DE3674150D1 - Koaxialer messfuehler. - Google Patents
Koaxialer messfuehler.Info
- Publication number
- DE3674150D1 DE3674150D1 DE8686113230T DE3674150T DE3674150D1 DE 3674150 D1 DE3674150 D1 DE 3674150D1 DE 8686113230 T DE8686113230 T DE 8686113230T DE 3674150 T DE3674150 T DE 3674150T DE 3674150 D1 DE3674150 D1 DE 3674150D1
- Authority
- DE
- Germany
- Prior art keywords
- coaxial probe
- coaxial
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/792,335 US4764722A (en) | 1985-10-28 | 1985-10-28 | Coaxial probe |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3674150D1 true DE3674150D1 (de) | 1990-10-18 |
Family
ID=25156543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686113230T Expired - Fee Related DE3674150D1 (de) | 1985-10-28 | 1986-09-26 | Koaxialer messfuehler. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4764722A (de) |
EP (1) | EP0222119B1 (de) |
JP (1) | JPS6337261A (de) |
DE (1) | DE3674150D1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5917707A (en) * | 1993-11-16 | 1999-06-29 | Formfactor, Inc. | Flexible contact structure with an electrically conductive shell |
JPH01171367U (de) * | 1988-05-24 | 1989-12-05 | ||
JPH0527811Y2 (de) * | 1989-04-26 | 1993-07-15 | ||
US5517124A (en) * | 1989-07-26 | 1996-05-14 | Extrude Hone Corporation | Stylus probe for measuring workpiece surface characteristics |
US5189377A (en) * | 1990-09-04 | 1993-02-23 | Extrude Hone Corporation | Method and apparatus for co-ordinate measuring using a capacitance probe |
US5136237A (en) * | 1991-01-29 | 1992-08-04 | Tektronix, Inc. | Double insulated floating high voltage test probe |
US5175493A (en) * | 1991-10-11 | 1992-12-29 | Interconnect Devices, Inc. | Shielded electrical contact spring probe assembly |
US5512838A (en) * | 1992-09-03 | 1996-04-30 | Hewlett-Packard Company | Probe with reduced input capacitance |
US5367254A (en) * | 1993-02-01 | 1994-11-22 | International Business Machines Corporation | Test probe assembly using buckling wire probes within tubes having opposed overlapping slots |
US7084656B1 (en) * | 1993-11-16 | 2006-08-01 | Formfactor, Inc. | Probe for semiconductor devices |
US7200930B2 (en) * | 1994-11-15 | 2007-04-10 | Formfactor, Inc. | Probe for semiconductor devices |
EP0685742B1 (de) * | 1994-06-01 | 2001-01-03 | International Business Machines Corporation | Schnelles Koaxialkontakt- und Signalübertragungselement |
US6414504B2 (en) * | 1999-05-20 | 2002-07-02 | Delaware Capital Formation, Inc. | Coaxial tilt pin fixture for testing high frequency circuit boards |
US6384614B1 (en) * | 2000-02-05 | 2002-05-07 | Fluke Corporation | Single tip Kelvin probe |
US20050162177A1 (en) * | 2004-01-28 | 2005-07-28 | Chou Arlen L. | Multi-signal single beam probe |
FR2885446B1 (fr) * | 2005-05-09 | 2007-07-20 | St Microelectronics Sa | Sonde coaxiale, son procede de fabrication et dispositif de mesure en champ proche electromagnetique sur des systemes a distance submicrometrique |
US8174276B2 (en) * | 2008-05-22 | 2012-05-08 | Texas Instruments Incorporated | Coaxial four-point probe for low resistance measurements |
EP2144338A1 (de) | 2008-07-11 | 2010-01-13 | Tyco Electronics Nederland B.V. | Koaxialsonde |
EP2180326B1 (de) | 2008-10-24 | 2017-05-03 | Tyco Electronics Services GmbH | Testsonde |
TW201038953A (en) * | 2009-04-21 | 2010-11-01 | Inventec Appliances Corp | Portable system with measuring function and measuring method thereof |
CN102004173B (zh) * | 2009-09-01 | 2014-02-19 | 鸿富锦精密工业(深圳)有限公司 | 探针 |
JP2012083234A (ja) * | 2010-10-13 | 2012-04-26 | Hioki Ee Corp | プローブおよび測定装置 |
USRE46958E1 (en) | 2011-10-24 | 2018-07-17 | Ardent Concepts, Inc. | Controlled-impedance cable termination using compliant interconnect elements |
CN104025393B (zh) | 2011-10-24 | 2016-10-12 | 安达概念股份有限公司 | 使用兼容的互连元件的控制阻抗电缆终端 |
USRE47459E1 (en) | 2011-10-24 | 2019-06-25 | Ardent Concepts, Inc. | Controlled-impedance cable termination using compliant interconnect elements |
JP6118710B2 (ja) * | 2013-10-30 | 2017-04-19 | 日本電子材料株式会社 | プローブカード |
TWI577993B (zh) * | 2015-08-27 | 2017-04-11 | 旺矽科技股份有限公司 | 探針裝置及其同軸探針 |
JP7040641B2 (ja) | 2018-11-19 | 2022-03-23 | 株式会社村田製作所 | プローブ |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2617853A (en) * | 1949-01-07 | 1952-11-11 | Bell Telephone Labor Inc | Method of and system for measuring impedance mismatch |
US3562643A (en) * | 1969-01-21 | 1971-02-09 | Ostby & Barton Co | Spring loaded test probe assembly |
US3731191A (en) * | 1969-12-22 | 1973-05-01 | Ibm | Micro-miniature probe assembly |
SU481546A1 (ru) * | 1972-09-04 | 1975-08-25 | Предприятие П/Я Х-5737 | Зондовое устройство |
US3806801A (en) * | 1972-12-26 | 1974-04-23 | Ibm | Probe contactor having buckling beam probes |
JPS5363582A (en) * | 1976-11-18 | 1978-06-07 | Mitsubishi Electric Corp | Proximity detector |
US4133715A (en) * | 1977-03-29 | 1979-01-09 | Beloit Corporation | Headbox and holders for floating slice chamber dividers |
FR2477324A1 (fr) * | 1980-02-28 | 1981-09-04 | Dassault Electronique | Dispositif de contact electrique pour appareil de traitement de cartes electroniques |
DE3142817A1 (de) * | 1980-10-30 | 1982-07-08 | Everett/Charles, Inc., 91730 Rancho Cucamonga, Calif. | Uebertragungseinrichtung, test-spannvorrichtung mit uebertragungseinrichtung und verfahren zur bildung einer uebertragungseinrichtung |
US4423373A (en) * | 1981-03-16 | 1983-12-27 | Lecroy Research Systems Corporation | Test probe |
-
1985
- 1985-10-28 US US06/792,335 patent/US4764722A/en not_active Expired - Fee Related
-
1986
- 1986-07-29 JP JP61176863A patent/JPS6337261A/ja active Pending
- 1986-09-26 EP EP86113230A patent/EP0222119B1/de not_active Expired
- 1986-09-26 DE DE8686113230T patent/DE3674150D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPS6337261A (ja) | 1988-02-17 |
EP0222119B1 (de) | 1990-09-12 |
EP0222119A1 (de) | 1987-05-20 |
US4764722A (en) | 1988-08-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |