DE3483490D1 - Verfahren und vorrichtung zur herstellung feinen pulvers. - Google Patents

Verfahren und vorrichtung zur herstellung feinen pulvers.

Info

Publication number
DE3483490D1
DE3483490D1 DE8484105147T DE3483490T DE3483490D1 DE 3483490 D1 DE3483490 D1 DE 3483490D1 DE 8484105147 T DE8484105147 T DE 8484105147T DE 3483490 T DE3483490 T DE 3483490T DE 3483490 D1 DE3483490 D1 DE 3483490D1
Authority
DE
Germany
Prior art keywords
fine powder
producing fine
producing
powder
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8484105147T
Other languages
German (de)
English (en)
Inventor
Eiji C O Itami Works Kamijo
Matsuo C O Itami Works Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE3483490D1 publication Critical patent/DE3483490D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B01J12/002—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor carried out in the plasma state
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/121—Coherent waves, e.g. laser beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/16—Making metallic powder or suspensions thereof using chemical processes
    • B22F9/30—Making metallic powder or suspensions thereof using chemical processes with decomposition of metal compounds, e.g. by pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C01B21/0724—Preparation by direct nitridation of aluminium using a plasma
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
    • C01B21/0763—Preparation from titanium, zirconium or hafnium halides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
    • C01B21/0765—Preparation by carboreductive nitridation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/0828—Carbonitrides or oxycarbonitrides of metals, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C01B32/977—Preparation from organic compounds containing silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/221—Remelting metals with heating by wave energy or particle radiation by electromagnetic waves, e.g. by gas discharge lamps
    • C22B9/223—Remelting metals with heating by wave energy or particle radiation by electromagnetic waves, e.g. by gas discharge lamps by laser beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • General Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Toxicology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Silicon Compounds (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
DE8484105147T 1983-05-07 1984-05-07 Verfahren und vorrichtung zur herstellung feinen pulvers. Expired - Lifetime DE3483490D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58079728A JPS59206042A (ja) 1983-05-07 1983-05-07 微粉末の製造方法及び製造装置

Publications (1)

Publication Number Publication Date
DE3483490D1 true DE3483490D1 (de) 1990-12-06

Family

ID=13698258

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484105147T Expired - Lifetime DE3483490D1 (de) 1983-05-07 1984-05-07 Verfahren und vorrichtung zur herstellung feinen pulvers.

Country Status (4)

Country Link
US (1) US4556416A (OSRAM)
EP (1) EP0124901B1 (OSRAM)
JP (1) JPS59206042A (OSRAM)
DE (1) DE3483490D1 (OSRAM)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4895628A (en) * 1985-02-12 1990-01-23 The Dow Chemical Company Process for the preparation of submicron-sized boron carbide powders
KR870700028A (ko) * 1985-02-12 1987-02-28 리챠드 지, 워터맨 초미립 탄화붕소 분말의 제조방법
JPS61200850A (ja) * 1985-02-28 1986-09-05 Daido Steel Co Ltd 化合物超微粒子の製造方法
US4689129A (en) * 1985-07-16 1987-08-25 The Dow Chemical Company Process for the preparation of submicron-sized titanium diboride
US4687753A (en) * 1985-10-25 1987-08-18 Exxon Research And Engineering Company Laser produced iron carbide-based catalysts
JPS62102828A (ja) * 1985-10-28 1987-05-13 Daido Steel Co Ltd 化合物微粒子の製造方法
US4758267A (en) * 1985-12-23 1988-07-19 Energy Science Laboratories, Inc. Ultrafine particle and fiber production in microgravity
US4784686A (en) * 1987-04-24 1988-11-15 The United States Of America As Represented By The United States Department Of Energy Synthesis of ultrafine powders by microwave heating
KR910001933B1 (ko) * 1987-04-27 1991-03-30 더 다우 케미칼 캄파니 고경도 및 인성을 갖는 이붕소화 티탄/탄화붕소 조성물
US5032242A (en) * 1987-04-27 1991-07-16 The Dow Chemical Company Titanium diboride/boron carbide composites with high hardness and toughness
US4957884A (en) * 1987-04-27 1990-09-18 The Dow Chemical Company Titanium diboride/boron carbide composites with high hardness and toughness
DE4214720C2 (de) * 1992-05-04 1994-10-13 Starck H C Gmbh Co Kg Vorrichtung zur Herstellung feinteiliger Metall- und Keramikpulver
US5460701A (en) * 1993-07-27 1995-10-24 Nanophase Technologies Corporation Method of making nanostructured materials
US5525320A (en) * 1994-07-11 1996-06-11 University Of Cincinnati Process for aluminum nitride powder production
AU3495595A (en) * 1994-08-25 1996-03-22 Qqc, Inc. Nanoscale particles, and uses for same
WO1997048651A2 (en) * 1996-06-20 1997-12-24 Qqc, Inc. Method of making ultrafine materials including metals, ceramics, and diamonds
CA2259691A1 (en) * 1996-07-11 1998-01-22 The University Of Cincinnati Electrically assisted synthesis of particles and films with precisely controlled characteristics
US5958348A (en) * 1997-02-28 1999-09-28 Nanogram Corporation Efficient production of particles by chemical reaction
US6919054B2 (en) * 2002-04-10 2005-07-19 Neophotonics Corporation Reactant nozzles within flowing reactors
US6849334B2 (en) 2001-08-17 2005-02-01 Neophotonics Corporation Optical materials and optical devices
US7384680B2 (en) * 1997-07-21 2008-06-10 Nanogram Corporation Nanoparticle-based power coatings and corresponding structures
US6290735B1 (en) 1997-10-31 2001-09-18 Nanogram Corporation Abrasive particles for surface polishing
US6726990B1 (en) 1998-05-27 2004-04-27 Nanogram Corporation Silicon oxide particles
US20010051118A1 (en) * 1999-07-21 2001-12-13 Ronald J. Mosso Particle production apparatus
DE19821144A1 (de) * 1998-05-12 1999-11-18 Degussa Verfahren zur Herstellung von pulverförmigen heterogenen Stoffen
CN1308968C (zh) 1999-03-10 2007-04-04 内诺格雷姆公司 氧化锌颗粒
US6723435B1 (en) * 2001-08-28 2004-04-20 Nanogram Corporation Optical fiber preforms
DE102004033320A1 (de) * 2004-07-09 2006-01-26 Basf Ag Verfahren und Vorrichtung zur Herstellung von Nanopartikeln
US20060225534A1 (en) * 2004-10-13 2006-10-12 The Research Foundation Of State University Of New York Production of nickel nanoparticles from a nickel precursor via laser pyrolysis
US20060266216A1 (en) * 2005-05-24 2006-11-30 Cabot Corporation High-throughput powder synthesis system
WO2007086367A1 (ja) * 2006-01-27 2007-08-02 Konica Minolta Medical & Graphic, Inc. Ｓｉ／Ｓｉ３Ｎ４型ナノ粒子、該ナノ粒子を用いた生体物質標識剤及び前記ナノ粒子の製造方法
CN104183854A (zh) 2008-10-06 2014-12-03 昭和电工株式会社 碳氮化物混合物粒子或碳氮氧化物混合物粒子的制造方法及其用途
FR2945035B1 (fr) * 2009-04-29 2011-07-01 Commissariat Energie Atomique Procede d'elaboration d'une poudre comprenant du carbone, du silicium et du bore, le silicium se presentant sous forme de carbure de silicium et le bore se presentant sous forme de carbure de bore et/ou de bore seul
WO2020252247A1 (en) * 2019-06-12 2020-12-17 Auburn University Novel additive nanomanufacturing system and method
TWI748537B (zh) * 2019-06-28 2021-12-01 美商壹久公司 具有輔助氣體流的處理系統與方法
FR3151321A1 (fr) * 2023-07-19 2025-01-24 Renault S.A.S Procédé de formation de silicium à partir de silice et silicium passivé

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1087869B (de) * 1955-08-08 1960-08-25 Siemens Ag Verfahren zum Gewinnen hochreiner Metalle oder Halbleitergrundstoffe
FR1150562A (fr) * 1956-05-12 1958-01-15 Saint Gobain Procédé pour la fabrication de métaux de haute pureté
DE1066549B (de) * 1957-07-17 1959-10-08 Societe Anonyme des Manufactures des Glaces et Produits Chimiques de Saint-Gobain, Chauny &. Cirey, Paris Verfahren zur Herstellung von chemischen Verbindungen von hohem Reinheitsgrad
US3545922A (en) * 1964-12-10 1970-12-08 Starck Hermann C Fa Process for the preparation of finely divided,non-pyrophoric nitrides of zirconium,hafnium,niobium and tantalum
NL6608845A (OSRAM) * 1965-06-25 1966-12-27
US3535103A (en) * 1968-04-10 1970-10-20 Atomic Energy Commission Method of making metal alloy powders
US3671220A (en) * 1969-05-19 1972-06-20 Nordstjernan Rederi Ab Process for the production of powdered metals
US3959649A (en) * 1973-12-27 1976-05-25 Jersey Nuclear-Avco Isotopes, Inc. Collection of ions in a plasma by magnetic field acceleration with selective polarization
JPS5536960A (en) * 1978-09-05 1980-03-14 Mitsubishi Electric Corp Method for cleaning semiconductor producing apparatus
US4289952A (en) * 1979-12-12 1981-09-15 Massachusetts Institute Of Technology Process for controlling powder size with optical energy
JPS56136634A (en) * 1980-03-29 1981-10-26 Res Dev Corp Of Japan Production of ultra-fine powder and particle using laser beam

Also Published As

Publication number Publication date
EP0124901A2 (en) 1984-11-14
EP0124901B1 (en) 1990-10-31
JPH0366014B2 (OSRAM) 1991-10-15
US4556416A (en) 1985-12-03
JPS59206042A (ja) 1984-11-21
EP0124901A3 (en) 1988-01-07

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