DE3529021C2 - - Google Patents
Info
- Publication number
- DE3529021C2 DE3529021C2 DE19853529021 DE3529021A DE3529021C2 DE 3529021 C2 DE3529021 C2 DE 3529021C2 DE 19853529021 DE19853529021 DE 19853529021 DE 3529021 A DE3529021 A DE 3529021A DE 3529021 C2 DE3529021 C2 DE 3529021C2
- Authority
- DE
- Germany
- Prior art keywords
- photoresist film
- layer
- recesses
- intermediate layer
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002184 metal Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- 238000011161 development Methods 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000001465 metallisation Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 150000002941 palladium compounds Chemical class 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims 2
- 238000012822 chemical development Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 210000002105 tongue Anatomy 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 3
- 108090000623 proteins and genes Proteins 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005520 electrodynamics Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2002/041—Electromagnetic transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/22—Manufacturing print heads
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853529021 DE3529021A1 (de) | 1985-08-13 | 1985-08-13 | Verfahren zur herstellung von einseitig frei beweglichen metallstrukturen, insbesondere von metallischen antriebselementen fuer einen tintendruckkopf |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853529021 DE3529021A1 (de) | 1985-08-13 | 1985-08-13 | Verfahren zur herstellung von einseitig frei beweglichen metallstrukturen, insbesondere von metallischen antriebselementen fuer einen tintendruckkopf |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3529021A1 DE3529021A1 (de) | 1987-02-19 |
| DE3529021C2 true DE3529021C2 (OSRAM) | 1990-12-20 |
Family
ID=6278416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853529021 Granted DE3529021A1 (de) | 1985-08-13 | 1985-08-13 | Verfahren zur herstellung von einseitig frei beweglichen metallstrukturen, insbesondere von metallischen antriebselementen fuer einen tintendruckkopf |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3529021A1 (OSRAM) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4544933A (en) * | 1983-09-20 | 1985-10-01 | Siemens Aktiengesellschaft | Apparatus and method for ink droplet ejection for a printer |
| US4626323A (en) * | 1985-04-10 | 1986-12-02 | Siemens Aktiengesellschaft | Method for the manufacture of a printing element for an ink droplet printing unit |
-
1985
- 1985-08-13 DE DE19853529021 patent/DE3529021A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3529021A1 (de) | 1987-02-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |