DE3771596D1 - Verfahren zur optischen guetepruefung, unter verwendung der laser-tupfeninterferometrie. - Google Patents

Verfahren zur optischen guetepruefung, unter verwendung der laser-tupfeninterferometrie.

Info

Publication number
DE3771596D1
DE3771596D1 DE8787304864T DE3771596T DE3771596D1 DE 3771596 D1 DE3771596 D1 DE 3771596D1 DE 8787304864 T DE8787304864 T DE 8787304864T DE 3771596 T DE3771596 T DE 3771596T DE 3771596 D1 DE3771596 D1 DE 3771596D1
Authority
DE
Germany
Prior art keywords
interferometry
laser dot
good examination
optical good
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787304864T
Other languages
English (en)
Inventor
John Raymond The Hawthor Tyrer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Application granted granted Critical
Publication of DE3771596D1 publication Critical patent/DE3771596D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Lasers (AREA)
DE8787304864T 1986-06-05 1987-06-02 Verfahren zur optischen guetepruefung, unter verwendung der laser-tupfeninterferometrie. Expired - Lifetime DE3771596D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868613635A GB8613635D0 (en) 1986-06-05 1986-06-05 Optical inspection

Publications (1)

Publication Number Publication Date
DE3771596D1 true DE3771596D1 (de) 1991-08-29

Family

ID=10598960

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787304864T Expired - Lifetime DE3771596D1 (de) 1986-06-05 1987-06-02 Verfahren zur optischen guetepruefung, unter verwendung der laser-tupfeninterferometrie.

Country Status (5)

Country Link
US (1) US4832494A (de)
EP (1) EP0251501B1 (de)
JP (1) JPS62298707A (de)
DE (1) DE3771596D1 (de)
GB (2) GB8613635D0 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2309777B (en) * 1996-02-05 2000-09-06 Secretary Trade Ind Brit Interferometer
US6040900A (en) * 1996-07-01 2000-03-21 Cybernet Systems Corporation Compact fiber-optic electronic laser speckle pattern shearography
US6043870A (en) * 1996-07-01 2000-03-28 Cybernet Systems Corporation Compact fiber optic electronic laser speckle pattern interferometer
US6525821B1 (en) * 1997-06-11 2003-02-25 Ut-Battelle, L.L.C. Acquisition and replay systems for direct-to-digital holography and holovision
US6078392A (en) * 1997-06-11 2000-06-20 Lockheed Martin Energy Research Corp. Direct-to-digital holography and holovision
JP4531950B2 (ja) * 2000-08-25 2010-08-25 株式会社トプコン 眼科用測定装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1392448A (en) * 1971-06-22 1975-04-30 Nat Res Dev Optical indpection
GB1593284A (en) * 1977-03-15 1981-07-15 Nat Res Dev Optical inspection
US4387994A (en) * 1980-02-04 1983-06-14 Balasubramanian N Optical system for surface topography measurement
JPS5740603A (en) * 1980-08-22 1982-03-06 Rikagaku Kenkyusho Distortion measurement of object
US4428675A (en) * 1981-06-17 1984-01-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method of and apparatus for double-exposure holographic interferometry
JPS58225304A (ja) * 1982-06-25 1983-12-27 Yokogawa Hokushin Electric Corp 光学式機械量測定装置
DE3318678A1 (de) * 1983-05-21 1984-11-22 Adolf Friedrich Prof. Dr.-Phys. Fercher Verfahren und vorrichtung zur interferometrie rauher oberflaechen

Also Published As

Publication number Publication date
GB8712933D0 (en) 1987-07-08
EP0251501B1 (de) 1991-07-24
GB8613635D0 (en) 1986-07-09
GB2193409B (en) 1990-04-04
US4832494A (en) 1989-05-23
JPS62298707A (ja) 1987-12-25
EP0251501A3 (en) 1988-08-24
EP0251501A2 (de) 1988-01-07
GB2193409A (en) 1988-02-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BRITISH TECHNOLOGY GROUP LTD., LONDON, GB

8339 Ceased/non-payment of the annual fee