DE3625327C1 - Lichtelektrische Positionsmesseinrichtung - Google Patents

Lichtelektrische Positionsmesseinrichtung

Info

Publication number
DE3625327C1
DE3625327C1 DE3625327A DE3625327A DE3625327C1 DE 3625327 C1 DE3625327 C1 DE 3625327C1 DE 3625327 A DE3625327 A DE 3625327A DE 3625327 A DE3625327 A DE 3625327A DE 3625327 C1 DE3625327 C1 DE 3625327C1
Authority
DE
Germany
Prior art keywords
coupler
measuring device
tbj
position measuring
photoelectric position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3625327A
Other languages
German (de)
English (en)
Inventor
Olivier Parriaux
Francois Cochet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE3625327A priority Critical patent/DE3625327C1/de
Priority to DE3705653A priority patent/DE3705653C1/de
Priority to EP87106621A priority patent/EP0254823B1/de
Priority to DE8787106621T priority patent/DE3762455D1/de
Priority to AT87106621T priority patent/ATE52328T1/de
Priority to ES87106621T priority patent/ES2015555B3/es
Priority to US07/077,190 priority patent/US4938595A/en
Priority to JP62183797A priority patent/JPS6337203A/ja
Priority to ES87118905T priority patent/ES2019926B3/es
Application granted granted Critical
Publication of DE3625327C1 publication Critical patent/DE3625327C1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
    • H01M50/50—Current conducting connections for cells or batteries
    • H01M50/572—Means for preventing undesired use or discharge
    • H01M50/574—Devices or arrangements for the interruption of current
    • H01M50/581—Devices or arrangements for the interruption of current in response to temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Vehicle Body Suspensions (AREA)
  • Body Structure For Vehicles (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Eye Examination Apparatus (AREA)
DE3625327A 1986-07-26 1986-07-26 Lichtelektrische Positionsmesseinrichtung Expired DE3625327C1 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
DE3625327A DE3625327C1 (de) 1986-07-26 1986-07-26 Lichtelektrische Positionsmesseinrichtung
DE3705653A DE3705653C1 (en) 1986-07-26 1987-02-21 Photoelectric position-measuring device
DE8787106621T DE3762455D1 (de) 1986-07-26 1987-05-07 Lichtelektrische positionsmesseinrichtung.
AT87106621T ATE52328T1 (de) 1986-07-26 1987-05-07 Lichtelektrische positionsmesseinrichtung.
EP87106621A EP0254823B1 (de) 1986-07-26 1987-05-07 Lichtelektrische Positionsmesseinrichtung
ES87106621T ES2015555B3 (es) 1986-07-26 1987-05-07 Dispositivo de medicion de posicion electrico de luz
US07/077,190 US4938595A (en) 1986-07-26 1987-07-24 Diffraction photoelectric displacement measuring device
JP62183797A JPS6337203A (ja) 1986-07-26 1987-07-24 光電位置測定装置
ES87118905T ES2019926B3 (es) 1986-07-26 1987-12-19 Dispositivo de medicion de la posicion fotoelectrica

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3625327A DE3625327C1 (de) 1986-07-26 1986-07-26 Lichtelektrische Positionsmesseinrichtung

Publications (1)

Publication Number Publication Date
DE3625327C1 true DE3625327C1 (de) 1988-02-18

Family

ID=6306044

Family Applications (3)

Application Number Title Priority Date Filing Date
DE3625327A Expired DE3625327C1 (de) 1986-07-26 1986-07-26 Lichtelektrische Positionsmesseinrichtung
DE3705653A Expired DE3705653C1 (en) 1986-07-26 1987-02-21 Photoelectric position-measuring device
DE8787106621T Expired - Fee Related DE3762455D1 (de) 1986-07-26 1987-05-07 Lichtelektrische positionsmesseinrichtung.

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE3705653A Expired DE3705653C1 (en) 1986-07-26 1987-02-21 Photoelectric position-measuring device
DE8787106621T Expired - Fee Related DE3762455D1 (de) 1986-07-26 1987-05-07 Lichtelektrische positionsmesseinrichtung.

Country Status (6)

Country Link
US (1) US4938595A (enExample)
EP (1) EP0254823B1 (enExample)
JP (1) JPS6337203A (enExample)
AT (1) ATE52328T1 (enExample)
DE (3) DE3625327C1 (enExample)
ES (2) ES2015555B3 (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0279944A3 (en) * 1987-02-21 1988-12-07 Dr. Johannes Heidenhain Gmbh Photoelectrical position measurement device
DE3921406A1 (de) * 1988-06-29 1990-01-04 Hitachi Ltd Optische integrierte schaltung und optisches geraet
DE3836703A1 (de) * 1988-10-28 1990-05-03 Heidenhain Gmbh Dr Johannes Winkelmesseinrichtung
DE3918726C1 (enExample) * 1989-06-08 1991-01-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
DE4011718A1 (de) * 1990-04-11 1991-10-17 Heidenhain Gmbh Dr Johannes Integriert-optische sensoreinrichtung
DE4013566A1 (de) * 1990-04-27 1991-11-07 Heidenhain Gmbh Dr Johannes Winkelmesseinrichtung
DE4113046A1 (de) * 1991-04-22 1992-11-05 Jenoptik Jena Gmbh Optoelektronisches positionsmessgeraet
DE4302313A1 (de) * 1993-01-28 1994-08-04 Heidenhain Gmbh Dr Johannes Mehrkoordinaten-Meßeinrichtung
DE10013725A1 (de) * 2000-03-21 2001-10-11 Hannover Laser Zentrum Meßvorrichtung sowie Verfahren zur Messung eines Weges bei einer Relativbewegung zwischen der Meßvorrichtung und einem Maßstab, der eine Meßspur mit einem Beugungsgitter aufweist, sowie miniaturisierter optischer Abtastkopf

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3901534C1 (enExample) * 1989-01-20 1990-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
GB2239088B (en) * 1989-11-24 1994-05-25 Ricoh Kk Optical movement measuring method and apparatus
DE58905184D1 (de) * 1989-12-23 1993-09-09 Heidenhain Gmbh Dr Johannes Einrichtung mit wenigstens einem wellenleiterkoppler.
DE58907622D1 (de) * 1989-12-23 1994-06-09 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung.
DE4006365A1 (de) * 1990-03-01 1991-10-17 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
DE4007968A1 (de) * 1990-03-13 1991-09-19 Heidenhain Gmbh Dr Johannes Optische vorrichtung
ATE108897T1 (de) * 1991-05-24 1994-08-15 Heidenhain Gmbh Dr Johannes Vorrichtung zum ein- und/oder auskoppeln von lichtstrahlen mit einem integriert-optischen baustein.
DE59302118D1 (de) * 1993-05-21 1996-05-09 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung
US5555470A (en) * 1993-10-12 1996-09-10 The Regents Of The University Of Michigan Single wave linear interferometric force transducer
DE19917950A1 (de) 1999-04-21 2000-10-26 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung
DE10058239B4 (de) 2000-11-17 2012-01-26 Dr. Johannes Heidenhain Gmbh Positionsmeßeinrichtung
US8699836B2 (en) * 2009-07-07 2014-04-15 Alcatel Lucent Optical coupler
KR200470341Y1 (ko) * 2012-09-10 2013-12-09 오창준 과채류 접목용 접목 클립
JP6236139B1 (ja) * 2016-12-08 2017-11-22 藤森工業株式会社 詰め替え容器の注出用スパウト及び包装容器の注出ユニットとの連結構造
CN112097644B (zh) * 2020-08-24 2021-12-17 中国科学院长春光学精密机械与物理研究所 拼接光栅位移测量系统及测量方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1270875A (en) * 1968-10-02 1972-04-19 Sony Corp Displacement measuring instrument
EP0006052B1 (fr) * 1978-05-26 1981-01-21 Thomson-Csf Structure optique compacte à source intégrée
DE3316144A1 (de) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Verfahren und vorrichtung zum messen des ausmasses einer bewegung
JPS59164914A (ja) * 1983-03-10 1984-09-18 Yokogawa Hokushin Electric Corp 光学式スケ−ル読取装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2229996A1 (de) * 1972-06-20 1974-01-10 Leitz Ernst Gmbh Fotoelektrischer schrittgeber fuer laengen- und winkelmessung
GB1443220A (en) * 1972-12-19 1976-07-21 Leitz Ernst Gmbh Photo-electric incremental transducer
US4180704A (en) * 1978-06-28 1979-12-25 International Business Machines Corporation Detection circuit for a bi-directional, self-imaging grating detector
GB2043240A (en) * 1979-03-01 1980-10-01 Post Office Improvements in or relating to the switching of signals
FR2504256A1 (fr) * 1981-04-16 1982-10-22 Euromask Procede et dispositif de mesure optique de deplacement et application aux photorepeteurs sur tranche
US4445780A (en) * 1982-03-01 1984-05-01 The United States Of America As Represented By The Secretary Of The Navy Fiber optic rotation-sensing gyroscope with (3×2) coupler
US4629886A (en) * 1983-03-23 1986-12-16 Yokogawa Hokushin Electric Corporation High resolution digital diffraction grating scale encoder
FR2546309B1 (fr) * 1983-05-19 1986-07-04 Yi Yan Alfredo Structure de guidage optique utilisant un reseau de diffraction
DD221828A1 (de) * 1983-09-01 1985-05-02 Zeiss Jena Veb Carl Einrichtung zur fotoelektrischen abtastung von teilungen im auflicht
DE3536497A1 (de) * 1984-10-16 1986-04-17 Mitsubishi Denki K.K., Tokio/Tokyo Vorrichtung zur erfassung von fokussierungsfehlern in einer kopfanordnung fuer optische scheiben

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1270875A (en) * 1968-10-02 1972-04-19 Sony Corp Displacement measuring instrument
EP0006052B1 (fr) * 1978-05-26 1981-01-21 Thomson-Csf Structure optique compacte à source intégrée
DE3316144A1 (de) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Verfahren und vorrichtung zum messen des ausmasses einer bewegung
JPS59164914A (ja) * 1983-03-10 1984-09-18 Yokogawa Hokushin Electric Corp 光学式スケ−ル読取装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Burns, Willian K. and A.Fenner Milton: "3x2 Channel Waveguide Gyroscope Couplers: Theory". In: IEEE Journal of Quantum Electronics, Vol. QE-18, No. 10, Oct. 1982, p. 1790-1796 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0279944A3 (en) * 1987-02-21 1988-12-07 Dr. Johannes Heidenhain Gmbh Photoelectrical position measurement device
DE3921406A1 (de) * 1988-06-29 1990-01-04 Hitachi Ltd Optische integrierte schaltung und optisches geraet
DE3836703A1 (de) * 1988-10-28 1990-05-03 Heidenhain Gmbh Dr Johannes Winkelmesseinrichtung
DE3918726C1 (enExample) * 1989-06-08 1991-01-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
DE4011718A1 (de) * 1990-04-11 1991-10-17 Heidenhain Gmbh Dr Johannes Integriert-optische sensoreinrichtung
EP0451475A3 (en) * 1990-04-11 1992-01-15 Dr. Johannes Heidenhain Gmbh Integrated optical sensor arrangement
DE4013566A1 (de) * 1990-04-27 1991-11-07 Heidenhain Gmbh Dr Johannes Winkelmesseinrichtung
DE4113046A1 (de) * 1991-04-22 1992-11-05 Jenoptik Jena Gmbh Optoelektronisches positionsmessgeraet
DE4302313A1 (de) * 1993-01-28 1994-08-04 Heidenhain Gmbh Dr Johannes Mehrkoordinaten-Meßeinrichtung
DE10013725A1 (de) * 2000-03-21 2001-10-11 Hannover Laser Zentrum Meßvorrichtung sowie Verfahren zur Messung eines Weges bei einer Relativbewegung zwischen der Meßvorrichtung und einem Maßstab, der eine Meßspur mit einem Beugungsgitter aufweist, sowie miniaturisierter optischer Abtastkopf

Also Published As

Publication number Publication date
EP0254823B1 (de) 1990-04-25
JPS6337203A (ja) 1988-02-17
US4938595A (en) 1990-07-03
JPH0579122B2 (enExample) 1993-11-01
ES2019926B3 (es) 1991-07-16
DE3705653C1 (en) 1988-07-28
DE3762455D1 (de) 1990-05-31
EP0254823A3 (en) 1989-07-26
ES2015555B3 (es) 1990-09-01
ATE52328T1 (de) 1990-05-15
EP0254823A2 (de) 1988-02-03

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