GB2309777B - Interferometer - Google Patents

Interferometer

Info

Publication number
GB2309777B
GB2309777B GB9602246A GB9602246A GB2309777B GB 2309777 B GB2309777 B GB 2309777B GB 9602246 A GB9602246 A GB 9602246A GB 9602246 A GB9602246 A GB 9602246A GB 2309777 B GB2309777 B GB 2309777B
Authority
GB
United Kingdom
Prior art keywords
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9602246A
Other versions
GB2309777A (en
GB9602246D0 (en
Inventor
Manohar Singh Virdee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Trade and Industry
Original Assignee
UK Secretary of State for Trade and Industry
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Trade and Industry filed Critical UK Secretary of State for Trade and Industry
Priority to GB9602246A priority Critical patent/GB2309777B/en
Publication of GB9602246D0 publication Critical patent/GB9602246D0/en
Priority to PCT/GB1997/000331 priority patent/WO1997029340A1/en
Publication of GB2309777A publication Critical patent/GB2309777A/en
Application granted granted Critical
Publication of GB2309777B publication Critical patent/GB2309777B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02052—Protecting, e.g. shock absorbing, arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB9602246A 1996-02-05 1996-02-05 Interferometer Expired - Fee Related GB2309777B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9602246A GB2309777B (en) 1996-02-05 1996-02-05 Interferometer
PCT/GB1997/000331 WO1997029340A1 (en) 1996-02-05 1997-02-05 Interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9602246A GB2309777B (en) 1996-02-05 1996-02-05 Interferometer

Publications (3)

Publication Number Publication Date
GB9602246D0 GB9602246D0 (en) 1996-04-03
GB2309777A GB2309777A (en) 1997-08-06
GB2309777B true GB2309777B (en) 2000-09-06

Family

ID=10788106

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9602246A Expired - Fee Related GB2309777B (en) 1996-02-05 1996-02-05 Interferometer

Country Status (2)

Country Link
GB (1) GB2309777B (en)
WO (1) WO1997029340A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2377754B (en) * 2001-06-09 2005-08-17 Anthony Gerald Booth Movement detection apparatus and method
US9195071B2 (en) * 2010-10-08 2015-11-24 The Aerospace Corporation Speckle jitter sensor
CN104049324B (en) * 2014-07-04 2016-01-20 中国工程物理研究院应用电子学研究所 A kind of high-power semiconductor laser fiber coupling system and Method of Adjustment thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1392448A (en) * 1971-06-22 1975-04-30 Nat Res Dev Optical indpection
EP0251501A2 (en) * 1986-06-05 1988-01-07 National Research Development Corporation Method for optical inspection involving laser speckle pattern interferometry
US5155363A (en) * 1989-09-13 1992-10-13 Hans Steinbichler Method for direct phase measurement of radiation, particularly light radiation, and apparatus for performing the method
WO1995033971A1 (en) * 1994-06-02 1995-12-14 Massachusetts Institute Of Technology Method and apparatus for acquiring images

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01127911A (en) * 1987-11-12 1989-05-19 Keyence Corp Speckle pattern interferometer
JPH01206205A (en) * 1988-02-12 1989-08-18 Keyence Corp Speckle pattern interferometer
IL100655A (en) * 1991-02-08 1994-11-28 Hughes Aircraft Co Interferometric laser profilometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1392448A (en) * 1971-06-22 1975-04-30 Nat Res Dev Optical indpection
EP0251501A2 (en) * 1986-06-05 1988-01-07 National Research Development Corporation Method for optical inspection involving laser speckle pattern interferometry
US5155363A (en) * 1989-09-13 1992-10-13 Hans Steinbichler Method for direct phase measurement of radiation, particularly light radiation, and apparatus for performing the method
WO1995033971A1 (en) * 1994-06-02 1995-12-14 Massachusetts Institute Of Technology Method and apparatus for acquiring images

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
J.KATO, I.YAMAGUCHI AND Q.PING APPLIED OPTICS VOL32 NO.1 77-83 (1993) *

Also Published As

Publication number Publication date
GB2309777A (en) 1997-08-06
WO1997029340A1 (en) 1997-08-14
GB9602246D0 (en) 1996-04-03

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20020205