DE3668473D1 - Verfahren zur behandlung von oberflaechen und apparatur dafuer. - Google Patents

Verfahren zur behandlung von oberflaechen und apparatur dafuer.

Info

Publication number
DE3668473D1
DE3668473D1 DE8686904377T DE3668473T DE3668473D1 DE 3668473 D1 DE3668473 D1 DE 3668473D1 DE 8686904377 T DE8686904377 T DE 8686904377T DE 3668473 T DE3668473 T DE 3668473T DE 3668473 D1 DE3668473 D1 DE 3668473D1
Authority
DE
Germany
Prior art keywords
apparatus therefor
treating surfaces
treating
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686904377T
Other languages
English (en)
Inventor
Tohru Arai
Junji Endo
Hiromasa Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Application granted granted Critical
Publication of DE3668473D1 publication Critical patent/DE3668473D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/05—Fluidized bed

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
DE8686904377T 1985-10-03 1986-07-14 Verfahren zur behandlung von oberflaechen und apparatur dafuer. Expired - Lifetime DE3668473D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60220925A JPS6280258A (ja) 1985-10-03 1985-10-03 表面処理方法及びその装置
PCT/JP1986/000360 WO1987002073A1 (en) 1985-10-03 1986-07-14 Surface treating method and apparatus

Publications (1)

Publication Number Publication Date
DE3668473D1 true DE3668473D1 (de) 1990-03-01

Family

ID=16758699

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686904377T Expired - Lifetime DE3668473D1 (de) 1985-10-03 1986-07-14 Verfahren zur behandlung von oberflaechen und apparatur dafuer.

Country Status (7)

Country Link
US (1) US4786526A (de)
EP (1) EP0238666B1 (de)
JP (1) JPS6280258A (de)
AU (1) AU587848B2 (de)
CA (1) CA1268103A (de)
DE (1) DE3668473D1 (de)
WO (1) WO1987002073A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957780A (en) * 1987-01-20 1990-09-18 Gte Laboratories Incorporated Internal reactor method for chemical vapor deposition
JPS6447844A (en) * 1987-08-12 1989-02-22 Toyota Central Res & Dev Method and apparatus for treating surface
KR930007148B1 (ko) * 1990-03-27 1993-07-30 마쓰다 가부시끼가이샤 열 처리장치
US5171734A (en) * 1991-04-22 1992-12-15 Sri International Coating a substrate in a fluidized bed maintained at a temperature below the vaporization temperature of the resulting coating composition
JP3189507B2 (ja) * 1992-06-30 2001-07-16 株式会社豊田中央研究所 表面処理装置
US5328720A (en) * 1992-10-23 1994-07-12 Carbon Implants, Inc. Coating-fluidizing gas supply system and method for flat bottom coater
FI95061C (fi) * 1993-03-08 1995-12-11 Valmet Paper Machinery Inc Menetelmä paperiradan kalanteroinnissa ja menetelmää soveltava kalanteri
CN1047807C (zh) * 1993-06-01 1999-12-29 高级陶瓷有限公司 形成金属碳化物层的流化床反应器装置
AU2001271469A1 (en) 2000-06-29 2002-01-14 Borg Warner, Inc. Carbide coated steel articles and method of making them
AU2006272371B2 (en) * 2005-07-21 2010-11-25 Hard Technologies Pty Ltd Duplex surface treatment of metal objects
EP1904661A4 (de) * 2005-07-21 2010-12-29 Hard Technologies Pty Ltd Duplexoberflächenbehandlung von metallgegenständen
JP3979502B1 (ja) * 2006-05-22 2007-09-19 挺正 周 金属部材の窒化・酸化処理及び再酸化処理方法
CN102165087B (zh) * 2008-10-16 2013-11-27 博格华纳公司 第5族金属源碳化物涂覆的钢质物品及其制造方法
DE102021121849A1 (de) 2021-08-24 2023-03-02 Schaeffler Technologies AG & Co. KG Bauteil und Verfahren zur Herstellung eines Bauteils
CN114182195B (zh) * 2021-11-27 2023-11-10 上海春玉金属热处理有限公司 一种促进金属表面氮化性能的热处理设备及热处理方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE323501C (de) * 1919-07-15 1920-07-27 Heinrich Cranz Rechtwinklig abbiegendes Reflektorprisma ohne Bildumkehr mit vier totalreflektierenden Flaechen
GB897559A (en) * 1959-10-02 1962-05-30 Metallic Surfaces Res Lab Ltd Diffusion process for metals
US3409459A (en) * 1965-03-10 1968-11-05 Du Pont Fluidized bed coating of titaniumchromium alloy
US3475233A (en) * 1965-10-07 1969-10-28 Du Pont Chromium-containing silicide coatings on refractory-metal-base articles
AT316160B (de) * 1972-03-10 1974-06-25 Plansee Metallwerk Verfahren zur Herstellung von verschleißfesten Überzügen auf Verschleißteilen aller Art
FR2181512A2 (en) * 1972-04-26 1973-12-07 Snecma Titanium carbide/nitride/carbonitride coating - of uniform and variable compsn
GB1549845A (en) * 1975-04-04 1979-08-08 Secr Defence Diffusion coating of metal or other articles
US4461656A (en) * 1983-03-15 1984-07-24 Ross John A Low temperature hardening of the surface of a ferrous metal workpiece in a fluidized bed furnace
JPS59190355A (ja) * 1983-04-08 1984-10-29 Toyota Central Res & Dev Lab Inc 鉄合金材料の表面硬化処理方法
US4585673A (en) * 1984-05-07 1986-04-29 Gte Laboratories Incorporated Method for coating phosphor particles
AU570799B2 (en) * 1984-05-17 1988-03-24 Toyota Chuo Kenkyusho K.K. Vapour phase coating of carbide in fluidised bed
JPS60251274A (ja) * 1984-05-28 1985-12-11 Toyota Central Res & Dev Lab Inc 窒化物被覆方法

Also Published As

Publication number Publication date
CA1268103A (en) 1990-04-24
AU587848B2 (en) 1989-08-31
JPS6280258A (ja) 1987-04-13
EP0238666B1 (de) 1990-01-24
AU6133886A (en) 1987-04-24
US4786526A (en) 1988-11-22
WO1987002073A1 (en) 1987-04-09
EP0238666A1 (de) 1987-09-30
JPS6245304B2 (de) 1987-09-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN

8339 Ceased/non-payment of the annual fee