GB9600205D0 - Interferometer - Google Patents

Interferometer

Info

Publication number
GB9600205D0
GB9600205D0 GBGB9600205.0A GB9600205A GB9600205D0 GB 9600205 D0 GB9600205 D0 GB 9600205D0 GB 9600205 A GB9600205 A GB 9600205A GB 9600205 D0 GB9600205 D0 GB 9600205D0
Authority
GB
United Kingdom
Prior art keywords
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9600205.0A
Other versions
GB2296766A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of GB9600205D0 publication Critical patent/GB9600205D0/en
Publication of GB2296766A publication Critical patent/GB2296766A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
GB9600205A 1995-01-05 1996-01-05 Laser interferometer with linear array of photodetector elements Withdrawn GB2296766A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9500110A GB9500110D0 (en) 1995-01-05 1995-01-05 Laser interferometer

Publications (2)

Publication Number Publication Date
GB9600205D0 true GB9600205D0 (en) 1996-03-06
GB2296766A GB2296766A (en) 1996-07-10

Family

ID=10767605

Family Applications (2)

Application Number Title Priority Date Filing Date
GB9500110A Pending GB9500110D0 (en) 1995-01-05 1995-01-05 Laser interferometer
GB9600205A Withdrawn GB2296766A (en) 1995-01-05 1996-01-05 Laser interferometer with linear array of photodetector elements

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB9500110A Pending GB9500110D0 (en) 1995-01-05 1995-01-05 Laser interferometer

Country Status (3)

Country Link
JP (1) JPH08233514A (en)
DE (1) DE19600297A1 (en)
GB (2) GB9500110D0 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5900938A (en) * 1996-11-08 1999-05-04 The Research Foundation Of State University Of New York Laser measurement system for rapid calibration of machine tools
US6934641B2 (en) 1999-11-24 2005-08-23 Renishaw Plc Motion detection and analysis
US7333214B2 (en) * 2006-03-31 2008-02-19 Mitutoyo Corporation Detector for interferometric distance measurement
GB2555646A (en) * 2016-11-03 2018-05-09 Mbda Uk Ltd Interferometric position sensor
CN109781034B (en) * 2019-01-22 2020-11-10 上海理工大学 Micro-roll angle and linearity synchronous high-precision measurement interferometer and measurement method
CN111380501B (en) * 2020-03-25 2021-03-26 华中科技大学 Real-time attitude angle measuring method and device based on birefringent crystal field effect

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8005258A (en) * 1980-09-22 1982-04-16 Philips Nv INTERFEROMETER.

Also Published As

Publication number Publication date
DE19600297A1 (en) 1996-07-11
GB9500110D0 (en) 1995-03-01
GB2296766A (en) 1996-07-10
JPH08233514A (en) 1996-09-13

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)