DE3536781C2 - - Google Patents
Info
- Publication number
- DE3536781C2 DE3536781C2 DE19853536781 DE3536781A DE3536781C2 DE 3536781 C2 DE3536781 C2 DE 3536781C2 DE 19853536781 DE19853536781 DE 19853536781 DE 3536781 A DE3536781 A DE 3536781A DE 3536781 C2 DE3536781 C2 DE 3536781C2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- layers
- dopant
- substrate
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 19
- 239000002019 doping agent Substances 0.000 claims description 18
- 238000009792 diffusion process Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 238000005253 cladding Methods 0.000 claims description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- 229910052810 boron oxide Inorganic materials 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 33
- 239000011521 glass Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005495 cold plasma Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853536781 DE3536781A1 (de) | 1985-10-16 | 1985-10-16 | Verfahren zur herstellung eines planaren lichtwellenleiters |
| GB8624678A GB2181861B (en) | 1985-10-16 | 1986-10-15 | Method of making a planar lightwave guide |
| US06/919,402 US4756734A (en) | 1985-10-16 | 1986-10-16 | Methods of making planar lightwave guides |
| NL8602603A NL8602603A (nl) | 1985-10-16 | 1986-10-16 | Werkwijze voor het vervaardigen van een vlakke lichtgolfgeleider. |
| FR868614366A FR2590368B1 (fr) | 1985-10-16 | 1986-10-16 | Procede de production d'un guide d'ondes lumineuses plan |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853536781 DE3536781A1 (de) | 1985-10-16 | 1985-10-16 | Verfahren zur herstellung eines planaren lichtwellenleiters |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3536781A1 DE3536781A1 (de) | 1987-04-16 |
| DE3536781C2 true DE3536781C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-10-22 |
Family
ID=6283645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853536781 Granted DE3536781A1 (de) | 1985-10-16 | 1985-10-16 | Verfahren zur herstellung eines planaren lichtwellenleiters |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3536781A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3926023A1 (de) * | 1988-09-06 | 1990-03-15 | Schott Glaswerke | Cvd-beschichtungsverfahren zur herstellung von schichten und vorrichtung zur durchfuehrung des verfahrens |
| DE19831719A1 (de) * | 1998-07-15 | 2000-01-20 | Alcatel Sa | Verfahren zur Herstellung planarer Wellenleiterstrukturen sowie Wellenleiterstruktur |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2912960A1 (de) * | 1979-03-31 | 1980-10-09 | Licentia Gmbh | Verfahren zur herstellung von lichtleitfasern |
| DE2930781A1 (de) * | 1979-07-28 | 1981-02-12 | Licentia Gmbh | Verfahren zur herstellung einer lichtleitfaser |
| DE3232888A1 (de) * | 1982-09-04 | 1984-03-08 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zur herstellung eines lichtwellenleiters |
-
1985
- 1985-10-16 DE DE19853536781 patent/DE3536781A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3536781A1 (de) | 1987-04-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3536780C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE69212575T2 (de) | Verfahren zur Herstellung eines optischen Wellenleiters | |
| DE19537379C2 (de) | Optische Faservorform, Verfahren zur Herstellung und Verwendung derselben | |
| DE3520813C2 (de) | Verfahren zur Herstellung eines integrierten optischen Lichtwellenleiters und Vorrichtung zur Durchführung des Verfahrens | |
| DE3888330T2 (de) | Optischer Wellenleiter. | |
| DE3047589C2 (de) | Verfahren zur Herstellung von Lichtwellenleitern aus Glas für optische Schaltkreise und Lichtwellenleiter herstellbar nach diesem Verfahren | |
| DE69526003T2 (de) | Optisches Gerät mit Substrat und Wellenleiterstruktur mit thermisch angepassten Grenzflächen | |
| DE69127680T2 (de) | Verfahren zur Herstellung einer länglichen integrierten optischen Vorrichtung mit wenigstens einem seitlich begrenzten Wellenleiter darin | |
| DE69702299T2 (de) | Verfahren zur herstellung einer wellenleiterpaar mit optischem mantel | |
| DE3873300T2 (de) | Verfahren zur herstellung von mikro-lichtleitern mit niedrigen optischen ausbreitungsverlusten durch aufbringen von mehrfachschichten. | |
| DE69113081T2 (de) | Optische Wellenleiterschaltung und Verfahren zum Justieren einer ihrer Charakteristiken. | |
| DE2660697C2 (de) | Verfahren zur Herstellung eines Glas-Rohlings | |
| DE69625155T2 (de) | Optische Einmodennachrichtenfaser und Verfahren zur Herstellung der Faser | |
| DE69826800T2 (de) | Integriert-optischer Wellenleiter und Verfahren zu seiner Herstellung | |
| CH641427A5 (de) | Verfahren zur herstellung einer monomode-lichtleitfaser mit elliptischem kernquerschnitt. | |
| DE3641285C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE19831719A1 (de) | Verfahren zur Herstellung planarer Wellenleiterstrukturen sowie Wellenleiterstruktur | |
| DE3229432C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| DE2733872B2 (de) | Optische Gradienten-Faser | |
| GB2181861A (en) | Method of making a planar lightwave guide | |
| DE2804467A1 (de) | Optische faser und verfahren zur herstellung von optischen fasern | |
| DE69307937T2 (de) | Verfahren und Vorrichtung zur Herstellung von Glasdünnschichten | |
| DE69608664T2 (de) | Verfahren zur Herstellung eines Hohlraumfreien optischen Wellenleiters | |
| DE3536781C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| EP1182473A2 (de) | Doppelbrechungsfreie passive optische Komponente |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| AG | Has addition no. |
Ref country code: DE Ref document number: 3630479 Format of ref document f/p: P |
|
| 8364 | No opposition during term of opposition | ||
| AG | Has addition no. |
Ref country code: DE Ref document number: 3630479 Format of ref document f/p: P |
|
| 8339 | Ceased/non-payment of the annual fee |