DE3668473D1 - Verfahren zur behandlung von oberflaechen und apparatur dafuer. - Google Patents
Verfahren zur behandlung von oberflaechen und apparatur dafuer.Info
- Publication number
- DE3668473D1 DE3668473D1 DE8686904377T DE3668473T DE3668473D1 DE 3668473 D1 DE3668473 D1 DE 3668473D1 DE 8686904377 T DE8686904377 T DE 8686904377T DE 3668473 T DE3668473 T DE 3668473T DE 3668473 D1 DE3668473 D1 DE 3668473D1
- Authority
- DE
- Germany
- Prior art keywords
- apparatus therefor
- treating surfaces
- treating
- therefor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/05—Fluidized bed
Landscapes
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Electrochemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60220925A JPS6280258A (ja) | 1985-10-03 | 1985-10-03 | 表面処理方法及びその装置 |
PCT/JP1986/000360 WO1987002073A1 (en) | 1985-10-03 | 1986-07-14 | Surface treating method and apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3668473D1 true DE3668473D1 (de) | 1990-03-01 |
Family
ID=16758699
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686904377T Expired - Lifetime DE3668473D1 (de) | 1985-10-03 | 1986-07-14 | Verfahren zur behandlung von oberflaechen und apparatur dafuer. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4786526A (de) |
EP (1) | EP0238666B1 (de) |
JP (1) | JPS6280258A (de) |
AU (1) | AU587848B2 (de) |
CA (1) | CA1268103A (de) |
DE (1) | DE3668473D1 (de) |
WO (1) | WO1987002073A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4957780A (en) * | 1987-01-20 | 1990-09-18 | Gte Laboratories Incorporated | Internal reactor method for chemical vapor deposition |
JPS6447844A (en) * | 1987-08-12 | 1989-02-22 | Toyota Central Res & Dev | Method and apparatus for treating surface |
KR930007148B1 (ko) * | 1990-03-27 | 1993-07-30 | 마쓰다 가부시끼가이샤 | 열 처리장치 |
US5171734A (en) * | 1991-04-22 | 1992-12-15 | Sri International | Coating a substrate in a fluidized bed maintained at a temperature below the vaporization temperature of the resulting coating composition |
JP3189507B2 (ja) * | 1992-06-30 | 2001-07-16 | 株式会社豊田中央研究所 | 表面処理装置 |
US5328720A (en) * | 1992-10-23 | 1994-07-12 | Carbon Implants, Inc. | Coating-fluidizing gas supply system and method for flat bottom coater |
FI95061C (fi) * | 1993-03-08 | 1995-12-11 | Valmet Paper Machinery Inc | Menetelmä paperiradan kalanteroinnissa ja menetelmää soveltava kalanteri |
CN1047807C (zh) * | 1993-06-01 | 1999-12-29 | 高级陶瓷有限公司 | 形成金属碳化物层的流化床反应器装置 |
AU2001271469A1 (en) | 2000-06-29 | 2002-01-14 | Borg Warner, Inc. | Carbide coated steel articles and method of making them |
AU2006272371B2 (en) * | 2005-07-21 | 2010-11-25 | Hard Technologies Pty Ltd | Duplex surface treatment of metal objects |
EP1904661A4 (de) * | 2005-07-21 | 2010-12-29 | Hard Technologies Pty Ltd | Duplexoberflächenbehandlung von metallgegenständen |
JP3979502B1 (ja) * | 2006-05-22 | 2007-09-19 | 挺正 周 | 金属部材の窒化・酸化処理及び再酸化処理方法 |
CN102165087B (zh) * | 2008-10-16 | 2013-11-27 | 博格华纳公司 | 第5族金属源碳化物涂覆的钢质物品及其制造方法 |
DE102021121849A1 (de) | 2021-08-24 | 2023-03-02 | Schaeffler Technologies AG & Co. KG | Bauteil und Verfahren zur Herstellung eines Bauteils |
CN114182195B (zh) * | 2021-11-27 | 2023-11-10 | 上海春玉金属热处理有限公司 | 一种促进金属表面氮化性能的热处理设备及热处理方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE323501C (de) * | 1919-07-15 | 1920-07-27 | Heinrich Cranz | Rechtwinklig abbiegendes Reflektorprisma ohne Bildumkehr mit vier totalreflektierenden Flaechen |
GB897559A (en) * | 1959-10-02 | 1962-05-30 | Metallic Surfaces Res Lab Ltd | Diffusion process for metals |
US3409459A (en) * | 1965-03-10 | 1968-11-05 | Du Pont | Fluidized bed coating of titaniumchromium alloy |
US3475233A (en) * | 1965-10-07 | 1969-10-28 | Du Pont | Chromium-containing silicide coatings on refractory-metal-base articles |
AT316160B (de) * | 1972-03-10 | 1974-06-25 | Plansee Metallwerk | Verfahren zur Herstellung von verschleißfesten Überzügen auf Verschleißteilen aller Art |
FR2181512A2 (en) * | 1972-04-26 | 1973-12-07 | Snecma | Titanium carbide/nitride/carbonitride coating - of uniform and variable compsn |
GB1549845A (en) * | 1975-04-04 | 1979-08-08 | Secr Defence | Diffusion coating of metal or other articles |
US4461656A (en) * | 1983-03-15 | 1984-07-24 | Ross John A | Low temperature hardening of the surface of a ferrous metal workpiece in a fluidized bed furnace |
JPS59190355A (ja) * | 1983-04-08 | 1984-10-29 | Toyota Central Res & Dev Lab Inc | 鉄合金材料の表面硬化処理方法 |
US4585673A (en) * | 1984-05-07 | 1986-04-29 | Gte Laboratories Incorporated | Method for coating phosphor particles |
AU570799B2 (en) * | 1984-05-17 | 1988-03-24 | Toyota Chuo Kenkyusho K.K. | Vapour phase coating of carbide in fluidised bed |
JPS60251274A (ja) * | 1984-05-28 | 1985-12-11 | Toyota Central Res & Dev Lab Inc | 窒化物被覆方法 |
-
1985
- 1985-10-03 JP JP60220925A patent/JPS6280258A/ja active Granted
-
1986
- 1986-07-14 AU AU61338/86A patent/AU587848B2/en not_active Ceased
- 1986-07-14 WO PCT/JP1986/000360 patent/WO1987002073A1/en active IP Right Grant
- 1986-07-14 EP EP86904377A patent/EP0238666B1/de not_active Expired - Lifetime
- 1986-07-14 US US07/066,483 patent/US4786526A/en not_active Expired - Fee Related
- 1986-07-14 DE DE8686904377T patent/DE3668473D1/de not_active Expired - Lifetime
- 1986-10-01 CA CA000519490A patent/CA1268103A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA1268103A (en) | 1990-04-24 |
AU587848B2 (en) | 1989-08-31 |
JPS6280258A (ja) | 1987-04-13 |
EP0238666B1 (de) | 1990-01-24 |
AU6133886A (en) | 1987-04-24 |
US4786526A (en) | 1988-11-22 |
WO1987002073A1 (en) | 1987-04-09 |
EP0238666A1 (de) | 1987-09-30 |
JPS6245304B2 (de) | 1987-09-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |