DE3688547D1 - "diffraktosight"-verfahren. - Google Patents

"diffraktosight"-verfahren.

Info

Publication number
DE3688547D1
DE3688547D1 DE8686903720T DE3688547T DE3688547D1 DE 3688547 D1 DE3688547 D1 DE 3688547D1 DE 8686903720 T DE8686903720 T DE 8686903720T DE 3688547 T DE3688547 T DE 3688547T DE 3688547 D1 DE3688547 D1 DE 3688547D1
Authority
DE
Germany
Prior art keywords
defects
spots
reflected
sensing
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686903720T
Other languages
English (en)
Other versions
DE3688547T2 (de
Inventor
Donald A Clarke
Rodger L Reynolds
Timothy R Pryor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diffracto Ltd Canada
Original Assignee
Diffracto Ltd Canada
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diffracto Ltd Canada filed Critical Diffracto Ltd Canada
Publication of DE3688547D1 publication Critical patent/DE3688547D1/de
Application granted granted Critical
Publication of DE3688547T2 publication Critical patent/DE3688547T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/661—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/38—Investigating fluid-tightness of structures by using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N2021/416—Visualising flow by index measurement

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Steroid Compounds (AREA)
  • Saccharide Compounds (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE8686903720T 1985-03-14 1986-03-14 "diffraktosight"-verfahren. Expired - Lifetime DE3688547T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US71164685A 1985-03-14 1985-03-14
PCT/US1986/000519 WO1986005588A1 (en) 1985-03-14 1986-03-14 Diffractosight improvements

Publications (2)

Publication Number Publication Date
DE3688547D1 true DE3688547D1 (de) 1993-07-15
DE3688547T2 DE3688547T2 (de) 1993-09-23

Family

ID=24858938

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686903720T Expired - Lifetime DE3688547T2 (de) 1985-03-14 1986-03-14 "diffraktosight"-verfahren.

Country Status (6)

Country Link
EP (1) EP0216923B1 (de)
JP (1) JPH0765972B2 (de)
AT (1) ATE90455T1 (de)
CA (1) CA1273224A (de)
DE (1) DE3688547T2 (de)
WO (1) WO1986005588A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3838954A1 (de) * 1988-11-17 1990-05-23 Siemens Ag Optikanordnung zur dreidimensionalen formerfassung
EP0455857A1 (de) * 1990-05-11 1991-11-13 Diffracto Limited Verbesserte Verfahren und Vorrichtung zur retroreflektiven Oberflächeninspektion und Verzerrungsmessung
DE4015476C2 (de) * 1990-05-14 1995-07-27 Siemens Ag Anordnung zur dreidimensionalen optischen Formerfassung
US5844801A (en) * 1994-12-08 1998-12-01 Honda Giken Kogyo Kabushiki Kaisha Method of inspecting and manufacturing vehicle body
GB2446865A (en) * 2007-02-21 2008-08-27 Dean William Dredge Temporary coating for revealing surface imperfections
JP4820971B2 (ja) * 2008-03-08 2011-11-24 関東自動車工業株式会社 表面検査方法
SG157977A1 (en) * 2008-06-23 2010-01-29 Semiconductor Tech & Instr Inc System and method for inspection of semiconductor packages
JP5510398B2 (ja) * 2011-06-17 2014-06-04 株式会社デンソー 溶接部検査装置
JP2016112947A (ja) * 2014-12-12 2016-06-23 三菱航空機株式会社 航空機の外観検査方法およびシステム
JP6101746B2 (ja) * 2015-06-25 2017-03-22 株式会社Ｓｃｒｅｅｎホールディングス 試料保持プレート、撮像装置および撮像方法
EP3301431B1 (de) 2016-09-29 2019-08-28 Roche Diagniostics GmbH Mehrkammer-analysevorrichtung und verfahren zur analyse
CN109540903A (zh) * 2018-11-28 2019-03-29 合肥常青机械股份有限公司 基于模式识别的自动化生产过程质量智能诊断方法
WO2021230245A1 (ja) * 2020-05-11 2021-11-18 旭化成株式会社 蓄電デバイス用セパレータの製造方法
US12023722B2 (en) * 2020-10-23 2024-07-02 Ford Global Technologies, Llc Stamping line defect quality monitoring systems and methods of monitoring stamping line defects
CN117491391B (zh) * 2023-12-29 2024-03-15 登景(天津)科技有限公司 基于芯片计算的玻璃基板光三维健康检测方法及设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3734626A (en) * 1972-01-14 1973-05-22 Control Data Corp Light apparatus for testing surfaces
US4207467A (en) * 1978-09-05 1980-06-10 Laser Precision Corp. Film measuring apparatus and method
DE2929846A1 (de) * 1979-07-23 1981-03-12 Siemens AG, 1000 Berlin und 8000 München Opto-elektronisches pruefsystem zur automatischen beschaffenheitspruefung von leiterplatten, deren zwischenprodukte und druckwerkzeuge
US4389669A (en) * 1981-02-27 1983-06-21 Ilc Data Device Corporation Opto-video inspection system
DE3335130A1 (de) * 1983-09-28 1985-04-11 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur pruefung der oberflaeche von werkstuecken und anwendung der vorrichtung
JPH061249A (ja) * 1992-06-18 1994-01-11 Nippon Sharyo Seizo Kaisha Ltd 位置センサおよび該センサを用いた電磁誘導式無人車

Also Published As

Publication number Publication date
EP0216923A1 (de) 1987-04-08
WO1986005588A1 (en) 1986-09-25
JPS62502358A (ja) 1987-09-10
EP0216923A4 (de) 1990-04-17
ATE90455T1 (de) 1993-06-15
JPH0765972B2 (ja) 1995-07-19
EP0216923B1 (de) 1993-06-09
CA1273224A (en) 1990-08-28
DE3688547T2 (de) 1993-09-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition