DE3582353D1 - Apparat mit vakuum-zu-vakuum-zugangseinrichtung. - Google Patents
Apparat mit vakuum-zu-vakuum-zugangseinrichtung.Info
- Publication number
- DE3582353D1 DE3582353D1 DE8585102202T DE3582353T DE3582353D1 DE 3582353 D1 DE3582353 D1 DE 3582353D1 DE 8585102202 T DE8585102202 T DE 8585102202T DE 3582353 T DE3582353 T DE 3582353T DE 3582353 D1 DE3582353 D1 DE 3582353D1
- Authority
- DE
- Germany
- Prior art keywords
- vacuum
- access device
- vacuum access
- access
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/600,629 US4544317A (en) | 1984-04-16 | 1984-04-16 | Vacuum-to-vacuum entry system apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3582353D1 true DE3582353D1 (de) | 1991-05-08 |
Family
ID=24404386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585102202T Expired - Fee Related DE3582353D1 (de) | 1984-04-16 | 1985-02-28 | Apparat mit vakuum-zu-vakuum-zugangseinrichtung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4544317A (de) |
EP (1) | EP0158800B1 (de) |
JP (1) | JPS60219753A (de) |
DE (1) | DE3582353D1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4879458A (en) * | 1985-08-15 | 1989-11-07 | R. J. Brunfeldt Company, Inc. | Automatic sample system for mass spectrometer |
US5044871A (en) * | 1985-10-24 | 1991-09-03 | Texas Instruments Incorporated | Integrated circuit processing system |
SE456570B (sv) * | 1986-01-20 | 1988-10-17 | Applied Vacuum Scandinavia Ab | Sett att transportera alster vid en tillverknings- och/eller efterbehandlingsprocess |
US4676884A (en) * | 1986-07-23 | 1987-06-30 | The Boc Group, Inc. | Wafer processing machine with evacuated wafer transporting and storage system |
US4726689A (en) * | 1986-10-22 | 1988-02-23 | Eclipse Ion Technology, Inc. | Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment |
US4795300A (en) * | 1988-01-20 | 1989-01-03 | The Perkin-Elmer Corporation | Loading apparatus for a work chamber |
US5447409A (en) * | 1989-10-20 | 1995-09-05 | Applied Materials, Inc. | Robot assembly |
US5227708A (en) * | 1989-10-20 | 1993-07-13 | Applied Materials, Inc. | Two-axis magnetically coupled robot |
EP0600851B1 (de) * | 1989-10-20 | 1999-02-03 | Applied Materials, Inc. | Robotereinrichtung |
US5133561A (en) * | 1990-02-26 | 1992-07-28 | Tokyo Electron Limited | Sealing device |
KR100303075B1 (ko) | 1992-11-06 | 2001-11-30 | 조셉 제이. 스위니 | 집적회로 웨이퍼 이송 방법 및 장치 |
US5376862A (en) * | 1993-01-28 | 1994-12-27 | Applied Materials, Inc. | Dual coaxial magnetic couplers for vacuum chamber robot assembly |
GB9808175D0 (en) * | 1998-04-17 | 1998-06-17 | Coles Timothy P | Rotary gas sanitiser |
JP2001210576A (ja) * | 2000-01-25 | 2001-08-03 | Nikon Corp | 荷重キャンセル機構、真空チャンバ結合体、露光装置及び半導体デバイスの製造方法 |
JP4364196B2 (ja) * | 2005-01-05 | 2009-11-11 | 三星モバイルディスプレイ株式會社 | トレイ用整列システム |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2695198A (en) * | 1947-07-16 | 1954-11-23 | Sperry Corp | Air bearing |
US2814512A (en) * | 1952-06-03 | 1957-11-26 | Bristol Aeroplane Co Ltd | Sealing devices |
US3260383A (en) * | 1964-08-04 | 1966-07-12 | Vacuum Processes Inc | Method and apparatus for loading and unloading a high vacuum process chamber |
US3428197A (en) * | 1966-04-13 | 1969-02-18 | Ibm | Vacuum entry mechanism |
US3733490A (en) * | 1971-01-08 | 1973-05-15 | En Atomique | Rotary target for electrostatic accelerator which operates as a neutron generator |
US3833018A (en) * | 1973-02-21 | 1974-09-03 | Pass Port Syst Corp | Low leakage vacuum valve and chamber using same |
JPS5315466B2 (de) * | 1973-04-28 | 1978-05-25 | ||
DE2610045C2 (de) * | 1976-03-11 | 1982-06-16 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen | Gasgesperrte Wellendichtung |
IT1089360B (it) * | 1977-09-27 | 1985-06-18 | Lullini Dino Cesari Giogio & B | Sistema per la tenuta ermetica mediante aria compressa fra su perficie parallele di organi di macchine in relazione operativa con movimento relativo partico larmente di macchine erogatrici di dosi di polvere in contenito ri flaconi caricabili e sigillabili in ambiente sterile |
US4118042A (en) * | 1977-09-27 | 1978-10-03 | The United States Of America As Represented By The United States Department Of Energy | Air bearing vacuum seal assembly |
US4162391A (en) * | 1977-12-19 | 1979-07-24 | Sciaky Bros., Inc. | Sliding vacuum seal means |
US4191385A (en) * | 1979-05-15 | 1980-03-04 | Fox Wayne L | Vacuum-sealed gas-bearing assembly |
US4361332A (en) * | 1980-11-12 | 1982-11-30 | The United States Of America As Represented By The United States Department Of Energy | Rotatable seal assembly |
DE3223703C2 (de) * | 1982-06-25 | 1984-05-30 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 4200 Oberhausen | Gasgesperrte Wellendichtung mit radialem Dichtspalt |
US4509160A (en) * | 1983-12-05 | 1985-04-02 | Eggers Fred S | Disc drive assembly |
-
1984
- 1984-04-16 US US06/600,629 patent/US4544317A/en not_active Expired - Lifetime
-
1985
- 1985-01-14 JP JP60003417A patent/JPS60219753A/ja active Granted
- 1985-02-28 EP EP85102202A patent/EP0158800B1/de not_active Expired
- 1985-02-28 DE DE8585102202T patent/DE3582353D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0262447B2 (de) | 1990-12-25 |
EP0158800A3 (en) | 1987-12-09 |
EP0158800B1 (de) | 1991-04-03 |
EP0158800A2 (de) | 1985-10-23 |
JPS60219753A (ja) | 1985-11-02 |
US4544317A (en) | 1985-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |