 (ja) * 2010-08-17 2014-06-18 株式会社ミツトヨ 高ダイナミックレンジプローブ
EP2556763A3 (de) 2011-08-11 2013-11-13 Hermann Oberschneider Konstruktion, Herstellung und Verwendung eines neuartigen Schuhsohlensystems
CN104155477A (zh) * 2014-08-13 2014-11-19 中国科学院电工研究所 一种原子力声学显微镜探针接触谐振频率追踪方法
CN111886505B (zh) * 2018-01-22 2024-03-05 理海大学 非轻敲模式的散射式扫描近场光学显微镜系统及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4987303A (en) 1989-04-07 1991-01-22 Olympus Optical Co., Inc. Micro-displacement detector device, piezo-actuator provided with the micro-displacement detector device and scanning probe microscope provided with the piezo-actuator
US5440121A (en) 1993-12-28 1995-08-08 Seiko Instruments Inc. Scanning probe microscope
JP3229914B2 (ja) 1994-12-12 2001-11-19 日本電子株式会社 走査型プローブ顕微鏡
JP3608009B2 (ja) * 1995-07-05 2005-01-05 株式会社ニコン 原子間力顕微鏡
JPH10239329A (ja) * 1997-02-27 1998-09-11 Jeol Ltd 走査プローブ顕微鏡
US6672144B2 (en) 1999-03-29 2004-01-06 Veeco Instruments Inc. Dynamic activation for an atomic force microscope and method of use thereof
US6189374B1 (en) 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof
US6590208B2 (en) * 2001-01-19 2003-07-08 Veeco Instruments Inc. Balanced momentum probe holder
DE10208800A1 (de) 2002-03-01 2003-09-18 Harald Fuchs Haftsensor zur berührungsfreien Messung der Haftungseigenschaften von Oberflächen

Also Published As

Publication number Publication date
CN1755346A (zh) 2006-04-05
EP1643510B1 (de) 2007-02-14
US20060065047A1 (en) 2006-03-30
DE602005000567T2 (de) 2007-10-31
EP1643510A1 (de) 2006-04-05
US7111504B2 (en) 2006-09-26
JP2006105979A (ja) 2006-04-20

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Legal Events

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8364 No opposition during term of opposition