DE3686895T2 - Vorrichtung fuer feinverstellung. - Google Patents

Vorrichtung fuer feinverstellung.

Info

Publication number
DE3686895T2
DE3686895T2 DE8686200383T DE3686895T DE3686895T2 DE 3686895 T2 DE3686895 T2 DE 3686895T2 DE 8686200383 T DE8686200383 T DE 8686200383T DE 3686895 T DE3686895 T DE 3686895T DE 3686895 T2 DE3686895 T2 DE 3686895T2
Authority
DE
Germany
Prior art keywords
fine adjustment
fine
adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686200383T
Other languages
English (en)
Other versions
DE3686895T3 (de
DE3686895D1 (de
Inventor
Yotaro Hatamura
Kozo Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26386549&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3686895(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP60046443A external-priority patent/JPS61209846A/ja
Priority claimed from JP60083605A external-priority patent/JPH07109566B2/ja
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Publication of DE3686895D1 publication Critical patent/DE3686895D1/de
Application granted granted Critical
Publication of DE3686895T2 publication Critical patent/DE3686895T2/de
Publication of DE3686895T3 publication Critical patent/DE3686895T3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0208—Compliance devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B25J9/0015—Flexure members, i.e. parts of manipulators having a narrowed section allowing articulation by flexion
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Control Of Position Or Direction (AREA)
DE3686895T 1985-03-11 1986-03-10 Vorrichtung für Feinverstellung. Expired - Fee Related DE3686895T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60046443A JPS61209846A (ja) 1985-03-11 1985-03-11 微細位置決め装置
JP60083605A JPH07109566B2 (ja) 1985-04-20 1985-04-20 微細位置決め装置

Publications (3)

Publication Number Publication Date
DE3686895D1 DE3686895D1 (de) 1992-11-12
DE3686895T2 true DE3686895T2 (de) 1993-05-06
DE3686895T3 DE3686895T3 (de) 2000-10-05

Family

ID=26386549

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3686895T Expired - Fee Related DE3686895T3 (de) 1985-03-11 1986-03-10 Vorrichtung für Feinverstellung.

Country Status (3)

Country Link
US (1) US4686440A (de)
EP (1) EP0195479B2 (de)
DE (1) DE3686895T3 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016212407A1 (de) * 2016-07-07 2018-01-11 Kuka Systems Gmbh Sensorplatte zur Befestigung an einem Manipulator

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CA1276710C (en) * 1983-11-30 1990-11-20 Kazuo Asakawa Robot force controlling system
EP0264147B1 (de) * 1986-09-09 1994-01-12 Hitachi Construction Machinery Co., Ltd. Vorrichtung zur Feinverstellung und Vorrichtung zum Steuern dieser Verstellungen
DE3632403A1 (de) * 1986-09-24 1988-04-07 Heidelberg Instr Gmbh Verstelleinrichtung
US4798989A (en) * 1986-09-26 1989-01-17 Research Development Corporation Scanning tunneling microscope installed in electron microscope
DE3632964A1 (de) * 1986-09-27 1988-04-07 Physik Instr Pi Gmbh & Co Prod Piezoelektrisches stellglied
JPH0648910B2 (ja) * 1987-02-12 1994-06-22 日本電気株式会社 圧電モ−タ
JPS63299785A (ja) * 1987-05-29 1988-12-07 Res Dev Corp Of Japan 圧電・電歪素子を用いた衝撃力による微小移動装置
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JP2577423B2 (ja) * 1988-02-29 1997-01-29 工業技術院長 大ストローク走査型トンネル顕微鏡
US5049775A (en) * 1988-09-30 1991-09-17 Boston University Integrated micromechanical piezoelectric motor
US4884003A (en) * 1988-12-28 1989-11-28 Wyko Corporation Compact micromotion translator
JP2839543B2 (ja) * 1989-04-12 1998-12-16 株式会社東芝 変位発生装置
JP2977203B2 (ja) * 1989-04-19 1999-11-15 株式会社東芝 研磨装置
EP0407184A3 (en) * 1989-07-06 1991-08-21 Brother Kogyo Kabushiki Kaisha Parallel link mechanism
JPH04235302A (ja) * 1991-01-11 1992-08-24 Jeol Ltd トンネル顕微鏡の探針微動機構
US5355712A (en) * 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
US5281884A (en) * 1992-06-03 1994-01-25 At&T Bell Laboratories Adjustable X-Y stage
US6359370B1 (en) * 1995-02-28 2002-03-19 New Jersey Institute Of Technology Piezoelectric multiple degree of freedom actuator
US5705878A (en) * 1995-11-29 1998-01-06 Lewis; Aaron Flat scanning stage for scanned probe microscopy
US6362542B1 (en) * 1997-08-15 2002-03-26 Seagate Technology Llc Piezoelectric microactuator for precise head positioning
US6557436B1 (en) * 1999-09-10 2003-05-06 The Regents Of The University Of Michigan Displacement amplification structure and device
DE19962247A1 (de) * 1999-12-22 2001-09-20 Agie Sa Bewegungsübertragungsvorrichtung
US6911764B2 (en) * 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
DE10029306C2 (de) * 2000-06-14 2003-07-31 Physik Instr Pi Gmbh & Co Anordnung zur temperaturkompensierten, mehrdimensionalen Mikropositionierung von zueinander lagedefinierten optischen Komponenten
US6606444B2 (en) 2000-09-28 2003-08-12 Murray R. Harman Positioning device especially for assembling optical components
GB2369489B (en) * 2000-11-23 2004-03-10 Khaled Karrai Inertial rotation device
US6624548B1 (en) * 2001-09-26 2003-09-23 Sandia Corporation Apparatus to position a microelectromechanical platform
US6798120B1 (en) * 2001-10-31 2004-09-28 The Regents Of The University Of California Apparatus and method for manipulation of an object
US6836968B1 (en) * 2003-06-25 2005-01-04 Itt Manufacturing Enterprises, Inc. Precision frictionless flexure based linear translation mechanism insensitive to thermal and vibrational environments
EP1493530A1 (de) * 2003-07-04 2005-01-05 HESS, Peter Werkzeugkopf mit piezoelektrischen Aktuatoren
US7275332B2 (en) * 2005-02-22 2007-10-02 Carestream Health, Inc. Multi-axis positioning apparatus
WO2006098010A1 (ja) * 2005-03-16 2006-09-21 Hirata Corporation 精密位置決め装置
JP2007228782A (ja) * 2006-01-24 2007-09-06 Ngk Insulators Ltd 圧電／電歪デバイス
WO2008126247A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
US8022597B2 (en) * 2007-03-30 2011-09-20 Pioneer Corporation Driver
WO2008126233A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
EP2174360A4 (de) 2007-06-29 2013-12-11 Artificial Muscle Inc Wandler mit elektroaktivem polymer für anwendungen der sensorischen rückmeldung
JP5197101B2 (ja) * 2008-03-31 2013-05-15 日本トムソン株式会社 可動テーブル装置
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
KR101678065B1 (ko) * 2010-12-09 2016-12-07 삼성전자 주식회사 위치 정렬 장치 및 이의 조인트 모듈
WO2012118916A2 (en) 2011-03-01 2012-09-07 Bayer Materialscience Ag Automated manufacturing processes for producing deformable polymer devices and films
WO2012129357A2 (en) 2011-03-22 2012-09-27 Bayer Materialscience Ag Electroactive polymer actuator lenticular system
US9638493B2 (en) 2011-11-26 2017-05-02 Orval E. Bowman Pointing devices, apparatus, systems and methods for high shock environments
US8826582B2 (en) 2011-11-26 2014-09-09 Orval E. Bowman Pointing devices, apparatus, systems and methods for high shock environments
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
DE102012102566B4 (de) * 2012-03-26 2019-02-21 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Übertragungselement für eine Stellbewegung eines optischen Elementes, Positioniereinrichtung sowie Bearbeitungskopf für eine Laserbearbeitungsmaschine
US9370865B1 (en) * 2012-05-23 2016-06-21 Western Digital Technologies, Inc. Flexure based compliance device for use with an assembly device
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
WO2014066576A1 (en) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Polymer diode
US9404823B1 (en) * 2013-10-05 2016-08-02 Bertec Limited Load transducer and force measurement assembly using the same
US11262258B2 (en) 2013-10-05 2022-03-01 Bertec Limited Force measurement system
US10126186B2 (en) 2013-10-05 2018-11-13 Bertec Limited Load transducer system configured to correct for measurement errors in the output forces and/or moments of the system
US10527508B2 (en) 2013-10-05 2020-01-07 Bertec Limited Force measurement system and a method of calibrating the same
US11054325B2 (en) 2013-10-05 2021-07-06 Bertec Limited Force measurement system
US9778119B2 (en) 2013-10-05 2017-10-03 Bertec Limited Load transducer and force measurement assembly using the same
US11604106B2 (en) 2013-10-05 2023-03-14 Bertec Limited Force measurement assembly
US10765936B2 (en) 2013-10-05 2020-09-08 Bertec Limited Force measurement system
DE102017200866B4 (de) 2017-01-19 2019-01-24 Deutsches Zentrum für Luft- und Raumfahrt e.V. Kontinuumsgelenk
US11850078B1 (en) 2020-01-04 2023-12-26 Bertec Corporation Force measurement system
CN114992453B (zh) * 2022-06-07 2024-02-27 重庆大学 一种具有高负载、大行程的可控平面高精度柔性位移平台

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JPS5837114B2 (ja) * 1972-01-19 1983-08-13 キヤノン株式会社 デンキシキマニピユレ−タ
US4019109A (en) * 1974-05-13 1977-04-19 Hughes Aircraft Company Alignment system and method with micromovement stage
JPS51123565A (en) * 1975-04-21 1976-10-28 Nippon Telegr & Teleph Corp <Ntt> Three-dimention-position differential adjustment of processing article
US4157818A (en) * 1977-12-01 1979-06-12 Motorola, Inc. X-Y Movable work holder
US4485562A (en) * 1981-04-20 1984-12-04 The Charles Stark Draper Laboratory, Inc. Variable stiffness compliance device
JPS5964240A (ja) * 1982-09-30 1984-04-12 Fujitsu Ltd ばね支持ステ−ジ
EP0134268B1 (de) * 1983-08-09 1987-11-19 Siemens Aktiengesellschaft Justier- oder Positioniertisch und Verfahren zu dessen Herstellung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016212407A1 (de) * 2016-07-07 2018-01-11 Kuka Systems Gmbh Sensorplatte zur Befestigung an einem Manipulator

Also Published As

Publication number Publication date
DE3686895T3 (de) 2000-10-05
EP0195479A2 (de) 1986-09-24
DE3686895D1 (de) 1992-11-12
EP0195479B2 (de) 2000-02-23
EP0195479B1 (de) 1992-10-07
EP0195479A3 (en) 1988-03-16
US4686440A (en) 1987-08-11

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee